JPH03120031U

JPH03120031U -

Info

Publication number: JPH03120031U
Application number: JP3013490U
Authority: JP
Priority date: 1990-03-23
Filing date: 1990-03-23
Publication date: 1991-12-10

Description

[Brief explanation of drawings]

第１図はこの考案の一実施例である液相エピタ
キシヤル成長装置の断面図、第２図は従来の液相
エピタキシヤル成長装置の断面図である。図において、１……ボート本体、２……上段の
室、３……中段の室、４……下段の室、６……ス
ライド可能な蓋、７，８……スライド可能な板、
１１……蓋６に設けられた開孔部、１２，１３…
…開孔部、１５……開孔部を有する板を示す。な
お、図中、同一符号は同一、又は相当部分を示す
。 FIG. 1 is a sectional view of a liquid phase epitaxial growth apparatus which is an embodiment of this invention, and FIG. 2 is a sectional view of a conventional liquid phase epitaxial growth apparatus. In the figure, 1...boat body, 2...upper chamber, 3...middle chamber, 4...lower chamber, 6...slidable lid, 7, 8...slidable plate,
11...Aperture provided in the lid 6, 12, 13...
...Aperture, 15... Indicates a plate having an aperture. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims

[Scope of utility model registration request]

An upper chamber for storing the crystal melt used for epitaxial growth, a middle chamber for installing the substrate to be epitaxially grown, a lower chamber for storing the crystal melt used for the epitaxial growth, and an upper chamber for storing the crystal melt used for the epitaxial growth. A slideable plate with an opening that allows the chamber to be opened or closed, an upper chamber and a middle chamber,
In the main body of the board, the middle chamber and the lower chamber are separated and the crystal melt can move from the top to the bottom, and the lower chamber is made up of a slideable container. A liquid phase epitaxial growth apparatus characterized in that a chamber is provided with a plurality of plates having openings of the same size or different sizes for filtering a crystal melt flowing from an upper chamber.