JPH031142U - - Google Patents
Info
- Publication number
- JPH031142U JPH031142U JP6149289U JP6149289U JPH031142U JP H031142 U JPH031142 U JP H031142U JP 6149289 U JP6149289 U JP 6149289U JP 6149289 U JP6149289 U JP 6149289U JP H031142 U JPH031142 U JP H031142U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- mounting table
- tilting
- suction
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 24
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims description 3
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6149289U JPH031142U (sv) | 1989-05-25 | 1989-05-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6149289U JPH031142U (sv) | 1989-05-25 | 1989-05-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH031142U true JPH031142U (sv) | 1991-01-08 |
Family
ID=31589786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6149289U Pending JPH031142U (sv) | 1989-05-25 | 1989-05-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH031142U (sv) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008087883A (ja) * | 2006-09-29 | 2008-04-17 | Dainippon Screen Mfg Co Ltd | 基板取出装置およびその方法 |
| CN109809217A (zh) * | 2019-03-20 | 2019-05-28 | 深圳精智达技术股份有限公司 | 柔性面板分料装置及方法 |
-
1989
- 1989-05-25 JP JP6149289U patent/JPH031142U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008087883A (ja) * | 2006-09-29 | 2008-04-17 | Dainippon Screen Mfg Co Ltd | 基板取出装置およびその方法 |
| CN109809217A (zh) * | 2019-03-20 | 2019-05-28 | 深圳精智达技术股份有限公司 | 柔性面板分料装置及方法 |