JPH03116025U - - Google Patents

Info

Publication number
JPH03116025U
JPH03116025U JP2375490U JP2375490U JPH03116025U JP H03116025 U JPH03116025 U JP H03116025U JP 2375490 U JP2375490 U JP 2375490U JP 2375490 U JP2375490 U JP 2375490U JP H03116025 U JPH03116025 U JP H03116025U
Authority
JP
Japan
Prior art keywords
vacuum processing
sample
heating plate
interposed
heat source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2375490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2375490U priority Critical patent/JPH03116025U/ja
Publication of JPH03116025U publication Critical patent/JPH03116025U/ja
Pending legal-status Critical Current

Links

JP2375490U 1990-03-12 1990-03-12 Pending JPH03116025U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2375490U JPH03116025U (enrdf_load_stackoverflow) 1990-03-12 1990-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2375490U JPH03116025U (enrdf_load_stackoverflow) 1990-03-12 1990-03-12

Publications (1)

Publication Number Publication Date
JPH03116025U true JPH03116025U (enrdf_load_stackoverflow) 1991-12-02

Family

ID=31526737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2375490U Pending JPH03116025U (enrdf_load_stackoverflow) 1990-03-12 1990-03-12

Country Status (1)

Country Link
JP (1) JPH03116025U (enrdf_load_stackoverflow)

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