JPH03120025U - - Google Patents

Info

Publication number
JPH03120025U
JPH03120025U JP2813690U JP2813690U JPH03120025U JP H03120025 U JPH03120025 U JP H03120025U JP 2813690 U JP2813690 U JP 2813690U JP 2813690 U JP2813690 U JP 2813690U JP H03120025 U JPH03120025 U JP H03120025U
Authority
JP
Japan
Prior art keywords
work placement
work
plate
heating element
placement plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2813690U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0711465Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990028136U priority Critical patent/JPH0711465Y2/ja
Publication of JPH03120025U publication Critical patent/JPH03120025U/ja
Application granted granted Critical
Publication of JPH0711465Y2 publication Critical patent/JPH0711465Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1990028136U 1990-03-22 1990-03-22 クリーンルーム内のワーク置板の塵埃舞上り防止構造 Expired - Lifetime JPH0711465Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990028136U JPH0711465Y2 (ja) 1990-03-22 1990-03-22 クリーンルーム内のワーク置板の塵埃舞上り防止構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990028136U JPH0711465Y2 (ja) 1990-03-22 1990-03-22 クリーンルーム内のワーク置板の塵埃舞上り防止構造

Publications (2)

Publication Number Publication Date
JPH03120025U true JPH03120025U (enFirst) 1991-12-10
JPH0711465Y2 JPH0711465Y2 (ja) 1995-03-15

Family

ID=31530953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990028136U Expired - Lifetime JPH0711465Y2 (ja) 1990-03-22 1990-03-22 クリーンルーム内のワーク置板の塵埃舞上り防止構造

Country Status (1)

Country Link
JP (1) JPH0711465Y2 (enFirst)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6227868U (enFirst) * 1985-08-05 1987-02-20
JPS6238530U (enFirst) * 1985-08-23 1987-03-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6227868U (enFirst) * 1985-08-05 1987-02-20
JPS6238530U (enFirst) * 1985-08-23 1987-03-07

Also Published As

Publication number Publication date
JPH0711465Y2 (ja) 1995-03-15

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