JPH03122415U - - Google Patents
Info
- Publication number
- JPH03122415U JPH03122415U JP3100990U JP3100990U JPH03122415U JP H03122415 U JPH03122415 U JP H03122415U JP 3100990 U JP3100990 U JP 3100990U JP 3100990 U JP3100990 U JP 3100990U JP H03122415 U JPH03122415 U JP H03122415U
- Authority
- JP
- Japan
- Prior art keywords
- micro
- molded object
- observed image
- faces
- switching means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 5
- 238000007689 inspection Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Microscoopes, Condenser (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
第１図はこの考案の一実施例の一部を切欠いて
示す側面図、第２図は第１図示の第２のミラーの
斜視図、第３図ａおよびｂはそれぞれ、ＴＡＢテ
ープの表面および裏面の観察像の説明図、第４図
はＴＡＢテープの一例を示す平面図、第５図は表
裏面の観察像の関係を明らかにするために検査対
象物として想定した長方体の斜視図、第６図ａお
よびｂはそれぞれ、第５図示の長方体の表面およ
び裏面の観察像の説明図、第７図はこの考案の一
実施例におけるスライド機構を示す平面図、第８
図はそのフローテイングベースを示す断面図、第
９図は第８図の−線に沿う断面図、第１０図
は第８図の−線に沿う断面図、第１１図は第
７図示のＸ−Ｙ軸テーブルの固定機構部を示す縦
断面図、第１２図はそのＸ−Ｙ軸テーブルの固定
機構部を分解して示す縦断面図である。
１……顕微鏡台、２……Ｘ−Ｙ軸テーブル、３
……テーブルベース、６……顕微鏡、１０……Ｔ
ＡＢテープ（微細成形物）、２２……第４のミラ
ー（切換手段）。
FIG. 1 is a partially cutaway side view of an embodiment of the invention, FIG. 2 is a perspective view of the second mirror shown in FIG. 3, and FIGS. An explanatory diagram of an observed image of the back side, Fig. 4 is a plan view showing an example of a TAB tape, and Fig. 5 is a perspective view of a rectangular body assumed as an object to be inspected to clarify the relationship between observed images of the front and back sides. , FIGS. 6a and 6b are explanatory diagrams of observed images of the front and back surfaces of the rectangular body shown in FIG.
The figure is a sectional view showing the floating base, FIG. 9 is a sectional view taken along the - line in FIG. 8, FIG. 10 is a sectional view taken along the - line in FIG. 8, and FIG. 11 is a sectional view taken along the - A vertical sectional view showing the fixing mechanism of the Y-axis table; FIG. 12 is an exploded longitudinal sectional view showing the fixing mechanism of the X-Y-axis table. 1...Microscope table, 2...X-Y axis table, 3
...Table base, 6...Microscope, 10...T
AB tape (fine molded product), 22... fourth mirror (switching means).
Claims (1)
装置において、 微細成形物の表面と対向し、該微細成形物の表
面の観察像を取り出す第１の光学系と、 前記微細成形物の裏面と対向し、前記微細成形
物の裏面の観察像を、前記微細成形物の表面の観
察像と上下左右の位置関係を一致させて取り出す
第２の光学系と、 前記第１および第２の光学系のいずれか一方か
らの光出力を選択的に取り出す切換手段と、 該切換手段から取り出された光出力を受光して
検査に供する手段と を具備してなることを特徴とする微細成形物の表
裏面検査装置。[Claims for Utility Model Registration] An inspection device for optically inspecting both the front and back surfaces of a micro-molded object, comprising: a first optical system that faces the surface of the micro-molded object and takes out an observed image of the surface of the micro-molded object; , a second optical system that faces the back surface of the micro-molded object and takes out an observed image of the back surface of the micro-molded object while matching the vertical and horizontal positional relationship with the observed image of the surface of the micro-molded object; A switching means for selectively extracting the optical output from either one of the first and second optical systems, and a means for receiving the optical output extracted from the switching means and providing it for inspection. Features: A device for inspecting the front and back surfaces of fine molded products.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3100990U JPH073320Y2 (en) | 1990-03-28 | 1990-03-28 | Front and back surface inspection equipment for fine molded products |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3100990U JPH073320Y2 (en) | 1990-03-28 | 1990-03-28 | Front and back surface inspection equipment for fine molded products |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03122415U true JPH03122415U (en) | 1991-12-13 |
| JPH073320Y2 JPH073320Y2 (en) | 1995-01-30 |
Family
ID=31533736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3100990U Expired - Lifetime JPH073320Y2 (en) | 1990-03-28 | 1990-03-28 | Front and back surface inspection equipment for fine molded products |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH073320Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006105749A (en) * | 2004-10-05 | 2006-04-20 | Shindenshi Corp | Visual inspection device of surface mounting base board |
-
1990
- 1990-03-28 JP JP3100990U patent/JPH073320Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006105749A (en) * | 2004-10-05 | 2006-04-20 | Shindenshi Corp | Visual inspection device of surface mounting base board |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH073320Y2 (en) | 1995-01-30 |
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