JPH03120552U - - Google Patents

Info

Publication number
JPH03120552U
JPH03120552U JP2680690U JP2680690U JPH03120552U JP H03120552 U JPH03120552 U JP H03120552U JP 2680690 U JP2680690 U JP 2680690U JP 2680690 U JP2680690 U JP 2680690U JP H03120552 U JPH03120552 U JP H03120552U
Authority
JP
Japan
Prior art keywords
rod
vacuum evaporation
holding device
long filament
filament holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2680690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2680690U priority Critical patent/JPH03120552U/ja
Publication of JPH03120552U publication Critical patent/JPH03120552U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2680690U 1990-03-16 1990-03-16 Pending JPH03120552U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2680690U JPH03120552U (enrdf_load_stackoverflow) 1990-03-16 1990-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2680690U JPH03120552U (enrdf_load_stackoverflow) 1990-03-16 1990-03-16

Publications (1)

Publication Number Publication Date
JPH03120552U true JPH03120552U (enrdf_load_stackoverflow) 1991-12-11

Family

ID=31529686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2680690U Pending JPH03120552U (enrdf_load_stackoverflow) 1990-03-16 1990-03-16

Country Status (1)

Country Link
JP (1) JPH03120552U (enrdf_load_stackoverflow)

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