JPH03120643A - Magneto-optical recording medium - Google Patents
Magneto-optical recording mediumInfo
- Publication number
- JPH03120643A JPH03120643A JP25933189A JP25933189A JPH03120643A JP H03120643 A JPH03120643 A JP H03120643A JP 25933189 A JP25933189 A JP 25933189A JP 25933189 A JP25933189 A JP 25933189A JP H03120643 A JPH03120643 A JP H03120643A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- film
- rare earth
- laminated film
- coercive force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 15
- 239000007769 metal material Substances 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 abstract description 6
- 229910045601 alloy Inorganic materials 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 abstract description 5
- 230000001934 delay Effects 0.000 abstract 1
- 238000001755 magnetron sputter deposition Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 33
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000003624 transition metals Chemical class 0.000 description 2
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（イ）産業上の利用分野
本発明は書き換え可能な光磁気ディスクのような記録媒
体に関するものであり、持にＰｔ／Ｃ。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a recording medium such as a rewritable magneto-optical disk, and particularly relates to a Pt/C recording medium.
積層膜と希土類−遷移金属を用いる光磁気記録媒体に関
する。The present invention relates to a magneto-optical recording medium using a laminated film and a rare earth-transition metal.
（ロ）従来の技術
Ｐ ｔ ／ Ｃｏ積層膜はＪＡＰＡＮＩＳＥ ＪＯＵ
ＲＮＡＬ ＯＦ ＡＰＰＬＩＥＤ ＰＨＹＳＩＣ
５，Ｖｏｌ、２８．ＮＯ４，ＡＰＲＩＬ、１９８９、Ｌ
６５９〜Ｌ６６０に掲載されており、又、第２図に示す
ようなＰｔ（４）とＣｏ（５）を基板（３）上に積層す
る構造において、膜厚が数１００Å以下の超薄膜領域で
垂直磁化膜になり、積層周期や膜厚などの条件を変える
事とによってカー回転角や保磁力の特性が変わってくる
。(b) Conventional technology Pt/Co laminated film is JAPANISE JOU
RNAL OF APPLIED PHYSIC
5, Vol. 28. NO4, APRIL, 1989, L
659 to L660, and in a structure in which Pt (4) and Co (5) are laminated on a substrate (3) as shown in Fig. 2, in an ultra-thin film region with a film thickness of several hundred Å or less. It becomes a perpendicularly magnetized film, and the Kerr rotation angle and coercive force characteristics change by changing conditions such as the lamination period and film thickness.
第２図に示す構造において、Ｐｔ＝６，０人。In the structure shown in FIG. 2, Pt=6.0 people.
Ｃｏ＝３．５人の周期で１００人の膜厚に積層した膜で
保磁力は１６０（Ｏｅ）である。特開平ｌ−９８１４３
号公報に掲載されているＮ ｉ ／ Ｐ を積層膜にお
いても、その保磁力は数１０（Ｏｅ）であり、ＮｉをＣ
ｏに置き換えた場合、積層周期や膜厚を換える事によっ
て保磁力を大きくする事ができるが、Ｐｔ＝１７人、Ｃ
ｏ＝６人、膜厚２００人での保磁力は４０ Ｑ （Ｑ
ｅ ）が現状のＰ ｔ ／ Ｃ。The coercive force is 160 (Oe) in a film laminated to a thickness of 100 layers with a period of Co=3.5 layers. Japanese Patent Publication No. 1-98143
Even in the case of the Ni/P laminated film published in the publication, its coercive force is several tens of Oe.
If Pt = 17 people, C
The coercive force when o=6 people and film thickness 200 people is 40 Q (Q
e) is the current Pt/C.
積層膜では限度である。This is a limit for laminated films.
（ハ）発明が解決しようとする問題点
ところで、Ｐ ｔ ／ Ｃｏ積層膜は保磁力が数１００
（Ｏｅ ）と小さく、光磁気記録材料として用いる場
合、充分な特性を得る事ができない。(c) Problems to be solved by the invention By the way, the Pt/Co laminated film has a coercive force of several hundreds.
(Oe), and when used as a magneto-optical recording material, sufficient characteristics cannot be obtained.
