JPH03116410U - - Google Patents

Info

Publication number
JPH03116410U
JPH03116410U JP2515590U JP2515590U JPH03116410U JP H03116410 U JPH03116410 U JP H03116410U JP 2515590 U JP2515590 U JP 2515590U JP 2515590 U JP2515590 U JP 2515590U JP H03116410 U JPH03116410 U JP H03116410U
Authority
JP
Japan
Prior art keywords
piezoelectric element
movement mechanism
fine movement
laminated piezoelectric
thin plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2515590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2515590U priority Critical patent/JPH03116410U/ja
Publication of JPH03116410U publication Critical patent/JPH03116410U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Control Of Position Or Direction (AREA)
JP2515590U 1990-03-13 1990-03-13 Pending JPH03116410U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2515590U JPH03116410U (enrdf_load_stackoverflow) 1990-03-13 1990-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2515590U JPH03116410U (enrdf_load_stackoverflow) 1990-03-13 1990-03-13

Publications (1)

Publication Number Publication Date
JPH03116410U true JPH03116410U (enrdf_load_stackoverflow) 1991-12-03

Family

ID=31528096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2515590U Pending JPH03116410U (enrdf_load_stackoverflow) 1990-03-13 1990-03-13

Country Status (1)

Country Link
JP (1) JPH03116410U (enrdf_load_stackoverflow)

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