JPH03119049A - Resin composition - Google Patents
Resin compositionInfo
- Publication number
- JPH03119049A JPH03119049A JP25840889A JP25840889A JPH03119049A JP H03119049 A JPH03119049 A JP H03119049A JP 25840889 A JP25840889 A JP 25840889A JP 25840889 A JP25840889 A JP 25840889A JP H03119049 A JPH03119049 A JP H03119049A
- Authority
- JP
- Japan
- Prior art keywords
- resin composition
- epoxy resin
- fused silica
- resin
- silane coupling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 20
- 239000003822 epoxy resin Substances 0.000 claims abstract description 37
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 37
- 239000006087 Silane Coupling Agent Substances 0.000 claims abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000005350 fused silica glass Substances 0.000 claims abstract description 15
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 13
- 239000000945 filler Substances 0.000 claims abstract description 12
- 239000002245 particle Substances 0.000 claims abstract description 8
- -1 vinyl silane compound Chemical class 0.000 claims abstract description 8
- 229920005573 silicon-containing polymer Polymers 0.000 claims abstract description 7
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims abstract description 7
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 5
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 6
- 125000005843 halogen group Chemical group 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 abstract description 16
- 238000005476 soldering Methods 0.000 abstract description 15
- 238000000034 method Methods 0.000 abstract description 14
- 229920005989 resin Polymers 0.000 abstract description 13
- 239000011347 resin Substances 0.000 abstract description 13
- 238000007789 sealing Methods 0.000 abstract description 7
- 238000013329 compounding Methods 0.000 abstract description 2
- 229910052736 halogen Inorganic materials 0.000 abstract 1
- 150000002367 halogens Chemical class 0.000 abstract 1
- 239000000203 mixture Substances 0.000 description 12
- 229920003986 novolac Polymers 0.000 description 8
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 6
- 239000004593 Epoxy Substances 0.000 description 5
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 5
- 125000004432 carbon atom Chemical group C* 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 238000005538 encapsulation Methods 0.000 description 4
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 150000002430 hydrocarbons Chemical group 0.000 description 3
- 150000004668 long chain fatty acids Chemical class 0.000 description 3
- 239000004843 novolac epoxy resin Substances 0.000 description 3
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 3
- LLPKQRMDOFYSGZ-UHFFFAOYSA-N 2,5-dimethyl-1h-imidazole Chemical compound CC1=CN=C(C)N1 LLPKQRMDOFYSGZ-UHFFFAOYSA-N 0.000 description 2
- XLSZMDLNRCVEIJ-UHFFFAOYSA-N 4-methylimidazole Chemical compound CC1=CNC=N1 XLSZMDLNRCVEIJ-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003063 flame retardant Substances 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000004898 kneading Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000011417 postcuring Methods 0.000 description 2
- 229960001755 resorcinol Drugs 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- TXDNPSYEJHXKMK-UHFFFAOYSA-N sulfanylsilane Chemical compound S[SiH3] TXDNPSYEJHXKMK-UHFFFAOYSA-N 0.000 description 2
- 238000001721 transfer moulding Methods 0.000 description 2
- YWWDBCBWQNCYNR-UHFFFAOYSA-N trimethylphosphine Chemical compound CP(C)C YWWDBCBWQNCYNR-UHFFFAOYSA-N 0.000 description 2
- UKRDPEFKFJNXQM-UHFFFAOYSA-N vinylsilane Chemical compound [SiH3]C=C UKRDPEFKFJNXQM-UHFFFAOYSA-N 0.000 description 2
- SBGKCOJQKBHFTO-UHFFFAOYSA-N (2-nonylphenyl)phosphane Chemical compound CCCCCCCCCC1=CC=CC=C1P SBGKCOJQKBHFTO-UHFFFAOYSA-N 0.000 description 1
- YOBOXHGSEJBUPB-MTOQALJVSA-N (z)-4-hydroxypent-3-en-2-one;zirconium Chemical compound [Zr].C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O YOBOXHGSEJBUPB-MTOQALJVSA-N 0.000 description 1
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- FUIQBJHUESBZNU-UHFFFAOYSA-N 2-[(dimethylazaniumyl)methyl]phenolate Chemical compound CN(C)CC1=CC=CC=C1O FUIQBJHUESBZNU-UHFFFAOYSA-N 0.000 description 1
- PQAMFDRRWURCFQ-UHFFFAOYSA-N 2-ethyl-1h-imidazole Chemical class CCC1=NC=CN1 PQAMFDRRWURCFQ-UHFFFAOYSA-N 0.000 description 1
- YTWBFUCJVWKCCK-UHFFFAOYSA-N 2-heptadecyl-1h-imidazole Chemical compound CCCCCCCCCCCCCCCCCC1=NC=CN1 YTWBFUCJVWKCCK-UHFFFAOYSA-N 0.000 description 1
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 2-phenyl-1h-imidazole Chemical compound C1=CNC(C=2C=CC=CC=2)=N1 ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 0.000 description 1
- 229930185605 Bisphenol Natural products 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 1
- MQJKPEGWNLWLTK-UHFFFAOYSA-N Dapsone Chemical compound C1=CC(N)=CC=C1S(=O)(=O)C1=CC=C(N)C=C1 MQJKPEGWNLWLTK-UHFFFAOYSA-N 0.000 description 1
- MKYBYDHXWVHEJW-UHFFFAOYSA-N N-[1-oxo-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propan-2-yl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(C(C)NC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 MKYBYDHXWVHEJW-UHFFFAOYSA-N 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 235000018936 Vitellaria paradoxa Nutrition 0.000 description 1
- 241000282485 Vulpes vulpes Species 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 239000004844 aliphatic epoxy resin Substances 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- QEZIKGQWAWNWIR-UHFFFAOYSA-N antimony(3+) antimony(5+) oxygen(2-) Chemical compound [O--].[O--].[O--].[O--].[Sb+3].[Sb+5] QEZIKGQWAWNWIR-UHFFFAOYSA-N 0.000 description 1
- 150000004982 aromatic amines Chemical class 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 229920001400 block copolymer Polymers 0.000 description 1
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 229910002026 crystalline silica Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- BVURNMLGDQYNAF-UHFFFAOYSA-N dimethyl(1-phenylethyl)amine Chemical compound CN(C)C(C)C1=CC=CC=C1 BVURNMLGDQYNAF-UHFFFAOYSA-N 0.000 description 1
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 1
- ZZTCPWRAHWXWCH-UHFFFAOYSA-N diphenylmethanediamine Chemical compound C=1C=CC=CC=1C(N)(N)C1=CC=CC=C1 ZZTCPWRAHWXWCH-UHFFFAOYSA-N 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 150000002366 halogen compounds Chemical class 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- IKGXNCHYONXJSM-UHFFFAOYSA-N methanolate;zirconium(4+) Chemical compound [Zr+4].[O-]C.[O-]C.[O-]C.[O-]C IKGXNCHYONXJSM-UHFFFAOYSA-N 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 150000003003 phosphines Chemical class 0.000 description 1
- 150000003018 phosphorus compounds Chemical class 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- IKNCGYCHMGNBCP-UHFFFAOYSA-N propan-1-olate Chemical compound CCC[O-] IKNCGYCHMGNBCP-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 1
- WXAZIUYTQHYBFW-UHFFFAOYSA-N tris(4-methylphenyl)phosphane Chemical compound C1=CC(C)=CC=C1P(C=1C=CC(C)=CC=1)C1=CC=C(C)C=C1 WXAZIUYTQHYBFW-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Epoxy Resins (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、半導体装置を封止するために用いる樹脂組成
物に関する。さらに詳しくは、樹脂封止型半導体装置を
実装する際に、半田付は工程において封止樹脂にクラッ
クが発生ずるのを防止した樹脂組成物であり、特に耐湿
性および成形性に優れた高信顆性の樹脂組成物に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a resin composition used for encapsulating a semiconductor device. More specifically, when mounting resin-encapsulated semiconductor devices, soldering is a resin composition that prevents cracks from occurring in the encapsulating resin during the process, and has high reliability with particularly excellent moisture resistance and moldability. The present invention relates to a granular resin composition.
〈従来の技術〉
近年、半導体集積回路の分野においては、高集積化、高
信頼性化の技術開発と同時に、配線板への半導体装置組
立て工程の自動化が推進されてる0例えばフラットバッ
クージ型の半導体装置を回路板に取付ける場合、従来は
リードビンごとに半田付けを行っていたが、最近は半導
体装置全体を250℃以上に加熱した半田浴に浸漬して
半田付けを行う表面実装方式が採用されている。そのた
め従来の封止用樹脂で封止したパッケージは半田付は時
に樹脂部分にクラックが発生し、信頼性が低下して製品
として使用できないという問題が起きている。<Conventional technology> In recent years, in the field of semiconductor integrated circuits, along with the development of technologies for higher integration and higher reliability, automation of the process of assembling semiconductor devices onto wiring boards has been promoted. When attaching a semiconductor device to a circuit board, conventionally solder was applied to each lead bin, but recently a surface mount method has been adopted in which the entire semiconductor device is immersed in a solder bath heated to 250°C or higher for soldering. has been done. Therefore, when soldering a package sealed with conventional sealing resin, cracks sometimes occur in the resin part, reducing reliability and making it unusable as a product.
また、半導体の封止方法としては、エポキシ樹脂に硬化
剤および充填剤などを添加した組成物を用い、半導体素
子を金型にセットしてトランスファー成形法などにより
封止する方法が一般的に行われている。In addition, as a method for encapsulating semiconductors, a general method is to use a composition containing an epoxy resin with a hardening agent, a filler, etc., set the semiconductor element in a mold, and encapsulate it by a transfer molding method or the like. It is being said.
これら半導体封止用樹脂に要求される特性としては、半
田耐熱性、信頼性および成形性などがあり、信頼性とし
ては耐湿性などが、成形性としては離型性、フローマー
クなどが挙げられる。 ここでいう耐湿性とは、高温、
高温環境下に樹脂封止半導体装置した場合に、封止樹脂
や封止樹脂とリードフレームとの界面を通って水分が侵
入することにより、半導体が故障するのを防止すること
であり、近年半導体の集積度が向上するとともに、より
高度の耐湿性が要求されている。The properties required of these resins for semiconductor encapsulation include soldering heat resistance, reliability, and moldability.Reliability includes moisture resistance, and moldability includes mold releasability, flow marks, etc. . Humidity resistance here refers to high temperature,
This is to prevent semiconductors from breaking down due to moisture entering through the sealing resin or the interface between the sealing resin and the lead frame when a resin-encapsulated semiconductor device is placed in a high-temperature environment. As the degree of integration increases, a higher degree of moisture resistance is required.
上記のような実状に鑑み、封止樹脂の耐半田クラック性
を向上するための従来法として、例えば、ビフェニル型
のエポキシ樹脂を用いる方法(特開昭63−25141
9号公報)などが提案されている。In view of the above-mentioned actual situation, as a conventional method for improving the solder crack resistance of sealing resin, for example, a method using biphenyl-type epoxy resin (Japanese Patent Application Laid-Open No. 63-25141
9) have been proposed.
また、封止樹脂の耐湿性を向上するために、通常はシラ
ンカップリング剤が添加されており、具体的には、通常
のエポキシ樹脂に対し、エポキシシランを添加する方法
(特公昭62−17640号公報)およびビニルシラン
を添加する方法(特開昭62−223219号公報およ
び特開昭57−155753号公報)などが提案されて
いる。Furthermore, in order to improve the moisture resistance of the sealing resin, a silane coupling agent is usually added. JP-A-62-223219 and JP-A-57-155753 have been proposed.
〈発明が解決しようとする0課題〉
しかしながら、ビフェニル型エポキシ樹脂を用いる方法
においては、封止樹脂の耐半田クラック性は向上するも
のの、耐湿性、離型性の低下やフローマークなどの問題
があり実用的ではなかった。<No problem to be solved by the invention> However, although the method using biphenyl-type epoxy resin improves the solder crack resistance of the sealing resin, there are problems such as a decrease in moisture resistance and mold releasability, and flow marks. It was not practical.
また、ビニルシランカップリング剤やエポキシシランカ
ップリング剤を添加する方法においては、これらの添加
による耐湿性の向上がいまだに十分ではなく、製品とし
て使用するのは困難であった。Furthermore, in the method of adding a vinyl silane coupling agent or an epoxy silane coupling agent, the moisture resistance by adding these agents has not yet been sufficiently improved, and it has been difficult to use them as products.
そこで本発明の課題は、上述した半導体封止用エポキシ
樹脂組成物が有する問題を解決し、半田耐熱性、耐湿性
などの信頼性、離型性およびフローマークなどの成形性
に優れたエポキシ樹脂組成物を提供して、表面実装用の
樹脂封止半導体を可能にすることにある。Therefore, it is an object of the present invention to solve the problems of the epoxy resin composition for semiconductor encapsulation described above, and to create an epoxy resin that has excellent reliability such as soldering heat resistance and moisture resistance, and moldability such as mold releasability and flow marks. An object of the present invention is to provide a composition that enables a resin-encapsulated semiconductor for surface mounting.
く課題を解決するための手段〉
本発明者らは、ビフェニル型のエポキシ樹脂に対し、ビ
ニル基を有するシランカップリング剤を添加することに
より、上記の課題が達成され、上記目的に合致したエポ
キシ樹脂組成物が得られることを見出し本発明に到達し
た。Means for Solving the Problems> The present inventors have developed an epoxy resin that achieves the above problems and meets the above objectives by adding a silane coupling agent having a vinyl group to a biphenyl-type epoxy resin. The present invention was achieved by discovering that a resin composition can be obtained.
すなわち本発明は、エポキシ樹脂(^)、硬化剤(B)
、充填剤(C)およびシランカップリング剤(D)から
なる樹脂組成物であって、前記エポキシ樹脂(A)が次
式〇
(ただし、R1〜R8は水素原子、01〜C4の低級ア
ルキル基またはハロゲン原子を示す、)で表される骨格
を有するエポキシ樹脂(a)を必須成分をして含有し、
かつ前記シランカップリング剤(D)がビニル基を含有
するシラン化合物であることを特徴とする樹脂組成物を
提供するものである。That is, the present invention uses an epoxy resin (^), a curing agent (B)
, a filler (C) and a silane coupling agent (D), wherein the epoxy resin (A) has the following formula (where R1 to R8 are hydrogen atoms and 01 to C4 lower alkyl groups). or a halogen atom), containing as an essential component an epoxy resin (a) having a skeleton represented by
The present invention also provides a resin composition, wherein the silane coupling agent (D) is a silane compound containing a vinyl group.
以下、本発明の構成を詳述する。Hereinafter, the configuration of the present invention will be explained in detail.
本発明におけるエポキシ樹脂(^)は、次式■(ただし
、R1−R8は水素原子、01〜C4の低級アルキル基
またはハロゲン原子を示す、)で表される骨格を有する
ビフェニル型のエポキシ樹脂(a)を必須成分をして含
有することが重要である。The epoxy resin (^) in the present invention is a biphenyl-type epoxy resin ( It is important to contain a) as an essential component.
上記エポキシ樹脂(a)を含有しない場合は、半田付は
工程におけるクラックの発生防止効果を期待することが
できない。If the epoxy resin (a) is not contained, the effect of preventing cracks in the soldering process cannot be expected.
上記式■において、R1〜Rδの好ましい具体例として
は、水素原子、メチル基、エチル基、プロピル基、1−
プロキル基、n−ブチル基、5ec−ブチル基、ter
t−ブチル基、塩素原子および臭素原子などが挙げられ
る。In the above formula (2), preferred specific examples of R1 to Rδ include a hydrogen atom, a methyl group, an ethyl group, a propyl group, a 1-
prokyl group, n-butyl group, 5ec-butyl group, ter
Examples include t-butyl group, chlorine atom and bromine atom.
