JPH03120034U - - Google Patents
Info
- Publication number
- JPH03120034U JPH03120034U JP2831690U JP2831690U JPH03120034U JP H03120034 U JPH03120034 U JP H03120034U JP 2831690 U JP2831690 U JP 2831690U JP 2831690 U JP2831690 U JP 2831690U JP H03120034 U JPH03120034 U JP H03120034U
- Authority
- JP
- Japan
- Prior art keywords
- turntable
- substrate
- processed
- frame
- spin dryer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2831690U JPH03120034U (https=) | 1990-03-19 | 1990-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2831690U JPH03120034U (https=) | 1990-03-19 | 1990-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03120034U true JPH03120034U (https=) | 1991-12-10 |
Family
ID=31531124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2831690U Pending JPH03120034U (https=) | 1990-03-19 | 1990-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03120034U (https=) |
-
1990
- 1990-03-19 JP JP2831690U patent/JPH03120034U/ja active Pending
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