JPH03120558U - - Google Patents

Info

Publication number
JPH03120558U
JPH03120558U JP2902490U JP2902490U JPH03120558U JP H03120558 U JPH03120558 U JP H03120558U JP 2902490 U JP2902490 U JP 2902490U JP 2902490 U JP2902490 U JP 2902490U JP H03120558 U JPH03120558 U JP H03120558U
Authority
JP
Japan
Prior art keywords
seal
atmosphere
provided inside
evaporation device
tip material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2902490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2902490U priority Critical patent/JPH03120558U/ja
Publication of JPH03120558U publication Critical patent/JPH03120558U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2902490U 1990-03-23 1990-03-23 Pending JPH03120558U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2902490U JPH03120558U (enrdf_load_stackoverflow) 1990-03-23 1990-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2902490U JPH03120558U (enrdf_load_stackoverflow) 1990-03-23 1990-03-23

Publications (1)

Publication Number Publication Date
JPH03120558U true JPH03120558U (enrdf_load_stackoverflow) 1991-12-11

Family

ID=31531805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2902490U Pending JPH03120558U (enrdf_load_stackoverflow) 1990-03-23 1990-03-23

Country Status (1)

Country Link
JP (1) JPH03120558U (enrdf_load_stackoverflow)

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