JPH03115656U - - Google Patents
Info
- Publication number
- JPH03115656U JPH03115656U JP2441190U JP2441190U JPH03115656U JP H03115656 U JPH03115656 U JP H03115656U JP 2441190 U JP2441190 U JP 2441190U JP 2441190 U JP2441190 U JP 2441190U JP H03115656 U JPH03115656 U JP H03115656U
- Authority
- JP
- Japan
- Prior art keywords
- carbon evaporation
- carbon
- sample
- cartridge
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 229910052799 carbon Inorganic materials 0.000 claims description 14
- 230000008020 evaporation Effects 0.000 claims description 10
- 238000001704 evaporation Methods 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 5
- 238000009434 installation Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000012790 confirmation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2441190U JPH03115656U (enExample) | 1990-03-13 | 1990-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2441190U JPH03115656U (enExample) | 1990-03-13 | 1990-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03115656U true JPH03115656U (enExample) | 1991-11-29 |
Family
ID=31527375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2441190U Pending JPH03115656U (enExample) | 1990-03-13 | 1990-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03115656U (enExample) |
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1990
- 1990-03-13 JP JP2441190U patent/JPH03115656U/ja active Pending