JPH03116410U - - Google Patents
Info
- Publication number
- JPH03116410U JPH03116410U JP2515590U JP2515590U JPH03116410U JP H03116410 U JPH03116410 U JP H03116410U JP 2515590 U JP2515590 U JP 2515590U JP 2515590 U JP2515590 U JP 2515590U JP H03116410 U JPH03116410 U JP H03116410U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- movement mechanism
- fine movement
- laminated piezoelectric
- thin plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 2
- 238000010030 laminating Methods 0.000 claims 1
- 230000005641 tunneling Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 9
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2515590U JPH03116410U (enExample) | 1990-03-13 | 1990-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2515590U JPH03116410U (enExample) | 1990-03-13 | 1990-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03116410U true JPH03116410U (enExample) | 1991-12-03 |
Family
ID=31528096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2515590U Pending JPH03116410U (enExample) | 1990-03-13 | 1990-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03116410U (enExample) |
-
1990
- 1990-03-13 JP JP2515590U patent/JPH03116410U/ja active Pending