JPH03115013A - Conveyor device - Google Patents

Abstract

PURPOSE:To realize both a pitch transport and a continuous transport without dust generation and also improve the freedom degree of the delivery form of a load at a conveyor device in a clean room, by providing load receiving portions on both sides of the route of a reciprocatable movable-stands, and providing a plurality of ascendable/descendable receiving stands at the movable-stand. CONSTITUTION:A load 19 transported by means of a self travel truck which is not shown in the drawing is put into a transport space 5 through a carrying in/out opening, and trans-mounted on a load receiving portion 21 at the 1st position A where a load receiving stand 25A stands by. Next, the load receiving stand 25A is ascended by means of an ascent/descent motion device 26A, and a movable stand P is moved by 1 pitch by means of a motor 12, and made to be at a B position, and descended, and the load 19 is mounted on the load receiving portion 21 at the B position. And, the movable-stand P is returned to a front end side. By means of the next motion, the next load is supported with the load receiving stand 25A and the preceeding load 19 is supported with a load receiving stand 25B, and respective deliveries to C, D positions are done by means of a reciprocating motion device 11. Thus, an intermittent transport as well as a continuous transport can be done without dust generation.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a conveyor system employed, for example, in transporting loads within a clean room.

BACKGROUND OF THE INVENTION Conventionally, as this type of conveyor device, there has been provided a cargo handling facility as disclosed in, for example, Japanese Utility Model Application Publication No. 62-27868. In this conventional method, a load conveyed by a load conveying device is unloaded by a transfer tool, and then the load is sequentially conveyed one pitch at a time by a sequential feed device consisting of a lifting frame, a cylinder device, etc.

111 Problems to be Solved by the Invention According to the above-mentioned conventional method, since the conveyance is carried out sequentially one pitch at a time, rapid conveyance cannot be performed when the conveyance path is long, and if only continuous conveyance is considered, it is not possible to use rollers or belts. In this case, for example, it would be standardized to receive the load between the load transfer device and the transfer device, or to transfer the load from the end of the conveyance path to the next device.
It is not possible to quickly respond to various line demands, and belt and roller types move the load using the frictional force generated between the load and the load, which inevitably causes burrs, making it impossible to avoid dust generation, which is the most harmful substance in a clean room. .

It is an object of the present invention to provide a conveyor device that can perform both l-pitch conveyance and continuous conveyance without emitting any dust, and can arbitrarily set the transfer form for receiving loads at the start and end. .

Means for Solving the Problems In order to achieve the above object, the conveyor device of the present invention includes a movable base that is supported and guided by the machine frame side and is movable on a fixed path, and a reciprocating device that is interlocked with the movable base. At the same time, a cargo receiving part is provided along both sides of the fixed path, and a receiving part is provided at each of a plurality of locations in the fixed path direction on the movable platform, and the cargo receiving part can move in and out of the part by raising and lowering. The cargo receiver is equipped with a lifting device that is linked to the platform.

According to the configuration of the present invention, the load placed on the load receiver at the starting end of a fixed path can be lifted by the platform when the load is raised by the operation of the lifting device.

Then, by moving the movable platform equal to the pitch of the receiving platform and then lowering the platform, the receiving platform can be placed on the section with the cargo being sent one pitch.

In this way, the cargo receivers can intermittently transport loads by a pitch corresponding to the number of platforms, and the most downstream cargo receivers can correspond to the platforms. In some cases, all the receivers can accommodate the load on the platform6Then, the receiver can move the movable platform by raising the platform, the most downstream receiver including the platform, and one or more receivers with the load supported by the platform. By moving downstream, the load or group of loads can be conveyed along a fixed path to the end. As a result, the most downstream load can be positioned behind the rear end of the load receiving unit, and can be easily transferred to and from the next stage equipment such as another conveyor device, transfer device, or conveyance trolley. In addition, the remaining loads can be placed at predetermined pitches from the rear end to the upstream side in the receiving section, and are conveyed intermittently one pitch at a time by acting in the same way as on the starting end side. They can be located sequentially behind the ends. Furthermore, if there is no load between the starting end and the terminal end of the section, the cargo receiver controls the cargo placed at the starting end to be moved directly to the terminal end without stopping at an intermediate stop position. obtain.

EXAMPLE An example of the present invention will be described below with reference to FIGS. 1 to 4.

1 is a machine frame, which consists of a base frame body 2 and an upper frame body 3;
By attaching a cover 4 to the outer periphery of the upper frame body 3, a sealed box-shaped transport space 5 is formed. A pair of left and right conveyor devices 6 are disposed within the conveyance space 5. These conveyor tribes! Reference numeral 6 has a similar configuration, and each has a pair of left and right lower rails 7 in the front and back direction. and lower rail 7
A movable base 9 is provided which is supported and guided via a sliding body 8, and this movable base 9 is movable on a fixed path 10 in the front and back direction. A reciprocating device linked to the movable table 9! Reference numeral 11 denotes a motor 12 that can be driven forward and backward, which is attached to the base frame 2, a drive rivet shaft 13 attached to the motor shaft, a plurality of driven rivet shafts 14 attached to the lower part of the upper frame 3, and these rivets. Axis 13
．． It consists of 15 chenos suspended between 14 pieces. A portion of the chino 15 along the fixed path 10 is connected to the movable table 9 by a connecting tool 16. Cover units 20 are erected on both sides of the fixed path 10, and the upper ends of these cover units 20 are formed into inwardly bent parts, and a cargo receiving part 21 is provided at the inner end of the bent part. . That is, cargo receiving sections 21 are provided along both sides of the fixed path 10. A pair of left and right cover plates 23 are attached to both cargo receivers to form a recess 22 below between the parts 21, and a slit 24 along the constant path 10 is formed between the free ends of these cover plates 23. There is. At a plurality of locations on the movable platform 9 in the direction of a fixed path, in the embodiment, at one location at a predetermined pitch P, the cargo receivers 25A and 25B are movable into and out of the cargo receiver portion 21 by raising and lowering.

These cargo receivers are operated by a lifting device 2 that is linked to platforms 25A and 25B.
6A and 26B are provided. In other words, the cargo receiving area is platform 25A.
, 25B, guide tubes 27A, 27B are erected, and the lifting rod 28 is guided by the guide tubes 27A, 27B.
A and 28B are inserted into the slit 24, and at the upper end thereof, the cargo receiving area located in the recess 22 is a stand 25A,
25B are connected. The elevating device 26A.

26B has operating rods 29A and 29B that can be raised and lowered, and the upper ends of the operating rods 29A and 29B pass through the slit 24, and the cargo receivers are connected to the platforms 25A and 25B.

Between the outer ends of both conveyor devices 6, i.e. between the outer end of one conveyor device 6 and the other conveyor group! A traversing device (a lateral conveying device) 31 is provided between the starting end of the conveyor 6 and the outside. This lateral feed device 31 includes side rails 3 that are attached to the lower part of the upper frame body 3 in pairs, upper and lower, via flanges 32.
3 in the left and right direction, and the sliding bodies 3 are attached to these side rails 33.
From the upper end of the movable plate 35 that is supported and guided via the movable plate 4, a pair of left and right cargo receiving plates 36 are provided to protrude forward.

Here, the relative relationship between the cargo receiving platform 25B located on the side of the traversing device 31 and the plate 36 of both receiving devices is such that the platform 25B of the receiving device moves up and down between the plates 36 of both receiving devices. A lateral movement device 38 that is interlocked with a cargo receiving plate 36, which is movable on the left-right path 37 via the movable plate 35, etc., is connected to the upper frame body 3.
A motor 39 that can be driven in forward and reverse directions is attached to the motor 39, a drive rivet shaft 40 is attached to the motor shaft, a plurality of driven rivet shafts 41 are attached to the lower part of the upper frame body 3, and a motor 39 is installed between these rivet shafts 40 and 41. It consists of a stretched cheno 42, etc. A portion of the chino 42 along the left-right direction path 37 is connected to the movable body 35 by a connecting member 43.

