JPH03112144A - Conveyor for semiconductor device - Google Patents
Conveyor for semiconductor deviceInfo
- Publication number
- JPH03112144A JPH03112144A JP1250876A JP25087689A JPH03112144A JP H03112144 A JPH03112144 A JP H03112144A JP 1250876 A JP1250876 A JP 1250876A JP 25087689 A JP25087689 A JP 25087689A JP H03112144 A JPH03112144 A JP H03112144A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- air
- nozzle
- devices
- advancing direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 69
- 238000007664 blowing Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 230000007723 transport mechanism Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001141 propulsive effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、圧縮空気(以下「エア」と称する)を吹き
付けて半導体装置を搬送する装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an apparatus for transporting semiconductor devices by blowing compressed air (hereinafter referred to as "air").
第4図は従来のこの種の半導体装置の搬送機構を示す側
面図である0図において、1 (1a、1b)はIC等
の半導体装置、2はこの半導体装置1が滑走するレール
、3はエアを噴出するためのノズル、4は前記半導体装
置1の到着を確認するためのセンサである。FIG. 4 is a side view showing a conventional transport mechanism for a semiconductor device of this type. In FIG. A nozzle 4 for blowing out air is a sensor for confirming the arrival of the semiconductor device 1.
次に動作について説明する。半導体装置1は連続した状
態(図中、la、lb) 、あるいは単体でセンサ4の
位置までレール2上を搬送されてくる(この搬送機構の
詳細は特にこの発明とは無関係のため省略する)、そし
て、半導体装置1がセンサ4を遮光した時点でノズル3
よりエアが噴出されて、半導体装置1のモールド部のテ
ーパ一部Aにエアが当たり、このエアの推進力で先頭の
センサ4を遮光した半導体装W11aのみがレール2上
を滑って進行方向に搬送されていく。Next, the operation will be explained. The semiconductor device 1 is transported on the rail 2 in a continuous state (la, lb in the figure) or singly to the position of the sensor 4 (the details of this transport mechanism are omitted because they are not particularly relevant to this invention). , and when the semiconductor device 1 blocks light from the sensor 4, the nozzle 3
The air is blown out, and the air hits the tapered part A of the mold part of the semiconductor device 1, and due to the propulsive force of this air, only the semiconductor device W11a, which shields the leading sensor 4 from light, slides on the rail 2 and moves in the direction of travel. being transported.
従来の半導体装置の搬送機構は以上の様に構成されてい
るので、半導体装置1の長さがその種類の違いにより変
化した場合、センサ4と半導体装置のモールドのテーパ
一部Aの距離が変化し、ノズル3あるいはセンサ4のど
ちらか一方を位置調整する必要があった。またモールド
の表面にエアを当てたのでは半導体装置1を押え付ける
形となり、強い推進力が得られないため、モールドのテ
ーパ一部Aにのみエアを当てる必要があるが、モールド
のテーパ一部Aの位置範囲が狭く限られているため、半
導体装flが停止した状態でエアを吹いても、正確に位
置が合っていない場合うまく前進しないといった問題が
あった。Since the conventional semiconductor device transport mechanism is configured as described above, when the length of the semiconductor device 1 changes due to the difference in its type, the distance between the sensor 4 and the tapered part A of the mold of the semiconductor device changes. However, it was necessary to adjust the position of either the nozzle 3 or the sensor 4. Also, if air is applied to the surface of the mold, it will press down the semiconductor device 1 and a strong propulsion force cannot be obtained, so it is necessary to apply air only to the tapered part A of the mold. Since the position range of A is narrow and limited, there is a problem in that even if air is blown while the semiconductor device fl is stopped, it will not move forward if the semiconductor device fl is not positioned accurately.
さらに、半導体装置が連続した状態で供給される場合、
隣同志の半導体装置1a、 lbの間(第4図B部分)
でモールドバリが絡み合い、ノズル3から吹き出るエア
のみでは分離できない問題点があった。Furthermore, when semiconductor devices are supplied in a continuous state,
Between adjacent semiconductor devices 1a and lb (part B in Figure 4)
There was a problem in that the mold burrs became entangled and could not be separated using only the air blown from the nozzle 3.
この発明は以上の様な問題点を解消するためになされた
もので、半導体装置の長さがその種類により変化しても
、センサあるいはノズルの位置調整をする必要がなく、
また半導体装置が停止した状態でもエアを吹けば確実に
進行方向に搬送できる機構を得る事を目的とする。This invention was made to solve the above problems, and even if the length of the semiconductor device changes depending on the type, there is no need to adjust the position of the sensor or nozzle.
