JPH03113169U - - Google Patents

Info

Publication number

JPH03113169U

JPH03113169U JP2165790U JP2165790U JPH03113169U JP H03113169 U JPH03113169 U JP H03113169U JP 2165790 U JP2165790 U JP 2165790U JP 2165790 U JP2165790 U JP 2165790U JP H03113169 U JPH03113169 U JP H03113169U

Authority

JP

Japan

Prior art keywords

chlorine

temperature

detects

water

sensor

Prior art date

1990-03-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 10
• 229910052801 chlorine Inorganic materials 0.000 claims description 10
• 239000000460 chlorine Substances 0.000 claims description 10
• 239000004065 semiconductor Substances 0.000 claims description 7
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
• 238000001514 detection method Methods 0.000 claims description 3
• 238000010586 diagram Methods 0.000 description 4
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 238000005259 measurement Methods 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1