Further, between the ends of both conveyor systems w6 and the lateral feed device 31
A lifting device 51 is provided at a position opposite to. This lifting device 51 includes a rectangular cylindrical support 52 erected from a base frame 2 and a slit 5 formed on the rear side of the support 52.
It is located both inside and outside through 3.

and a lifting member 54 supported and guided by the support column 52, a lifting device I57 disposed within the support column 52 in conjunction with the lifting member 54, and a lifting plate 55 connected rearward from the lifting member 54. configured. Here, the lifting plate 55 has a shape similar to that of the platform 25B in plan view, and both the cargo receivers can be raised and lowered between the plates 36 at the lower part of the lifting path 56.

The cover 4 facing the upper part of the lifting path 56 from the rear is cut out, an entrance/exit 61 is formed here, and a transfer device 62 is provided facing the entrance/exit 61 from the outside. This transfer device! 62 is the elevation path 56 that passes through the entrance/exit 61
It has a transfer conveyor 63 that can be inserted into the container.

Further, behind the transfer device 62, a load transfer device 66 is arranged, which includes a rail device 64 and a self-propelled cart 65 supported and guided by the rail device 164.

Note that there is a cover 4 facing the front end of the conveyor device 6 from the front.
is cut out, and a loading/unloading port 18 is formed here. The cargo 19 to be handled is, for example, a case containing a semiconductor.

Next, the transport work of the load 19 in the above embodiment will be explained.
Of both conveyor devices 6, one is for carrying in and the other is for carrying out, and in the conveyor device 6 for carrying in, the movable platform 9 is located on the starting end side as shown in FIG. The platforms 25A and 25B are lowered, and the cargo receiver is located below the section 21, as shown by the solid line. In this state, the cargo 19 transported by a self-propelled cart (not shown) is placed into the transport space 5 through the loading/unloading port 18 by a transfer device or manually, and the cargo is placed in the transport space 5 where the platform 25A is waiting. 1st place [In A, the cargo receiver is placed on the section 21. Next, the lifting device 26A at the front end is operated to raise the cargo receiving platform 25A and lift the cargo 19 as shown by the imaginary line (A) in FIG. The motor 12 is operated to move the movable platform 9 by a predetermined pitch of 2 minutes, and the cargo receiving platform 25A is moved to the second position.
Then, by lowering the cargo receiving platform 25A, the cargo 19 is placed on the receiving section 21 in the second device B. Then, the movable base 9 is returned to the front end side.

As a result, the cargo receiving platform 25A returns to the first position 11A, and the cargo receiving platform 25B is positioned below the cargo 19 which is stopped by the second device B. At this time, for example, a self-propelled trolley can
When a second load 19 is transported, the second load 19 is placed on the load receiving section 21 of the first device A. Then, both lifting devices 26A and 26B are operated, and both cargo receivers are moved to platform 2.
5A and 25B to lift the corresponding loads 19. Then, by operating the reciprocating device 11, both loads 19 can be conveyed on a fixed path 10, so that both receivers are moved to the platform 25A.
is placed in the third device C, and the cargo receiving platform 25B is placed in the fourth position. Before completing such conveyance, the lateral moving device 3g of the lateral feeding device 31 is activated, and the cargo receiver moves the plate 36 onto one of the conveyors! It is located outside the terminal end of 6. Therefore, the cargo receiving platform 25B located at the fourth position is located above the plate 36 as shown by the imaginary line (b) in FIG.

26B is activated, and both cargo receivers lower platforms 25A and 25B. As a result, the third place [In C, cargo 19 is received in part 21]
In the fourth position [D], the load 19 is placed on the side of the load receiver plate 36 by lowering the load receiver platform 25B. Then, the movable platform 9 is returned to the front end side by a predetermined pitch of 2 minutes, and the cargo receiving platform 25A is positioned below the cargo 19 in the third device C.Then, the lateral movement device 38 is activated to support the cargo 19. After moving the plate 36 laterally, the cargo receiver stops facing the lifting device 51. At this time, the lifting plate 55 of the lifting device 51 is at its lower limit, and the load 19 supported by the plate 36 of the cargo receiver is positioned above the lifting plate 55. By raising the lifting plate 55 in this state, the lifting plate 55 lifts the load 19 through the space between the two load receiving plates 36 and the lifting path 55.
6 will be raised. The load 19 lifted by the lifting device f51 is transferred! 62 through the entrance/exit 61 and delivered to the self-propelled cart 65. Note that the load 19 in the third device C is also transferred to the self-propelled cart 65 in the same manner.

