JPH03115026U - - Google Patents

Info

Publication number
JPH03115026U
JPH03115026U JP2314390U JP2314390U JPH03115026U JP H03115026 U JPH03115026 U JP H03115026U JP 2314390 U JP2314390 U JP 2314390U JP 2314390 U JP2314390 U JP 2314390U JP H03115026 U JPH03115026 U JP H03115026U
Authority
JP
Japan
Prior art keywords
recovery device
boiler
steam
desorption
fluorocarbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2314390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2314390U priority Critical patent/JPH03115026U/ja
Publication of JPH03115026U publication Critical patent/JPH03115026U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
JP2314390U 1990-03-09 1990-03-09 Pending JPH03115026U (sk)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2314390U JPH03115026U (sk) 1990-03-09 1990-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2314390U JPH03115026U (sk) 1990-03-09 1990-03-09

Publications (1)

Publication Number Publication Date
JPH03115026U true JPH03115026U (sk) 1991-11-27

Family

ID=31526139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2314390U Pending JPH03115026U (sk) 1990-03-09 1990-03-09

Country Status (1)

Country Link
JP (1) JPH03115026U (sk)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015142884A (ja) * 2014-01-31 2015-08-06 株式会社栗本鐵工所 揮発性有機化合物処理装置及び処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015142884A (ja) * 2014-01-31 2015-08-06 株式会社栗本鐵工所 揮発性有機化合物処理装置及び処理方法

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