JPH03116413U - - Google Patents

Info

Publication number
JPH03116413U
JPH03116413U JP2580090U JP2580090U JPH03116413U JP H03116413 U JPH03116413 U JP H03116413U JP 2580090 U JP2580090 U JP 2580090U JP 2580090 U JP2580090 U JP 2580090U JP H03116413 U JPH03116413 U JP H03116413U
Authority
JP
Japan
Prior art keywords
exhaust side
slow
exhaust
main exhaust
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2580090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2580090U priority Critical patent/JPH03116413U/ja
Publication of JPH03116413U publication Critical patent/JPH03116413U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packages (AREA)
  • Pipeline Systems (AREA)
  • Drying Of Semiconductors (AREA)
  • Control Of Fluid Pressure (AREA)
JP2580090U 1990-03-13 1990-03-13 Pending JPH03116413U (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2580090U JPH03116413U (US20080094685A1-20080424-C00004.png) 1990-03-13 1990-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2580090U JPH03116413U (US20080094685A1-20080424-C00004.png) 1990-03-13 1990-03-13

Publications (1)

Publication Number Publication Date
JPH03116413U true JPH03116413U (US20080094685A1-20080424-C00004.png) 1991-12-03

Family

ID=31528721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2580090U Pending JPH03116413U (US20080094685A1-20080424-C00004.png) 1990-03-13 1990-03-13

Country Status (1)

Country Link
JP (1) JPH03116413U (US20080094685A1-20080424-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009078354A1 (ja) * 2007-12-18 2009-06-25 Sumitomo Electric Industries, Ltd. 処理方法および半導体装置の製造方法
CN103228922A (zh) * 2010-05-11 2013-07-31 爱德华兹有限公司 真空泵送系统

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009078354A1 (ja) * 2007-12-18 2009-06-25 Sumitomo Electric Industries, Ltd. 処理方法および半導体装置の製造方法
CN103228922A (zh) * 2010-05-11 2013-07-31 爱德华兹有限公司 真空泵送系统
JP2013534987A (ja) * 2010-05-11 2013-09-09 エドワーズ リミテッド 真空ポンプ輸送システム
CN103228922B (zh) * 2010-05-11 2016-10-26 爱德华兹有限公司 真空泵送系统

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