（ニ）問題点を解決するための手段
そこで、本発明に於いて、Ｐｔ／Ｃｏ積層膜に希土類−
遷移金属を積層した構造とすることを特徴とする特
（ホ）作用
Ｐ −ｔ ／ Ｃｏ積層膜と希土類−遷移金属による交
換結合により保磁力を大きくする事ができる。本発明材
料による光学磁気特性の一例を第３図に示す。保磁力６
（ＫＯｅ）の希土類−遷移金属を下地としてＰ ｔ ／
Ｃｏ積層膜の保磁力を測定した。第３図の特性（ａ）
は従来のＰ ｔ ／ Ｃｏ積層膜のカー回転角の例であ
る。従来のＰ ｔ ／ Ｃｏ積層膜（ａ）が保磁力４０
０（Ｏｅ）である。これに対し希土類−遷移金属を下地
にしたＰ ｔ ／ Ｃｏ積層膜（ｂ）のカー回転角の例
を同図の特性（ｂ）に示す。本案の実施例によればＰ
ｔ ／ Ｃｏ積層膜の保磁力は７００ （Ｏｅ ）と増
大している。又、印加磁場を希土類−遷移金属が持つ保
磁力６（ＫＯｅ）より低い印加磁場２（ＫＯｅ）をかけ
、希土類−遷移金属が持つ磁化の向きを一定方向にした
ままでのＰｔ／Ｃ。(d) Means for solving the problem Therefore, in the present invention, a rare earth-based material is added to the Pt/Co laminated film.
Special effect characterized by a structure in which transition metals are laminated.The coercive force can be increased by exchange coupling between the P-t/Co laminated film and the rare earth-transition metal. An example of the optical magnetic properties of the material of the present invention is shown in FIG. Coercive force 6
(KOe) rare earth-transition metal base Pt/
The coercive force of the Co laminated film was measured. Characteristics in Figure 3 (a)
is an example of the Kerr rotation angle of a conventional Pt/Co laminated film. The conventional Pt/Co laminated film (a) has a coercive force of 40
It is 0 (Oe). On the other hand, an example of the Kerr rotation angle of the Pt/Co laminated film (b) based on a rare earth-transition metal is shown in characteristic (b) of the same figure. According to the embodiment of this proposal, P
The coercive force of the t/Co laminated film is increased to 700 (Oe). Further, an applied magnetic field of 2 (KOe) lower than the coercive force 6 (KOe) of the rare earth-transition metal was applied to Pt/C with the magnetization direction of the rare earth-transition metal kept in a constant direction.
積層膜の光学磁気特性を測定した。第４図にその結果を
示す。カー回転角の磁場方向の中心がずれている事から
、保磁力の増大結果は、下地層の違いや二層膜構造によ
るものでなく希土類−遷移金属とＰｔ／Ｃｏ積層膜との
交換結合によるものである事がいえる。その根拠として
希土類−遷移金属膜は常に一定の磁場方向に向いている
ため、ＰｔｌＣｏ８層膜の磁場が希土類−遷移金属の磁
場と逆に向こうとする時は、磁場の反転が遅れる。The optical magnetic properties of the laminated film were measured. Figure 4 shows the results. Since the center of the Kerr rotation angle in the magnetic field direction is shifted, the increase in coercive force is not due to the difference in the underlying layer or the two-layer film structure, but is due to the exchange coupling between the rare earth-transition metal and the Pt/Co laminated film. It can be said that it is a thing. The basis for this is that since the rare earth-transition metal film is always oriented in the direction of a fixed magnetic field, when the magnetic field of the PtlCo 8-layer film is directed in the opposite direction to the magnetic field of the rare earth-transition metal, the reversal of the magnetic field is delayed.
逆に同じ方向に向こうとする時は早く磁場が反転するた
め、カー回転角の中心がずれる事になる。Conversely, when trying to move in the same direction, the magnetic field reverses quickly, causing the center of the Kerr rotation angle to shift.
このように本案によれば、保磁力が増大する事によって
ピット径を小さくする事ができ、従って、高密度な光磁
気ディスクにすることができる。As described above, according to the present invention, the pit diameter can be reduced by increasing the coercive force, and therefore a high-density magneto-optical disk can be obtained.
（へ）実施例
第１図は本発明の一実施例に係る光磁気記録媒体の構成
図を示しており、例えば基板テーブル上に基板（３）を
取り付け、マグネトロンスパッタリングによりＴｂＦｅ
合金膜（２）を１００人の膜厚で成膜し、次にＰｔｌＴ
人、Ｃｏ３人の周期で５層に成膜した全厚１１０人のＰ
ｔ ／’ Ｃθ積層膜（１）を成膜することによる２
層膜構造としたものである。Ｐ ｔ ／ Ｃｏ積層膜と
ＴｂＦｅ合金膜との交換結合による保磁力増大とともに
、ＴｂＦｅ合金膜の酸化防止効果もある。(f) Example FIG. 1 shows a configuration diagram of a magneto-optical recording medium according to an example of the present invention. For example, a substrate (3) is mounted on a substrate table, and TbFe
The alloy film (2) was formed to a thickness of 100, and then PtlT
A total thickness of 110 people deposited in 5 layers with a cycle of 3 people and Co
2 by forming the t/'Cθ laminated film (1)
It has a layered structure. In addition to increasing the coercive force due to exchange coupling between the Pt/Co laminated film and the TbFe alloy film, there is also an oxidation prevention effect of the TbFe alloy film.