本発明におけるエポキシ樹脂(a)の好ましい具体例と
しては、4.4゛−ビス(2,3−エポキシプロポキシ
)ビフェニル、4.4′−ビス(2゜3−エポキシプロ
ポキシ) −3,3’ 、 5.5 ’テトラメチルビ
フェニル、4.4′−ビス(2,3−エポキシ10ボキ
シ) −3,3” 、 5.5 ’−テトラメチルー2
−クロロビフェニル、4.4′ビス(2,3−エポキシ
プロポキシ)−3,3,5゜5′−テトラメチル−2−
ブロモビフェニル、4.4′−ビス(2,3−エポキシ
10ボキシ)−3,3’5.5’−テトラエチルビフェ
ニルおよび4.4′−ビス(2,3−エポキシ10ボキ
シ)−3,3’、5.5’−テトラブチルビフェニルな
どが挙げられる。Preferred specific examples of the epoxy resin (a) in the present invention include 4.4゛-bis(2,3-epoxypropoxy)biphenyl, 4.4'-bis(2゜3-epoxypropoxy)-3,3' , 5.5′-tetramethylbiphenyl, 4.4′-bis(2,3-epoxy-10boxy)-3,3”, 5.5′-tetramethyl-2
-chlorobiphenyl, 4,4'bis(2,3-epoxypropoxy)-3,3,5°5'-tetramethyl-2-
Bromobiphenyl, 4,4'-bis(2,3-epoxy 10-boxy)-3,3'5,5'-tetraethylbiphenyl and 4,4'-bis(2,3-epoxy 10-boxy)-3,3 ', 5,5'-tetrabutylbiphenyl, and the like.
本発明におけるエポキシ樹脂(A)は上記のエポキシ樹
脂(a)とともに、該エポキシ樹脂(a)以外の他のエ
ポキシ樹脂をも併用して含有することができる。併用で
きる他のエポキシ樹脂としては、例えば、タレゾールノ
ボラック型エポキシ樹脂、フェノールノボラック型エポ
キシ樹脂、下記式■で表されるノボラック型エポキシ樹
脂、
・・・・・佃
ビスフェノールAやレゾルシンなどから合成される各種
ノボラック型エポキシ樹脂、ビスフェノールA型エポキ
シVIJ脂、線状脂肪族エポキシ樹脂、脂環式エポキシ
樹脂、複素環式エポキシ樹脂およびハロゲン化エポキシ
樹脂などが挙げられる。The epoxy resin (A) in the present invention can contain, together with the above-mentioned epoxy resin (a), another epoxy resin other than the epoxy resin (a). Other epoxy resins that can be used in combination include, for example, Talezol novolac epoxy resin, phenol novolac epoxy resin, novolac epoxy resin represented by the following formula (■), etc. Synthesized from Tsukuda bisphenol A, resorcin, etc. Examples include various novolac type epoxy resins, bisphenol A type epoxy VIJ resins, linear aliphatic epoxy resins, alicyclic epoxy resins, heterocyclic epoxy resins, and halogenated epoxy resins.
エポキシ樹脂(A)中に含有されるエポキシ樹脂(a)
の割合に関しては特に制限がなく、必須成分としてエポ
キシ樹脂(a)が含有されれば本発明の効果は発揮され
るが、より十分な効果を発揮させるなめには、エポキシ
樹脂(a)をエポキシ樹脂(A)中に通常30重量%以
上、好ましくは50重量%以上含有せしめる必要がある
。Epoxy resin (a) contained in epoxy resin (A)
There is no particular restriction on the ratio of It is usually necessary to contain it in the resin (A) in an amount of 30% by weight or more, preferably 50% by weight or more.
本発明の樹脂組成物において、エポキシ樹脂(^)の配
合量は通常3〜30重量%、好ましくは5〜25重量%
である。In the resin composition of the present invention, the blending amount of the epoxy resin (^) is usually 3 to 30% by weight, preferably 5 to 25% by weight.
It is.
本発明における硬化剤(B)としては、エポキシ樹脂(
A)と反応して硬化させるものであれば特に限定されず
、それらの具体例としては、例えばフェノールノボラッ
ク樹脂、タレゾールノボラック樹脂、下記式■で表され
るノボラック樹脂、
・・−・暑
ビスフェノールAやレゾルシンから合成される各種ノボ
ラック樹脂、各種多価フェノール化合物、無水マレイン
酸、無水フタル酸、無水ピロメリット酸などの酸無水物
およびメタフェニレンジアミン、ジアミノジフェニルメ
タン、ジアミノジフェニルスルホンなどの芳香族アミン
などが挙げられる。As the curing agent (B) in the present invention, epoxy resin (
It is not particularly limited as long as it is cured by reacting with A), and specific examples thereof include phenol novolac resin, Talesol novolac resin, novolac resin represented by the following formula (■), etc. Hot bisphenol Various novolak resins synthesized from A and resorcinol, various polyhydric phenol compounds, acid anhydrides such as maleic anhydride, phthalic anhydride, and pyromellitic anhydride, and aromatic amines such as metaphenylene diamine, diaminodiphenylmethane, and diaminodiphenylsulfone. Examples include.
なかでも、半導体装置封止用としては、耐熱性、耐湿性
および保存性の点から、フェノールノボラック、クレゾ
ールノボラックなどのノボラック樹脂が好ましく用いら
れ、用途によっては2種以上の硬化剤を併用することも
できる。Among these, novolac resins such as phenol novolac and cresol novolac are preferably used for semiconductor device encapsulation from the viewpoint of heat resistance, moisture resistance, and storage stability, and depending on the application, two or more types of curing agents may be used in combination. You can also do it.
