JPH03122531U - - Google Patents

Info

Publication number

JPH03122531U

JPH03122531U JP3049790U JP3049790U JPH03122531U JP H03122531 U JPH03122531 U JP H03122531U JP 3049790 U JP3049790 U JP 3049790U JP 3049790 U JP3049790 U JP 3049790U JP H03122531 U JPH03122531 U JP H03122531U

Authority

JP

Japan

Prior art keywords

quartz

silicon wafer

heat treatment

high temperature

quartz boat

Prior art date

1990-03-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000010453 quartz Substances 0.000 claims description 10
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
• 229910052710 silicon Inorganic materials 0.000 claims description 5
• 239000010703 silicon Substances 0.000 claims description 5
• 238000010438 heat treatment Methods 0.000 claims 2
• 230000017525 heat dissipation Effects 0.000 claims 1
• 238000012986 modification Methods 0.000 description 1
• 230000004048 modification Effects 0.000 description 1