JPH03114600U - - Google Patents
Info
- Publication number
- JPH03114600U JPH03114600U JP2288490U JP2288490U JPH03114600U JP H03114600 U JPH03114600 U JP H03114600U JP 2288490 U JP2288490 U JP 2288490U JP 2288490 U JP2288490 U JP 2288490U JP H03114600 U JPH03114600 U JP H03114600U
- Authority
- JP
- Japan
- Prior art keywords
- air
- diffusion pump
- input pipe
- introduces
- cooling body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000010926 purge Methods 0.000 claims 2
- 239000000498 cooling water Substances 0.000 claims 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2288490U JPH03114600U (ro) | 1990-03-06 | 1990-03-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2288490U JPH03114600U (ro) | 1990-03-06 | 1990-03-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03114600U true JPH03114600U (ro) | 1991-11-25 |
Family
ID=31525889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2288490U Pending JPH03114600U (ro) | 1990-03-06 | 1990-03-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03114600U (ro) |
-
1990
- 1990-03-06 JP JP2288490U patent/JPH03114600U/ja active Pending
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