JPH0311359U - - Google Patents
Info
- Publication number
- JPH0311359U JPH0311359U JP6906089U JP6906089U JPH0311359U JP H0311359 U JPH0311359 U JP H0311359U JP 6906089 U JP6906089 U JP 6906089U JP 6906089 U JP6906089 U JP 6906089U JP H0311359 U JPH0311359 U JP H0311359U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- motor
- semiconductor manufacturing
- manufacturing equipment
- spinner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000005524 ceramic coating Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
- Thermal Insulation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6906089U JPH0311359U (enExample) | 1989-06-15 | 1989-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6906089U JPH0311359U (enExample) | 1989-06-15 | 1989-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0311359U true JPH0311359U (enExample) | 1991-02-04 |
Family
ID=31604037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6906089U Pending JPH0311359U (enExample) | 1989-06-15 | 1989-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311359U (enExample) |
-
1989
- 1989-06-15 JP JP6906089U patent/JPH0311359U/ja active Pending