The load 19 transported by the self-propelled cart 65 undergoes predetermined processing operations, and then is transported to the transfer device 62 again. and by the opposite action to that described above and by using the other conveyor device 6.

It is conveyed to the feeding end of this conveyor device 6.

It is taken out through the loading/unloading port 18 by a transfer device or manually.

In the above embodiment, the work of transporting two loads 19 in one cycle has been described, but it is also possible to transport one load 19 by omitting some operations. In other words, the cargo receiver is in the first position, which is the starting end of the section 21 [If there is no cargo 19 other than A, up to the third device C on the terminal side, the cargo receiver is in the first position!
The load 19 placed at A can be controlled to be moved directly to the third device C without stopping at the second device B, which is an intermediate stop position.

In addition, in the above embodiment, the conveyor device 6 and the lateral feed device 31 are arranged at right angles in plan view, but this is the case where the conveyor device 6 and the lateral feed device 31 are arranged at right angles to each other. 19 can be passed to a conveyance trolley or a transfer device, or even to another conveyor device whose conveyance direction is the same.

5 to 9 show another embodiment, that is, as shown in FIG. The receiving area is platform 2.
Supported by 5B. Then, the movable table 9a of the first conveyor device IBa is moved, and as shown in FIG. As shown in Figure 7, the first
After returning the movable base 9a of the conveyor device 6a to the starting end side,
Position the movable platform 9b of the second conveyor device 16b, and
9 in the same manner as described above, the cargo receiver is supported on the stand 25B in the second device B. Then, the movable table 9b is moved as shown in FIG. 5, and as shown in FIG. As shown in FIG. 9, after returning the movable platform 9b of the second conveyor device 16b to the starting end side, the movable platform 9c of the third conveyor device 6C is positioned, and one cargo receiver of this movable platform 9C is placed on the platform 25. 19 and conveyed to the end as shown in FIG. Although the description has been made for a state in which one load 19 is transported, the same method as described above can be applied to a plurality of loads 19.

Effects of the Invention According to the present invention having the above configuration, the amount of reciprocating movement of the movable platform is controlled, and the cargo receiving platform is controlled to move up and down.

Single or multiple loads can be conveyed intermittently at every other pitch, and can be conveyed continuously over a long distance, allowing rapid conveyance even when the conveyance path is long. In addition, by setting the most downstream cargo receiver so that the platform is located behind the rear end of the conveyor device, the transfer form of the receiver of the next process equipment for the cargo located behind the rear end can be set arbitrarily. Able to respond quickly to requests. At this time, the load can be transported intermittently every other pitch on the downstream side as well. Furthermore, unlike belt or roller types, there is no burr, so dust-free conveyance can be achieved.

[Brief explanation of drawings]

1 to 4 show an embodiment of the present invention, with FIG. 1 being a longitudinal sectional side view and FIG. 2 being a partially cutaway plan view. FIG. 3 is a partially cutaway rear view, FIG. 4 is a side view of one usage example, and FIGS. 5 to 9 are schematic side views showing other embodiments. DESCRIPTION OF SYMBOLS 1...Machine frame, 5...Transportation space, 6...Conveyor device, 7...Lower rail, 9...Movable base, 10...
・Constant path, 11... Reciprocating device, 12... Motor, I5... Cheno, 18... Carrying in/out exit, 19...
Load, 21... Load receiver is section, 25A, 25B... Load receiver is stand, 26A, 26B... Lifting device, 29A, 29B
...Operating rod, 31...Transverse feed device, 33...Side rail, 35...Movable plate, 36...Receiver is plate, 37
...Left-right direction path, 38...Lateral movement device, 51...
- Lifting device, 55... Lifting plate, 56... Lifting route, 61... Entrance/exit, 62... Transfer device, 66...
・Load conveyance device.

Claims (1)

[Claims] 1. A movable platform that is supported and guided by the machine frame side and is movable along a fixed path, and a reciprocating device interlocked with this movable platform, and load receiving sections are provided along both sides of the fixed path;
A conveyor device characterized in that a load receiving platform that can move in and out of the load receiving section by lifting and lowering is provided at each of a plurality of locations in a fixed path direction on the movable platform, and an elevating device that is interlocked with the load receiving platform.