JPH03116026U - - Google Patents
Info
- Publication number
- JPH03116026U JPH03116026U JP1266090U JP1266090U JPH03116026U JP H03116026 U JPH03116026 U JP H03116026U JP 1266090 U JP1266090 U JP 1266090U JP 1266090 U JP1266090 U JP 1266090U JP H03116026 U JPH03116026 U JP H03116026U
- Authority
- JP
- Japan
- Prior art keywords
- developer
- nozzle
- opening
- wafer
- spraying device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005507 spraying Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1266090U JPH03116026U (de) | 1990-01-31 | 1990-02-09 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP933190 | 1990-01-31 | ||
| JP1266090U JPH03116026U (de) | 1990-01-31 | 1990-02-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03116026U true JPH03116026U (de) | 1991-12-02 |
Family
ID=31889774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1266090U Pending JPH03116026U (de) | 1990-01-31 | 1990-02-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03116026U (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01227437A (ja) * | 1988-03-07 | 1989-09-11 | Tokyo Electron Ltd | 現像装置 |
-
1990
- 1990-02-09 JP JP1266090U patent/JPH03116026U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01227437A (ja) * | 1988-03-07 | 1989-09-11 | Tokyo Electron Ltd | 現像装置 |