JPH03120410A - Automatic driving type comparative measuring instrument - Google Patents

Abstract

PURPOSE:To measure small quantities/comprising many kinds of products efficiently by detecting measurement data on the object to be measured at a desired measurement point, and comparing the data with the measured value of a model measured body which has been measured and stored previously and calculating and displaying the deviation quantity. CONSTITUTION:A mount rack 1 for the body 5 to be measured which is freely slidable in an X-axis direction is provided on 1st rails 3 and 3' provided on a base 2 and a Y-axial slider 9 provided on 2nd rails 8 and 8' perpendicular to the X axis is racked slidably on a corresponding fixation base 6. A Z-axial slider 11 which moves vertically is engaged with the front of the slider 9 and a probe 13 is mounted at its lower end. The mount rack 1 and sliders 9 and 11 are driven by synchronous driving devices and the probe 13 is enabled to move efficiently in the composite direction of three axes X, Y, and Z. Further, the probe 13 is put in operation for tracking the specific measurement point of the model measured body and then the quantities of relative displacement from the model measured body measurement data are measured by movement quantity readers provided at respective parts and compared with the signal from a probe measuring element 14 to display and record the results.

Description

[Detailed description of the invention] [Industrial field of application and its purpose] The present invention relates to a three-dimensional measurement method with guidance in an orthogonal coordinate system, and in particular, to a three-dimensional measurement method with guidance in a Cartesian coordinate system, and in particular to a three-dimensional measurement method with guidance in a Cartesian coordinate system, and in particular, to The automatic drive comparison measuring machine actively detects the measured data of the model object, compares it with the measured value of the model measurement object stored in advance, and calculates and displays the amount of deviation. Our goal is to provide an inexpensive measuring machine for production lines that enables accurate measurements.

[Conventional technology and its problems]

For measuring objects placed on ultra-precision machined measuring tables such as stone surface plates, the probe 4' supported by the measuring machine body is moved by a precision movement mechanism that combines a gas slide and permanent magnets. By moving the object three-dimensionally, detecting the amount of relative movement between the measurement surface of the object and the probe head, and processing this detection signal with a data processing device, the shape, dimensions, etc. of the object can be determined. A three-dimensional measuring machine is known which is designed to measure the movement of the measuring object. There are two types: a type and an automatic drive type that uses a motor or the like as a moving mechanism.

However, regardless of the type of coordinate measuring machine, the measuring point of the probe and the object to be measured are
In order to relatively move in the composite direction of the three orthogonal axes -Y-Z, coordinate values from the origin of the measuring machine are determined for each measurement point, and these data are processed in a prescribed manner.

For this reason, in conventional three-dimensional measuring machines, it is necessary to achieve high precision and smooth movement of the measuring stylus.

Since each slider mechanism must have a high degree of rigidity and an integrated structure, the mass of the moving mechanism is large and its inertia also increases.

There was a conflict between speedy movement and constant pressure follow-up to the measurement point.

[Means and effects for solving the problem] Therefore, the automatic drive type comparison measuring machine according to the present invention is.

A mounting stand for the measurement target that can freely slide in the X-axis direction is installed on the first rail provided on the base at sufficient intervals. A Y-axis slider with a second rail provided perpendicularly to the line and at a sufficient interval is slidably installed, and a two-axis slider that moves vertically is engaged with the front side of this Y-axis slider. In a three-dimensional movement device with a probe attached to the bottom end, x, y,
By driving the mounting frame that moves in the Z-axis direction and the sliders on the Y and Z axes using motors, screw shafts, etc., and using respective synchronous drive devices connected to a multi-axis controller with a learning function. , by making it possible to actively move the probe in the x-y-z three-axis composite direction using an inexpensive device, and by giving the probe the motion of following a predetermined measurement point of the model measurement object. The displacement amount relative to the model measured object measurement data is measured by the respective movement amount reading devices installed between the base and the mounting frame, the fixed table and the Y-axis slider, and the holding body on the Y-axis slider and the two-axis slider. However, this can be compared with the signal from the probe measuring head and displayed or recorded.