Another object of the present invention is to provide a mechanism that can reliably transport a semiconductor device in the advancing direction by blowing air even when the semiconductor device is stopped.
この発明に係る半導体装置の搬送装置は、エアを噴出さ
せるノズルを半導体装置が滑走するレールの側部に設置
し、先頭の半導体装置のリード部に向けてエアを吹き付
ける様にするとともに、先頭から2番目の半導体装置を
進行方向と反対方向に推しとどめるエアを吹き出すノズ
ルを、前記レールの上方に設けたことを特徴とする。In the semiconductor device transport device according to the present invention, a nozzle for blowing out air is installed on the side of the rail on which the semiconductor device slides, and the air is blown toward the lead portion of the semiconductor device at the front. The present invention is characterized in that a nozzle is provided above the rail for blowing out air that pushes the second semiconductor device in a direction opposite to the traveling direction.
この発明に係る半導体装置の搬送装置は、特に進行方向
に対して先頭の半導体装置の数本のリード部を狙ってエ
アを吹きつけているために、半導体装置の長さに関係な
く、また停止していても確実に前進させることができる
。また、先頭から2番目の半導体装置に対して進行方向
と反対方向へ推しとどめるエアを吹き付けているので、
先頭の半導体装置と2番目の半導体装置を確実に分離す
ることができる。Since the semiconductor device transport device according to the present invention blows air particularly aiming at several leads of the leading semiconductor device in the direction of travel, the semiconductor device can stop or stop regardless of the length of the semiconductor device. Even if you do, you can definitely move forward. In addition, air is blown against the second semiconductor device from the top in a direction opposite to the direction in which it is traveling.
The first semiconductor device and the second semiconductor device can be reliably separated.
以下この発明の一実施例を図について説明する。 An embodiment of the present invention will be described below with reference to the drawings.
第1図はこの実施例による半導体装置の搬送装置を示す
平面図、第2図は上記半導体装置の搬送装置を示す側面
図、第3図は上記半導体装置のリード部の詳細を示す斜
視図である。FIG. 1 is a plan view showing a semiconductor device transport device according to this embodiment, FIG. 2 is a side view showing the semiconductor device transport device, and FIG. 3 is a perspective view showing details of the lead portion of the semiconductor device. be.
図において、1 (la、 lb)は半導体装置、2は
レール、3aはこのレール2の側部に設置されたノズル
であって、ここから吹き出されるエアは前記半導体装f
f1aのリード部5に当たり、この半導体装置1aを進
行方向に搬送する役割を果す、また、3bは前記レール
2の上方に設置されたノズルであって、ここから吹き出
されるエアは先頭から2個目の半導体装置1bの表面に
当たり、この半導体装置lbを進行方向に対して反対方
向に推しとどめる役割を果す、4はセンサ、5は前記半
導体装置1のリード、6はストッパ、7はこのストッパ
6に連絡されたシリンダを示す。In the figure, 1 (la, lb) is a semiconductor device, 2 is a rail, and 3a is a nozzle installed on the side of this rail 2, from which air is blown out to the semiconductor device f.
It corresponds to the lead part 5 of f1a and plays the role of transporting this semiconductor device 1a in the traveling direction. Also, 3b is a nozzle installed above the rail 2, and the air blown from this is two from the top. 4 is a sensor, 5 is a lead of the semiconductor device 1, 6 is a stopper, and 7 is a stopper 6. Indicates the cylinder that was contacted.
次に動作について説明する。半導体装置lはレール2上
を連続(図中、la、 lb・・・)あるいは単体でセ
ンサ4の位置まで搬送される。そして、先頭の半導体装
置laがセンサ4を遮光した時点で、この半導体装置!
aの進行方向に対し前面から数本のリード5(特に第3
図の斜線部の面)に向って、ノズル3aよりエアを吹き
つける。このとき、半導体装置1aはストッパ6に押付
けられた状態で停止することとなる0次に、半導体装M
1aを搬送したいタイミングでシリンダ7を動作させる
ことにより、ストッパ6は下降し、半導体装1ffff
ilaはノズル3aによるエアの推進力で進行方向に搬
送される。Next, the operation will be explained. The semiconductor device 1 is conveyed on the rail 2 continuously (la, lb, . . . in the figure) or singly to the position of the sensor 4. Then, when the first semiconductor device la blocks the sensor 4, this semiconductor device!
Several leads 5 (especially the third lead) from the front in the direction of movement of a.
