JPH0311902Y2 - - Google Patents
Info
- Publication number
- JPH0311902Y2 JPH0311902Y2 JP1984144205U JP14420584U JPH0311902Y2 JP H0311902 Y2 JPH0311902 Y2 JP H0311902Y2 JP 1984144205 U JP1984144205 U JP 1984144205U JP 14420584 U JP14420584 U JP 14420584U JP H0311902 Y2 JPH0311902 Y2 JP H0311902Y2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- mirror holder
- chamber
- laser beam
- cooling water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000498 cooling water Substances 0.000 claims description 17
- 230000017525 heat dissipation Effects 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 230000010355 oscillation Effects 0.000 description 5
- 230000005855 radiation Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本考案はレーザ加工機のさらに詳しくはレーザ
ビームオシレート装置の改良に関するものであ
る。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a laser processing machine, and more particularly to an improvement of a laser beam oscillation device.
第３図は従来のレーザ加工機の加工ヘツドの要
部断面図、第４図はその一部拡大図である。１は
レーザ発振器、２はレーザビーム、３は集光レン
ズ、４はミラーＡ、５はミラーＢ、６はミラーＢ
５の振動機、７はケーシング、８はノズル、９は
被加工物、１０はミラーホルダー、１１はねじＡ
である。
FIG. 3 is a sectional view of a main part of a processing head of a conventional laser processing machine, and FIG. 4 is a partially enlarged view thereof. 1 is a laser oscillator, 2 is a laser beam, 3 is a condenser lens, 4 is a mirror A, 5 is a mirror B, 6 is a mirror B
5 is a vibrator, 7 is a casing, 8 is a nozzle, 9 is a workpiece, 10 is a mirror holder, 11 is a screw A
It is.
従来のレーザ加工機の加工ヘツドは以上のよう
に構成され、加工に当つては振動機６によりミラ
ーＢ５を矢印方向に振動させることにより、レー
ザビームの先端を10mm位の巾で振動させ、レーザ
ビームによる加熱帯にある程度の巾を持たせてい
る。 The processing head of a conventional laser processing machine is constructed as described above, and during processing, the mirror B5 is vibrated in the direction of the arrow by the vibrator 6, thereby vibrating the tip of the laser beam with a width of about 10 mm, and the laser beam is The heating zone created by the beam has a certain width.
ところで上述のレーザ加工機で熱処理など行な
う場合は、その出力も２〜5kwと比較的大出力の
レーザビームを使用するので、それを受けるミラ
ー４，５の熱吸収も大きく、したがつて加熱され
て温度上昇を招きそれによる障害を発生する。特
に高速度で振動するミラーＢ５は振動に備えて軽
量化を計る目的で材質にシリコンを選択している
ため、前記熱吸収によりミラーＢ５の破損を生じ
たり、あるいはミラーＢ５をミラーホルダ１０に
固着する接着剤が剥がれたりするトラブルが生
じ、問題となつていた。
By the way, when performing heat treatment with the above-mentioned laser processing machine, a relatively high-output laser beam of 2 to 5 kW is used, so the mirrors 4 and 5 that receive the beam absorb a large amount of heat, and are therefore heated. This can lead to a temperature rise and cause problems. In particular, since silicon is selected as the material for the mirror B5, which vibrates at high speed, in order to reduce the weight in preparation for vibration, the mirror B5 may be damaged due to the heat absorption, or the mirror B5 may become stuck to the mirror holder 10. This has caused problems such as adhesives peeling off.
又ミラーＢ５とミラーホルダ１０とよりなる振
動ミラーの固有振動機が150Hz付近にあるため、
振動数を150Hz近くまで上げると共振を生じ、ミ
ラー破損の恐れがあるため振動数を150Hz以上に
は上げられないという制約をもうけていた。 Also, since the natural oscillator of the vibrating mirror consisting of mirror B5 and mirror holder 10 is around 150Hz,
Raising the frequency to near 150Hz would cause resonance, and there was a risk of damaging the mirror, so there was a restriction that the frequency could not be increased above 150Hz.
本考案は上述の従来のレーザビームオシレート
装置の耐熱上の弱点を改善するとともに、振動ミ
ラーの固有振動数を高めて利用振動数帯域を拡大
することを目的としている。 The purpose of the present invention is to improve the heat resistance weaknesses of the conventional laser beam oscillation device described above, and to increase the natural frequency of the vibrating mirror to expand the usable frequency band.
この考案に係るレーザビームオシレート装置
は、ミラーを固着した面の反対側に放熱フインを
備えると共に、端部を中空円筒状に形成してなる
ミラーホルダーと、ミラー振動機を装着した壁面
と対向する壁面に装着され、内部に凹部を形成す
ると共に、その凹部につながる導水孔及び排水口
を有するチヤンバーとを備えている。
The laser beam oscillator according to this invention is equipped with heat dissipation fins on the opposite side of the surface to which the mirror is fixed, and a mirror holder having a hollow cylindrical end, which faces the wall surface on which the mirror vibrator is mounted. The chamber is attached to a wall surface, has a recess formed inside thereof, and has a water guide hole and a drain port connected to the recess.