第１図に示す構造の光磁気ディスク□に於いては、従来
の光磁気ディスク記録装置である磁石により磁場を与え
、レーザ光を照射する事による記録方法で記録・消去・
再生を行う事ができる。In the magneto-optical disk □ with the structure shown in Figure 1, recording, erasing, and
Can be played.
尚、希土類−遷移金属材料として、実施例においてはＴ
ｂＦｅ合金を用いたが、この組み合わせに限らず、希土
類としてＴｂ、Ｇｄ、ＤＶ、Ｈｏ、Ｎｄ、Ｐｒの一種ま
たは二種以上の元素と、遷移金属としてＦｅ、Ｃｏ、Ｎ
ｉの一種または二種以上の元素とよりなる合金を用いて
も、実施例とほぼ同等の効果が得られる。In addition, as a rare earth-transition metal material, T
Although a bFe alloy was used, the combination is not limited to this, and one or more elements of Tb, Gd, DV, Ho, Nd, and Pr are used as rare earth elements, and Fe, Co, and N are used as transition metals.
Even if an alloy consisting of one or more elements of i is used, substantially the same effect as in the example can be obtained.
（ト）発明の効果
以上、本発明に依ればＰ ｔ ／ Ｃｏ積層膜の保磁力
を増大させる事ができるため、最小ビット半径をより小
さくすることができるので、高密度記録に関しての特性
を上げることができる。(G) Effects of the Invention According to the present invention, the coercive force of the Pt/Co laminated film can be increased, so the minimum bit radius can be made smaller, which improves the characteristics regarding high-density recording. can be raised.
又、Ｐ ｔ ／ Ｃｏ積層膜により、酸化しやすい希土
類−遷移金属膜が保護されるため腐食及び孔食を抑制し
つつ磁気光学効果を安定に維持する事ができる。Furthermore, since the Pt/Co laminated film protects the rare earth-transition metal film that is easily oxidized, it is possible to suppress corrosion and pitting while stably maintaining the magneto-optic effect.
第１図は本発明の一実施例を示す光、磁気記録媒体の構
成図、第２図は従来のＰｔ／Ｃｏ積層膜の構成図、第３
図、第４図は本発明に係る光磁気特性図である。
（１）・・・Ｐ ｔ ／ Ｃｏ積層膜Fig. 1 is a block diagram of an optical/magnetic recording medium showing one embodiment of the present invention, Fig. 2 is a block diagram of a conventional Pt/Co laminated film, and Fig. 3 is a block diagram of a conventional Pt/Co laminated film.
4 are magneto-optical characteristic diagrams according to the present invention. (1)...Pt/Co laminated film
Claims (1)
下地層に希土類−遷移金属材料を用いることを特徴とし
た光磁気記録媒体。(1) In a magneto-optical recording material in which Pt and Co are laminated,
A magneto-optical recording medium characterized by using a rare earth-transition metal material for an underlayer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25933189A JP2630841B2 (en) | 1989-10-03 | 1989-10-03 | Magneto-optical recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25933189A JP2630841B2 (en) | 1989-10-03 | 1989-10-03 | Magneto-optical recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03120643A true JPH03120643A (en) | 1991-05-22 |
| JP2630841B2 JP2630841B2 (en) | 1997-07-16 |
Family
ID=17332613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25933189A Expired - Fee Related JP2630841B2 (en) | 1989-10-03 | 1989-10-03 | Magneto-optical recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2630841B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0492584A2 (en) * | 1990-12-28 | 1992-07-01 | Sony Corporation | Magneto-optical recording medium |
| EP0595636A2 (en) * | 1992-10-29 | 1994-05-04 | Canon Kabushiki Kaisha | Magneto-optical recording medium |
-
1989
- 1989-10-03 JP JP25933189A patent/JP2630841B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0492584A2 (en) * | 1990-12-28 | 1992-07-01 | Sony Corporation | Magneto-optical recording medium |
| US5958575A (en) * | 1990-12-28 | 1999-09-28 | Sony Corporation | Magneto-optical recording medium |
| EP0595636A2 (en) * | 1992-10-29 | 1994-05-04 | Canon Kabushiki Kaisha | Magneto-optical recording medium |
| EP0595636A3 (en) * | 1992-10-29 | 1994-10-12 | Canon Kk | Magneto-optical recording medium. |
| US5521006A (en) * | 1992-10-29 | 1996-05-28 | Canon Kabushiki Kaisha | Magneto-optical recording medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2630841B2 (en) | 1997-07-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |