JPH03116040U - - Google Patents

Info

Publication number
JPH03116040U
JPH03116040U JP2579290U JP2579290U JPH03116040U JP H03116040 U JPH03116040 U JP H03116040U JP 2579290 U JP2579290 U JP 2579290U JP 2579290 U JP2579290 U JP 2579290U JP H03116040 U JPH03116040 U JP H03116040U
Authority
JP
Japan
Prior art keywords
wafer
wing
case
periphery
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2579290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2579290U priority Critical patent/JPH03116040U/ja
Publication of JPH03116040U publication Critical patent/JPH03116040U/ja
Pending legal-status Critical Current

Links

JP2579290U 1990-03-14 1990-03-14 Pending JPH03116040U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2579290U JPH03116040U (enrdf_load_stackoverflow) 1990-03-14 1990-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2579290U JPH03116040U (enrdf_load_stackoverflow) 1990-03-14 1990-03-14

Publications (1)

Publication Number Publication Date
JPH03116040U true JPH03116040U (enrdf_load_stackoverflow) 1991-12-02

Family

ID=31528714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2579290U Pending JPH03116040U (enrdf_load_stackoverflow) 1990-03-14 1990-03-14

Country Status (1)

Country Link
JP (1) JPH03116040U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021136378A (ja) * 2020-02-28 2021-09-13 信越ポリマー株式会社 基板収納容器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021136378A (ja) * 2020-02-28 2021-09-13 信越ポリマー株式会社 基板収納容器

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