【Example〕

An embodiment of the present invention will be described with reference to the drawings. In the drawings, 1 indicates a first rail 3.
3' and the linear motion blocks 4, 4m, and is a stand for the measuring object 5 that can freely slide in the hzz axis direction while maintaining sufficient accuracy. Installed at the rear of the center. A linear motion block 7 is mounted on the top of the fixed base 6.
A Y-axis slider 9 that is slidable in the Y-axis direction perpendicular to the X-axis is constructed by means of second rails 8, 8' that engage with the slider 7' and are provided at a sufficient interval. A holder 12 for a two-axis slider 11, which can freely move up and down in the vertical direction, is attached via a support stand 10 or the like. A probe 13 is provided at the lower end of the extension of the two-axis slider 11, and its measuring point 14 is made to correspond to the measuring object 5 on the pedestal 1, and the tertiary probe measuring point 14 is in contact with the measuring surface of the measuring object 5. It allows for original movement.

Also, the movement of the mounting table 1 in the X-axis direction with respect to the base 2,
The movement of the slider 9 in the Y-axis direction with respect to the VA stationary table 6 and the movement of the slider 11 in the two-axis direction with respect to the holder 12 provided on the support table 10 are configured by a motor, a screw shaft, etc., and have a learning function. This is performed by respective synchronous drive devices 116, 17, and 18 connected to the multi-axis controller 15.

The amount of relative movement of the probe 13 to the object to be measured 5 in the X-axis direction is determined by an X-axis movement amount reading device provided between the base 2 and the mounting table 1! 19 and probe 1
The relative movement amounts in the Y-axis direction and the Z-axis direction with respect to the measurement target 5 in No. 3 are determined using a Y-axis movement amount reading device ff20.3 provided between the fixed table 6 on the base 2 and the slider 9. and is detected by a two-axis movement amount reading device 21 provided between the holder 12 and the slider 11.

Movement amount reading device I for x, y, and z axes! 19.20.
The signal from 21 passes through separate detection circuits 22, 23, 24 and counters 25, 26, 27 to data processing block 28.
On the other hand, each synchronous drive unit M1 of the x-y-z axes
The multi-axis controller 15 connected to 6.17.18 is
A learning function device (teaching/
box) 29 and the data processing device f! 28, and the three-axis signals from the probe 13 are transmitted to the respective counters 25, 26, and 27, so the data processing device that receives these signals! 2
8 performs predetermined comparison calculation processing and displays necessary data on a display device 130 or a recording device! 31.

Since the present invention is constructed as described above, first, the model measurement object (master) is fixed on the mounting table 1, and the measurement head 14 is moved in such a way that it comes into contact with a desired measurement point on the measurement surface. In order to impart motion to the probe 13, each multi-axis drive device w1
5.16.17, the multi-axis controller 15 transmits a signal correlating the amount of X-Y-Z coordinate values.

The commands necessary for this initial master measurement point trajectory control are provided by the learning function device 29 through interactive operation with the LCD display to determine the desired measurement point conforming to the point-to-point measurement method or other measurement methods. This is done by giving a corresponding command to the multi-axis controller 5, and at the same time, recording to the memory card is also done in order to obtain the same trajectory control again.

The tracking trajectory of the probe 13 to the model measurement object is X-
Each reading device fi detects the amount of relative movement of the Y-Z axes.
19, 20, 21, each separate detection circuit 2
2.23.24 and the counter 25°26.27, and the signal from the probe tip 14 is
The error values between the tracking trajectory of the probe 13 and the contact measurement point of the probe 140 are given to the respective counters 25, 26, and 27, and the error of the trajectory measurement point of the probe 13 is corrected for accurate measurement of the model measurement object. The value is stored in the data processing bag W28.

