JPH03117831U - - Google Patents
Info
- Publication number
- JPH03117831U JPH03117831U JP2670390U JP2670390U JPH03117831U JP H03117831 U JPH03117831 U JP H03117831U JP 2670390 U JP2670390 U JP 2670390U JP 2670390 U JP2670390 U JP 2670390U JP H03117831 U JPH03117831 U JP H03117831U
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- photoresist liquid
- stopper
- liquid supply
- clamp body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims description 5
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2670390U JPH03117831U (de) | 1990-03-15 | 1990-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2670390U JPH03117831U (de) | 1990-03-15 | 1990-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03117831U true JPH03117831U (de) | 1991-12-05 |
Family
ID=31529584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2670390U Pending JPH03117831U (de) | 1990-03-15 | 1990-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03117831U (de) |
-
1990
- 1990-03-15 JP JP2670390U patent/JPH03117831U/ja active Pending
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