そして、前記ミラーホルダーの中空円筒状に形
成した端部を、ゴム製ガスケツトを介して、前記
チヤンバーの凹部に回転自在に嵌挿して冷却水室
を形成したものである。 The hollow cylindrical end of the mirror holder is rotatably fitted into the recess of the chamber via a rubber gasket to form a cooling water chamber.
この考案においては、ミラーホルダーに備えら
れた放熱フインが熱を放散させると同時に、ミラ
ーホルダーの端部とチヤンバーの凹部とで形成さ
れた冷却水室に冷却水を給水すると、その冷却水
は導水孔を経て冷却水室に流れ、レーザビームの
熱を吸収して排水口に排出される。
In this invention, the heat dissipation fins provided on the mirror holder dissipate heat, and at the same time, when cooling water is supplied to the cooling water chamber formed by the end of the mirror holder and the recess of the chamber, the cooling water is introduced into the cooling water chamber. The cooling water flows through the holes into the cooling water chamber, absorbs the heat from the laser beam, and is discharged to the drain.
また、高速度で振動しているミラーホルダーの
端部は、弾力性を有したゴム製ガスケツトを介し
てチヤンバーに支持されているので、ミラーを含
む振動ミラーの固有振動数が高くなる。 Furthermore, since the end of the mirror holder, which vibrates at high speed, is supported by the chamber via an elastic rubber gasket, the natural frequency of the vibrating mirror including the mirror becomes high.
第１図および第２図は本考案の実施例を示すレ
ーザビームオシレート装置の断面図およびその一
部拡大図である。図において５はミラーＢ、６は
ミラー振動機、７はケーシング、１１はねじＡ、
１２はミラーホルダー、１３は抑え金、１４はね
じＢ、１５は放熱フイン、１６はチヤンバー、１
７は冷却水室、１８はゴム製ガスケツト、１９は
冷却水である。
1 and 2 are a cross-sectional view and a partially enlarged view of a laser beam oscillation device showing an embodiment of the present invention. In the figure, 5 is a mirror B, 6 is a mirror vibrator, 7 is a casing, 11 is a screw A,
12 is a mirror holder, 13 is a retainer, 14 is a screw B, 15 is a radiation fin, 16 is a chamber, 1
7 is a cooling water chamber, 18 is a rubber gasket, and 19 is a cooling water.
図においてミラーＢ５は接着剤を使用せずに押
え金１３とねじＢ１４でミラーホルダー１２に固
着されている。ミラーホルダー１２の端部は、ケ
ーシング７の壁面に装着されたチヤンバー１６の
凹部に、ゴム製ガスケツト１８を介して回転自在
に嵌挿され、冷却水室１７を形成している。そし
て、この冷却水室１７に冷却水を循環せしめる
と、ミラーホルダー１２のミラーＢ５の反対側に
設けられた放熱フイン１５の放熱効果と相俟つて
ミラーホルダー１２およびミラーは冷却され、温
度上昇は防止される。又ミラーホルダーの端部は
ゴム製ガスケツト１８で弾力的に支持され、ミラ
ーＢ５とミラーホルダー１２よりなる振動ミラー
の固有振動数は高くなり、その結果レーザビーム
オシレート装置の利用振動数帯域は拡大されるこ
ととなる。 In the figure, mirror B5 is fixed to mirror holder 12 with presser foot 13 and screw B14 without using adhesive. The end of the mirror holder 12 is rotatably fitted into a recess of a chamber 16 attached to the wall of the casing 7 via a rubber gasket 18 to form a cooling water chamber 17. When the cooling water is circulated in the cooling water chamber 17, the mirror holder 12 and the mirror are cooled together with the heat radiation effect of the heat radiation fins 15 provided on the opposite side of the mirror B5 of the mirror holder 12, and the temperature rise is reduced. Prevented. Furthermore, the end of the mirror holder is elastically supported by a rubber gasket 18, so that the natural frequency of the vibrating mirror made up of the mirror B5 and the mirror holder 12 is increased, and as a result, the usable frequency band of the laser beam oscillation device is expanded. The Rukoto.