After the preparation operations described above, the object to be measured 5 is fixed at a predetermined position on the mounting table 1 and a predetermined operation signal is sent from the multi-axis controller 15, and the probe attached to the lower end of the two-axis slider 11 13 performs a composite movement in the direction of the X-Y-Z axes according to the trajectory of the predetermined measurement point of the master, and detects the position change using a device i! that reads the amount of movement of each of the X, Y, and Z axes. 19,
20, 21 read, each separate detection circuit 22, 23, 2
4 to the respective counters 25, 26, 27, and at the same time, the amount of displacement of the probe contact point 14 in contact with the object to be measured 5 is also transmitted to the counters 25, 26, 27, so the calculation results of these numerical values are is a data processing bag! ! Granted to 28. The data processing device into which this measurement data was sent! 28 compares and calculates the numerical values of each of the X-Y-Z axes with the stored master measurement data, and sends the increase/decrease value to the display device fi30, and if necessary, to the recording device! 31
You can print out the numbers.

〔Effect of the invention〕

The present invention is configured and operates as described above, and the measurement operation of the object to be measured does not measure the three-dimensional absolute value, but rather compares measured values with a model measurement object approved during the mass production process. It is possible to read this and determine in a short time whether it is within the desired tolerance value for the manufactured product. For this reason, the three-dimensional movement of the probe is performed based on data that has been learned and stored in advance by mounting it on a product model to be measured.

In addition, the error value is output after comparing and calculating the detected value of the probe measuring head and the numerical value stored in the data processing device, making it possible to accurately and easily distinguish between good and defective products when comparing product tolerances. It is done.

In addition, in order to adopt such a comparison calculation processing measurement method, X, Y,
The movement in the Z-axis direction can be produced much cheaper than measuring machines with precision movement mechanisms using conventional gas slides or stone surface plate rails, and it is useful when measuring a wide variety of manufactured products. However, if a memory card for operating each model is prepared in advance, changes in the object to be measured can be easily handled.

Furthermore, there are drive devices for each of the x, y, and z axes for causing the probe to move to follow the trajectory of the master measurement point.

Due to the correction effect of the trajectory deviation detection function of the probe measuring point, there is no need for accurate tracking of the measurement point, so it can be configured with relatively inexpensive drive members, and the display accuracy of this type of measuring instrument is improved. This is effective in improving performance and reducing manufacturing costs.

[Brief explanation of the drawing]

FIG. 1 is a front view of a measuring device according to the present invention, FIG. 2 is a side view of the same, and FIG. 3 is a block diagram showing the electrical configuration of the measuring device. 1... Mounting stand. 2...Base. 5...Measurement object. 6...Fixed stand. 9...Y-axis slider. 11...2-axis slider. 13... Probe. 16... Synchronous drive device in the X-axis direction. 17...Y-axis direction synchronous drive device. 18... Synchronous drive device in the Z-axis direction. 19 ・ 20 ・ 21 ・ 28 ・ 30 ・ 31 ・ X-axis movement amount reading device. Y-axis movement amount reading device. Z-axis movement reading device. Data processing equipment. Display device. Recording device.

Claims (1)

[Claims] (1) A mounting stand for the measurement target that can freely slide in the X-axis direction is provided on the first rail provided on the base at sufficient intervals, and a mounting stand for the object to be measured is provided on the corresponding fixed stand of the base. , X
A Y-axis slider on which a second rail is provided perpendicularly to the axis and at a sufficient interval is slidably installed, and a Z-axis slider that moves vertically is engaged with the front side of this Y-axis slider,
In a three-dimensional movement device with a probe attached to its lower end,
A synchronous drive device configured to drive a mounting frame that moves in the X, Y, and Z axis directions and each slider in the Y and Z axes using a motor, screw shaft, etc., and that is connected to a multi-axis controller that has a learning function. Furthermore, a movement amount reading device is provided between the base and the mounting table, the fixed table and the Y-axis slider, and a holder provided on the Y-axis slider and the Z-axis slider, and a probe at the lower end of the Z-axis slider is provided. An automatic drive type comparison measuring machine characterized by calculating and displaying the relative displacement of the position where the measuring head contacts the measuring object with the measured value of the model measuring object whose trajectory is controlled by the synchronous drive device.