本発明の樹脂組成物において、硬化剤(B)の配合量は
通常1〜20重量%、好ましくは2〜15重量%である
。さらには、エポキシ樹脂(A)と硬化剤(B)の配合
比は、機械的性質および耐湿性の点から(^)に対する
(B)の化学当量比が0.5〜1.6、特に0.8〜1
.3の範囲にあることが好ましい。In the resin composition of the present invention, the amount of the curing agent (B) is usually 1 to 20% by weight, preferably 2 to 15% by weight. Furthermore, from the viewpoint of mechanical properties and moisture resistance, the compounding ratio of the epoxy resin (A) and the curing agent (B) should be such that the chemical equivalent ratio of (B) to (^) is 0.5 to 1.6, especially 0. .8~1
.. It is preferably in the range of 3.
また、本発明においてはエポキシ樹脂(A)と硬化剤(
B)の硬化反応を促進するため硬化触媒を用いてもよい
、硬化触媒は硬化反応を促進するものならば特に限定さ
れず、例えば2−メチルイミダゾール、2,4−ジメチ
ルイミダゾール、2−エチル−4−メチルイミダゾール
、2−フェニルイミダゾール、2−7エニルー4−メチ
ルイミダゾール、2−ヘプタデシルイミダゾールなどの
イミダゾール化合物、トリエチルアミン、ベンジルジメ
チルアミン、α−メチルベンジルジメチルアミン、2−
(ジメチルアミノメチル)フェノール、2.4.6−ト
リス(ジメチルアミノメチル)フェノール、1,8−ジ
アザビシクロ(5,4,0>ウンデセン−7などの3級
アミン化合物、ジルコニウムテトラメトキシド、ジルコ
ニウムテトラプロポキシド、テトラキス(アセチルアセ
トナト)ジルコニウム、トリ(アセドルアセトナト)ア
ルミニウムなどの有機金属化合物およびトリフェニルホ
スフィン、トリメチルホスフィン、トリエチルボスフィ
ン、トリブチルホスフィン、トリ(p−メチルフェニル
)ホスフィン、トリ(ノニルフェニル)ホスフィンなど
の有機ホスフィン化合物が挙げられる。なかでも耐湿性
の点から、有機ボスフィン化合物が好ましく、トリフェ
ニルホスフィンが特に好ましく用いられる。In addition, in the present invention, the epoxy resin (A) and the curing agent (
A curing catalyst may be used to promote the curing reaction of B). The curing catalyst is not particularly limited as long as it promotes the curing reaction, and examples thereof include 2-methylimidazole, 2,4-dimethylimidazole, and 2-ethyl- Imidazole compounds such as 4-methylimidazole, 2-phenylimidazole, 2-7enyl-4-methylimidazole, 2-heptadecylimidazole, triethylamine, benzyldimethylamine, α-methylbenzyldimethylamine, 2-
(dimethylaminomethyl)phenol, 2.4.6-tris(dimethylaminomethyl)phenol, tertiary amine compounds such as 1,8-diazabicyclo(5,4,0>undecene-7), zirconium tetramethoxide, zirconium tetra Organometallic compounds such as propoxide, tetrakis(acetylacetonato)zirconium, tri(acedolacetonato)aluminum and triphenylphosphine, trimethylphosphine, triethylbosphine, tributylphosphine, tri(p-methylphenyl)phosphine, tri( Organic phosphine compounds such as (nonylphenyl)phosphine are preferred. Among them, organic bosphine compounds are preferred from the viewpoint of moisture resistance, and triphenylphosphine is particularly preferably used.
これらの硬化触媒は、用途によっては2種以上を併用し
てもよく、その添加量はエポキシ樹脂口)100重量部
に対して0.1〜10重量部の範囲が好ましい。Two or more of these curing catalysts may be used in combination depending on the application, and the amount added is preferably in the range of 0.1 to 10 parts by weight per 100 parts by weight of the epoxy resin.
本発明における充填剤(C)としては、溶融シリカ、結
晶シルカ、炭酸カルシウム、炭酸マグネシウム、アルミ
ナ、マグ木シア、クレー、タルク、ゲイ酸カルシウム、
酸化チタン、アスベシト、ガラス繊維などが挙げられる
。なかでも溶融シリカは線Ill係数を低下させる効果
が大きく、低応力化に有効なため好ましく用いられる。Examples of the filler (C) in the present invention include fused silica, crystalline silica, calcium carbonate, magnesium carbonate, alumina, magki shea, clay, talc, calcium gayate,
Examples include titanium oxide, asbecite, and glass fiber. Among them, fused silica is preferably used because it has a large effect of lowering the linear Ill coefficient and is effective in reducing stress.
さらには、充填剤(C)の割合が全体の75〜9Of!
量%であり、かつ充填剤(C)が平均粒径12四以下の
破砕溶融シリカ(C’>90〜40ffi量%および平
均粒径4〇四以下の球状溶融シリカ(C″)10〜60
重量%からなる溶融シリカを含むことが、半田耐熱性の
点で好ましい。Furthermore, the proportion of filler (C) is 75 to 9Of the total!
%, and the filler (C) is crushed fused silica with an average particle size of 124 or less (C'> 90 to 40ffi) and spherical fused silica (C'') with an average particle size of 404 or less 10 to 60
It is preferable to include fused silica in an amount of % by weight from the viewpoint of soldering heat resistance.
なお、ここで平均粒径とは累′W11fX量50%にな
る粒径(メジアン径)を意味する。Note that the average particle size here means the particle size (median diameter) at which the cumulative W11fX amount is 50%.
