JPH03117711U - - Google Patents
Info
- Publication number
- JPH03117711U JPH03117711U JP2716690U JP2716690U JPH03117711U JP H03117711 U JPH03117711 U JP H03117711U JP 2716690 U JP2716690 U JP 2716690U JP 2716690 U JP2716690 U JP 2716690U JP H03117711 U JPH03117711 U JP H03117711U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- chamber
- length measuring
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 230000002265 prevention Effects 0.000 claims description 2
- 230000032258 transport Effects 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2716690U JPH03117711U (https=) | 1990-03-19 | 1990-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2716690U JPH03117711U (https=) | 1990-03-19 | 1990-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03117711U true JPH03117711U (https=) | 1991-12-05 |
Family
ID=31530034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2716690U Pending JPH03117711U (https=) | 1990-03-19 | 1990-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03117711U (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005038853A (ja) * | 2003-07-14 | 2005-02-10 | Fei Co | 二重ビーム装置 |
| KR101396648B1 (ko) * | 2013-05-13 | 2014-05-16 | 서희주 | 장신구용 지지체 |
-
1990
- 1990-03-19 JP JP2716690U patent/JPH03117711U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005038853A (ja) * | 2003-07-14 | 2005-02-10 | Fei Co | 二重ビーム装置 |
| JP2011210740A (ja) * | 2003-07-14 | 2011-10-20 | Fei Co | 二重ビーム装置 |
| KR101396648B1 (ko) * | 2013-05-13 | 2014-05-16 | 서희주 | 장신구용 지지체 |