本考案はレーザビームオシレート装置におい
て、ミラーホルダーに放熱フインを備えるととも
に、内部に凹部を形成するチヤンバーをケーシン
グに装着し、ミラーホルダーの端部をゴム製ガス
ケツトを介して該チヤンバーに嵌挿して、冷却水
室を構成し冷却水を循環させるようにしたので、
ミラーホルダーおよびミラーの過熱を防ぎ、熱に
よる破損等を防止できるようになつた。又ミラー
ホルダーの端部はゴム製ガスケツトを介してチヤ
ンバーに支持されるので、ミラーおよびミラーホ
ルダーよりなる振動ミラーの固有振動数は従来の
150Hzから300Hzに上り、このためレーザビームオ
シレート装置の利用振動数帯域は大巾に拡大され
ることとなつた。
The present invention provides a laser beam oscillator, in which a mirror holder is equipped with a heat dissipation fin, a chamber with a recess formed inside is attached to a casing, and the end of the mirror holder is fitted into the chamber via a rubber gasket. Since the cooling water chamber was configured to circulate the cooling water,
It is now possible to prevent the mirror holder and mirror from overheating and damage caused by heat. Also, since the end of the mirror holder is supported by the chamber via a rubber gasket, the natural frequency of the vibrating mirror consisting of the mirror and mirror holder is lower than that of the conventional one.
The frequency range has increased from 150Hz to 300Hz, and as a result, the usable frequency band of laser beam oscillation devices has been greatly expanded.
第１図は本考案の実施例を示すレーザビームオ
シレート装置の断面図、第２図はそのミラーホル
ダーの拡大図である。第３図は従来のレーザ加工
機の加工ヘツドの要部断面図、第４図はその一部
拡大図である。図中５はミラーＢ、６は振動機、
７はケーシング、１１はねじＡ、１２はミラーホ
ルダー、１３は押え金、１４はねじＢ、１５は放
熱フイン、１６はチヤンバー、１７は冷却水室、
１８はゴム製ガスケツト、１９は冷却水である。
なお図中同一符号は同一又は相当部分を示すもの
とする。
FIG. 1 is a sectional view of a laser beam oscillating device showing an embodiment of the present invention, and FIG. 2 is an enlarged view of its mirror holder. FIG. 3 is a sectional view of a main part of a processing head of a conventional laser processing machine, and FIG. 4 is a partially enlarged view thereof. In the figure, 5 is a mirror B, 6 is a vibrator,
7 is a casing, 11 is a screw A, 12 is a mirror holder, 13 is a presser foot, 14 is a screw B, 15 is a heat radiation fin, 16 is a chamber, 17 is a cooling water chamber,
18 is a rubber gasket, and 19 is cooling water.
Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
おいて、 ミラーを固着した面の反対側に放熱フインを備
えると共に、端部を中空円筒状に形成してなるミ
ラーホルダーと、ミラー振動機を装着した壁面と
対向する壁面に装着され、内部に凹部を形成する
と共に、該凹部につながる導水孔及び排水口を有
するチヤンバーとを備え、前記ミラーホルダーの
中空円筒状に形成した端部をゴム製ガスケツトを
介して、前記チヤンバーの凹部に回転自在に嵌挿
して冷却水室を形成したことを特徴とするレーザ
ビームオシレート装置。[Scope of Claim for Utility Model Registration] A laser beam oscillating device for a laser processing machine is provided with a mirror holder having heat dissipation fins on the opposite side of the surface to which the mirror is fixed and whose end is formed into a hollow cylindrical shape, and a mirror vibration A hollow cylindrical end of the mirror holder is attached to a wall opposite to the wall on which the mirror holder is mounted, and has a recess formed inside, and a chamber having a water introduction hole and a drainage port connected to the recess. A laser beam oscillating device characterized in that a cooling water chamber is formed by rotatably fitting into the recessed portion of the chamber via a rubber gasket.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984144205U JPH0311902Y2 (en) | 1984-09-26 | 1984-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984144205U JPH0311902Y2 (en) | 1984-09-26 | 1984-09-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6159367U JPS6159367U (en) | 1986-04-21 |
| JPH0311902Y2 true JPH0311902Y2 (en) | 1991-03-20 |
Family
ID=30702491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984144205U Expired JPH0311902Y2 (en) | 1984-09-26 | 1984-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311902Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005231316A (en) * | 2004-02-23 | 2005-09-02 | Toyo Seikan Kaisha Ltd | Metal container with hairline pattern and production method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58176986A (en) * | 1982-04-12 | 1983-10-17 | Ishikawajima Harima Heavy Ind Co Ltd | Laser beam lead-in and lead-out window in laser tube |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56121277U (en) * | 1980-02-18 | 1981-09-16 | ||
| JPS5970358U (en) * | 1982-10-30 | 1984-05-12 | 株式会社東芝 | Laser device |
-
1984
- 1984-09-26 JP JP1984144205U patent/JPH0311902Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58176986A (en) * | 1982-04-12 | 1983-10-17 | Ishikawajima Harima Heavy Ind Co Ltd | Laser beam lead-in and lead-out window in laser tube |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005231316A (en) * | 2004-02-23 | 2005-09-02 | Toyo Seikan Kaisha Ltd | Metal container with hairline pattern and production method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6159367U (en) | 1986-04-21 |
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