本発明におけるシランカップリング剤(D)とは、ビニ
ル基を含有するシラン化合物である。The silane coupling agent (D) in the present invention is a silane compound containing a vinyl group.
これらシランカップリング剤(D)の具体例としては、
下記式■、■、■で表されるのらのが挙げられる。Specific examples of these silane coupling agents (D) include:
Examples include those represented by the following formulas (1), (2), and (2).
R+ CI−(=C1−t−R4−3i (OR2)
n −−−・−・■3−n
(R1、R2、R3は水素原子、炭素数1〜20の1価
の炭化水素基、R4は炭素数O〜20の2価の炭化水素
基、R5は炭素数1〜20の2価の炭化水素基、nは1
〜3の整数を各々示す、)
なかでも、耐湿信頼性の面からはビニルトリメl−4ジ
シランおよびγ−メタクリロキシグロピルトリエ1−キ
シシランが好ましく使用される。R+ CI-(=C1-t-R4-3i (OR2)
n ---・-・■3-n (R1, R2, R3 are hydrogen atoms, monovalent hydrocarbon groups having 1 to 20 carbon atoms, R4 are divalent hydrocarbon groups having 0 to 20 carbon atoms, R5 is a divalent hydrocarbon group having 1 to 20 carbon atoms, and n is 1
(each represents an integer of 3 to 3) Among them, vinyltrimer 1-4disilane and γ-methacryloxyglopyltrie 1-xysilane are preferably used from the viewpoint of moisture resistance reliability.
これらのシランカップリング剤(D)の添加量は、通常
、充填剤100重量部に対して0.1〜5重量部、好ま
しくは0.2〜3重量部、特に好ましくは0.3〜1.
5重量部であり、さらには用途に応じて、エポキシシラ
ン、メルカプトシラン、アミノシランなどの他のシラン
カップリング剤を併用することができる。The amount of these silane coupling agents (D) added is usually 0.1 to 5 parts by weight, preferably 0.2 to 3 parts by weight, particularly preferably 0.3 to 1 part by weight, based on 100 parts by weight of the filler. ..
The amount is 5 parts by weight, and other silane coupling agents such as epoxysilane, mercaptosilane, and aminosilane may be used in combination depending on the purpose.
本発明において、充填剤(C)をシランカップリング剤
(D)および必要に応じてエポキシシランやメルカプト
シランなどの他のシランカップリング剤であらかじめ表
面処理することが、信頼性の点で好ましい。In the present invention, it is preferable in terms of reliability to previously surface-treat the filler (C) with a silane coupling agent (D) and, if necessary, another silane coupling agent such as epoxysilane or mercaptosilane.
本発明においては、組成物の低応力化と信頼性を向上さ
せるため、さらにシリコーン系重合体(E)を添加する
ことができる。かかるシリコーン重合#(E)とはオル
ガノポリシロキサン構造を有するもので、具体例として
は下記式〇で表されるものが挙げられる。In the present invention, a silicone polymer (E) can be further added in order to reduce stress and improve reliability of the composition. Such silicone polymer #(E) has an organopolysiloxane structure, and specific examples include those represented by the following formula.
(R+〜R5は水素、炭素数1〜20のアルキル基、フ
ェニル基およびビニル基から選ばれた1′In以上の官
能基、X、Yは炭素数1〜20のアルキル基、フェニル
基、ビニル基、水酸基、アミノ基、エポキシ基、カルボ
キシル基、メルカプト基、ポリオキシアルキレン基、ア
ルコキシ基およびフッ素原子から選ばれた1種以上の基
および/または原子を有する官能基であり、Yは水素で
もよい、また、mは1以上の整数、nは0以上の整数を
示す、)
このシリコーン系重合体(E)の添加量は、低応力化と
信頼性の点で通常0.01〜5重量%、好ましくは0.
1〜3重量%、特に0.3〜2重量%の範囲が好ましい
。(R+ to R5 are hydrogen, a functional group of 1'In or more selected from alkyl groups having 1 to 20 carbon atoms, phenyl groups, and vinyl groups; X and Y are alkyl groups having 1 to 20 carbon atoms, phenyl groups, and vinyl groups; is a functional group having one or more groups and/or atoms selected from a group, a hydroxyl group, an amino group, an epoxy group, a carboxyl group, a mercapto group, a polyoxyalkylene group, an alkoxy group, and a fluorine atom, and Y is hydrogen or (m is an integer of 1 or more, n is an integer of 0 or more.) The amount of silicone polymer (E) added is usually 0.01 to 5% by weight in terms of stress reduction and reliability. %, preferably 0.
A range of 1 to 3% by weight, particularly 0.3 to 2% by weight is preferred.
本発明の樹脂組成物には、さらにハロゲン化エポキシ樹
脂などのハロゲン化合物、リン化合物などの離燃剤、二
酸化アンチモンなどの難燃助剤、カーボンブラック、酸
化鉄などの着色剤、シリコーンゴム、スチレン系ブロッ
ク共重合体、オレフィン系共重合体、変性ニトリルゴム
、変性ポリブタジェンゴムなどのエラストマー、ポリエ
チレンなどの熱可塑性VIJ JJW、チタネートカッ
1リング剤などのカッ1リング剤、長鎖脂肪酸、長鎖脂
肪酸の金属塩、長鎖脂肪酸のエステル、長鎖脂肪酸のア
ミド、パラフィンフックスなどの離型剤および有機過酸
化物などの架橋剤を任意に添加することができる。The resin composition of the present invention further contains halogen compounds such as halogenated epoxy resins, flame retardants such as phosphorus compounds, flame retardant aids such as antimony dioxide, colorants such as carbon black and iron oxide, silicone rubber, and styrene-based Block copolymers, olefin copolymers, elastomers such as modified nitrile rubber and modified polybutadiene rubber, thermoplastic VIJ JJW such as polyethylene, cutting agents such as titanate cutting agents, long chain fatty acids, long chains Metal salts of fatty acids, esters of long-chain fatty acids, amides of long-chain fatty acids, mold release agents such as paraffin fuchs, and crosslinking agents such as organic peroxides can be optionally added.
本発明のエポキシ樹脂組成物は、例えばバンバリーミキ
サ−、ニーダ−、ロール、単軸もしくは2軸の押出機お
よびコニーダーなどの公知の混練方法を用いて、好まし
くは溶融混練することにより製造される。The epoxy resin composition of the present invention is preferably produced by melt-kneading using a known kneading method such as a Banbury mixer, kneader, roll, single-screw or twin-screw extruder, or co-kneader.
〈実施例〉 以下、実施例により本発明を具体的に説明する。<Example> Hereinafter, the present invention will be specifically explained with reference to Examples.
表1に示した配合処方に対し、表2に示した溶融シリカ
、表3に示しなシランカップリング剤および表4に示し
た変性シリコーンオイルを、各々表5に示した組成比で
配合し、これをミキサーによりトライブレンドした0次
いで、ロール表面温度90℃のミキシングロールを用い
て5分間加熱混線後、冷却、粉砕してエポキシ含有組成
物を製造した。To the formulation shown in Table 1, the fused silica shown in Table 2, the silane coupling agent shown in Table 3, and the modified silicone oil shown in Table 4 were blended at the composition ratio shown in Table 5, respectively. This was tri-blended using a mixer.Then, the mixture was heated and mixed for 5 minutes using a mixing roll with a roll surface temperature of 90°C, and then cooled and pulverized to produce an epoxy-containing composition.
この組成物を用い、低圧トランスファー成形法により1
75℃×4分の条件で5時間ポストキュアした。ボスト
キュア後、次の物性測定法により各組成物の物性を測定
した。Using this composition, 1
Post-curing was performed for 5 hours at 75°C for 4 minutes. After post-curing, the physical properties of each composition were measured using the following physical property measuring method.
半田耐熱性: 64p l n20個を85℃/85%
RHで50時間加湿後、260
℃に加熱した半田浴に10秒間浸
漬し、クラックの発生しないQF
Pの個数の割合を求めた。Soldering heat resistance: 64p ln20 pieces at 85℃/85%
After humidifying at RH for 50 hours, the QFPs were immersed in a solder bath heated to 260° C. for 10 seconds, and the percentage of QFPs without cracks was determined.
信 頼 性:16PinDIPを用い、120℃/85
%RH、バイアス電圧1
5V1:’USPCBTを行い、累積
故障率50%になる時間を求めた。Reliability: 120℃/85 using 16Pin DIP
%RH, bias voltage 15V1: 'USPCBT was performed and the time required for the cumulative failure rate to reach 50% was determined.
また、前記の方法で製造した樹脂組成物を用いて、下記
の方法により成形性のrfP価を行った。Further, using the resin composition produced by the above method, the rfP value of moldability was determined by the following method.
離型性の測定:低圧トランスファー成形法により離型性
測定金型を用いて175
’CX120秒の条件で成形し、ブ
シュプルゲージで離型力を測定し
た。Measurement of mold releasability: Molding was performed using a mold releasability measurement mold by a low pressure transfer molding method under the conditions of 175'CX120 seconds, and the mold release force was measured with a bush pull gauge.
◎:5に+rf以下、 O:10kgf以下、Δ:2
0bgf以下、 X:30kgf以下フローマーク:低
圧トランスファー成形法により直径10cmの円盤を1
75℃×
120秒の条件で成形し、フロー
マークを観察しな。◎: 5+rf or less, O: 10kgf or less, Δ: 2
0bgf or less,
Mold at 75°C for 120 seconds and observe flow marks.
◎: 100shot以上70−マーク なし○:
50shot以上フローマーク なしΔ: 10sh
ot以上70−マーク なしX: 5shot以上
フローマーク なし以上の評価結果をまとめて表5に示
す。◎: 100 shots or more 70-mark None ○:
50 shots or more without flow mark Δ: 10sh
Table 5 summarizes the evaluation results of ot or more, 70-marks, none X: 5 shots or more, flow marks, none or more.
表
2
溶融シリカ(C)
表
シランカップリング剤
表
シリコーン系重合体
表5にみられるように、本発明の樹脂組成物(実施例1
〜4)は半田耐熱、信頼性、フローマークに優れている
。これに対してビフェニル型エポキシ樹脂を含有しない
比較例1では半田耐熱が@端に悪く、本発明ビニルシラ
ンカップリング剤を使用しない比較例2では半田耐熱性
、信頼性、飛型性において劣っているうえに、70−マ
ークも現れる。Table 2 Fused silica (C) Table Silane coupling agent Table Silicone polymer As shown in Table 5, the resin composition of the present invention (Example 1
-4) are excellent in soldering heat resistance, reliability, and flow marks. On the other hand, Comparative Example 1, which does not contain biphenyl-type epoxy resin, has extremely poor soldering heat resistance, and Comparative Example 2, which does not use the vinyl silane coupling agent of the present invention, has poor soldering heat resistance, reliability, and flyability. 70-mark also appears.
また、特定の溶融シリカを75〜90重量%含有した本
発明の樹脂組成物(実施例7〜10)は信頼性が優れて
いるうえに半田耐熱性がさらに向上している。Further, the resin compositions of the present invention (Examples 7 to 10) containing 75 to 90% by weight of specific fused silica have excellent reliability and further improved soldering heat resistance.
また、表5にみられるように、さらにシリコーン系重合
体を含有する本発明のエポキシ樹脂組成物(実施例11
〜14)は半田耐熱性が優れているうえに信頼性、離型
性が一層向上している。Furthermore, as shown in Table 5, the epoxy resin composition of the present invention further containing a silicone polymer (Example 11)
-14) have excellent soldering heat resistance and further improved reliability and mold releasability.
〈発明の効果〉
本発明の樹脂組成物は、半田耐熱性、信頼性および成形
性が優れており、半導体封止用としての理想的な性能を
有している。<Effects of the Invention> The resin composition of the present invention has excellent soldering heat resistance, reliability, and moldability, and has ideal performance for semiconductor encapsulation.
特許出願大東し株式会社Patent application Daitoshi Co., Ltd.
Claims (3)
)およびシランカップリング剤(D)からなる樹脂組成
物であって、前記エポキシ樹脂(A)が次式( I ) ▲数式、化学式、表等があります▼・・・( I ) (ただし、R^1〜R^8は水素原子、C_1〜C_4
の低級アルキル基またはハロゲン原子を示す。) で表される骨格を有するエポキシ樹脂(a)を必須成分
をして含有し、かつ前記シランカップリング剤(D)が
ビニル基を含有するビニルシラン化合物であることを特
徴とする樹脂組成物。(1) Epoxy resin (A), curing agent (B), filler (C
) and a silane coupling agent (D), in which the epoxy resin (A) has the following formula (I) ▲There are mathematical formulas, chemical formulas, tables, etc.▼...(I) (However, R ^1~R^8 are hydrogen atoms, C_1~C_4
represents a lower alkyl group or a halogen atom. ) A resin composition comprising as an essential component an epoxy resin (a) having a skeleton represented by the following formula, and wherein the silane coupling agent (D) is a vinyl silane compound containing a vinyl group.
あり、かつ充填材(C)が平均粒径12μm以下の破砕
溶融シリカ(C′)40〜90重量%および平均粒径4
0μm以下の球状溶融シリカ(C″)10〜60重量%
からなる溶融シリカ(C)を含むことを特徴とする請求
項(1)記載の樹脂組成物。(2) The proportion of the filler (C) is 75 to 90% by weight of the total, and the filler (C) is 40 to 90% by weight of crushed fused silica (C') with an average particle size of 12 μm or less and an average particle size 4
10 to 60% by weight of spherical fused silica (C″) of 0 μm or less
The resin composition according to claim 1, characterized in that it contains fused silica (C) consisting of fused silica (C).
系重合体(E)を含むことを特徴とする請求項(1)ま
たは(2)に記載の樹脂組成物。(3) The resin composition according to claim (1) or (2), further comprising a silicone polymer (E) in addition to components (A) to (D).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25840889A JP2867471B2 (en) | 1989-10-02 | 1989-10-02 | Resin composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25840889A JP2867471B2 (en) | 1989-10-02 | 1989-10-02 | Resin composition |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03119049A true JPH03119049A (en) | 1991-05-21 |
JP2867471B2 JP2867471B2 (en) | 1999-03-08 |
Family
ID=17319813
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25840889A Expired - Fee Related JP2867471B2 (en) | 1989-10-02 | 1989-10-02 | Resin composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2867471B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5416138A (en) * | 1992-09-24 | 1995-05-16 | Sumitomo Bakelite Company Limited | Epoxy resin composition |
JP2005162846A (en) * | 2003-12-02 | 2005-06-23 | Nitto Denko Corp | Resin composition for sealing semiconductor and semiconductor device using the same |
WO2011065365A1 (en) * | 2009-11-30 | 2011-06-03 | ナミックス株式会社 | Epoxy resin composition for sealing semiconductors, and semiconductor devices |
JP2012097232A (en) * | 2010-11-04 | 2012-05-24 | Kaneka Corp | Bonding sheet |
WO2015019407A1 (en) | 2013-08-05 | 2015-02-12 | 日立化成株式会社 | Epoxy resin composition and electronic component device |
-
1989
- 1989-10-02 JP JP25840889A patent/JP2867471B2/en not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5416138A (en) * | 1992-09-24 | 1995-05-16 | Sumitomo Bakelite Company Limited | Epoxy resin composition |
JP2005162846A (en) * | 2003-12-02 | 2005-06-23 | Nitto Denko Corp | Resin composition for sealing semiconductor and semiconductor device using the same |
WO2011065365A1 (en) * | 2009-11-30 | 2011-06-03 | ナミックス株式会社 | Epoxy resin composition for sealing semiconductors, and semiconductor devices |
JP2012097232A (en) * | 2010-11-04 | 2012-05-24 | Kaneka Corp | Bonding sheet |
WO2015019407A1 (en) | 2013-08-05 | 2015-02-12 | 日立化成株式会社 | Epoxy resin composition and electronic component device |
US9796828B2 (en) | 2013-08-05 | 2017-10-24 | Hitachi Chemical Company, Ltd | Epoxy resin composition and electronic component device |
Also Published As
Publication number | Publication date |
---|---|
JP2867471B2 (en) | 1999-03-08 |
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