Air is blown from the nozzle 3a toward the shaded area in the figure. At this time, the semiconductor device 1a is stopped in a state where it is pressed against the stopper 6, and the semiconductor device M
By operating the cylinder 7 at the desired timing to transport the semiconductor device 1a, the stopper 6 is lowered and the semiconductor device 1ffff
ila is conveyed in the traveling direction by the propulsion force of air from the nozzle 3a.
一方、半導体装置1が連続的に搬入されてきた場合、先
頭から2番目の半導体装置1bには、前面上方に設置さ
れたノズル3bから吹き出すエアによって、進行方向と
は反対方向にエアブローされる。On the other hand, when the semiconductor devices 1 are continuously carried in, the second semiconductor device 1b from the top is blown in the opposite direction to the direction of travel by air blown from the nozzle 3b installed above the front surface.
これにより、モールドバリ等の絡みがあっても先頭の半
導体装置1aと2番目の半導体装置!bは引き離されて
、確実に1個ずつ搬送されることとなる。As a result, even if there is entanglement due to mold burrs, etc., the first semiconductor device 1a and the second semiconductor device can be separated! b will be separated and reliably transported one by one.
なお、前記ノズル3bからのエアブロ−は、ノズル3a
によるエアブロ−の推進力の障害とはならず、かつパリ
の重なり等を引離すに充分な力を持った微量のエアであ
る。Note that the air blow from the nozzle 3b is transmitted to the nozzle 3a.
This is a very small amount of air that does not impede the propulsion force of the air blow and has sufficient force to separate overlapping particles.
以上の様にこの発明に依れば、エアを半導体装置の進行
方向に対して先頭から数本のリード部へ吹きつけて半導
体装置を搬送する様にしたため、装置に仕掛ける半導体
装置の品種が変わり長さ幅が変化しても、ノズル、セン
サ、ストッパ等の位置を再調整する必要がなく、品種換
えに際しても段取換時間の短縮に効果がある。またノズ
ルの位置、角度を特に厳密に調整しなくてもいずれかの
リードにエアが当たるだけで半導体装置を搬送する推進
力が得られる効果がある。また、先頭から2番目の半導
体装置に対して進行方向と反対方向にエアが当たり、モ
ールドバリ等の絡みがあっても引き離され、確実に1個
ずつ搬送される効果がある。As described above, according to the present invention, since the semiconductor device is conveyed by blowing air to several leads from the head in the direction of movement of the semiconductor device, the types of semiconductor devices installed in the device can be changed. Even if the length and width change, there is no need to readjust the positions of the nozzle, sensor, stopper, etc., and it is effective in shortening the setup time when changing products. Further, there is an effect that the driving force for transporting the semiconductor device can be obtained simply by blowing air onto one of the leads without particularly strictly adjusting the position and angle of the nozzle. In addition, air hits the second semiconductor device from the top in the direction opposite to the direction of travel, and even if there is entanglement with mold burrs, it is pulled apart and the semiconductor devices are reliably transported one by one.
第1図はこの発明の一実施例による半導体装置の搬送装
置を示す平面図、第2図は上記半導体装置の搬送装置を
示す側面図、第3図は上記半導体装置のリード部の詳細
を示す斜視図、第4図は従来の半導体装置の搬送装置を
示す側面図である。
図中、1.1a、lbは半導体装置、2はレール、3a
。
3bはノズル、4はセンサ、5はリード、6はストッパ
、7はシリンダである。
なお、図中同一符号は同−又は相当部分を示す。FIG. 1 is a plan view showing a semiconductor device transport device according to an embodiment of the present invention, FIG. 2 is a side view showing the semiconductor device transport device, and FIG. 3 is a detailed view of the lead portion of the semiconductor device. The perspective view and FIG. 4 are side views showing a conventional semiconductor device transport device. In the figure, 1.1a and lb are semiconductor devices, 2 is a rail, and 3a
. 3b is a nozzle, 4 is a sensor, 5 is a lead, 6 is a stopper, and 7 is a cylinder. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
備えた半導体装置の搬送装置において、先頭の半導体装
置を進行方向に推進させる圧縮空気を、前記レールの側
方からこの半導体装置のリード部に向つて吹き出すノズ
ルを備えるとともに、先頭から2番目の半導体装置を進
行方向と反対方向におしとどめる圧縮空気を、前記レー
ルの上方からこの半導体装置の上面に向って吹き出すノ
ズルを備えたことを特徴とする半導体装置の搬送装置。In a semiconductor device transport device equipped with a rail on which a semiconductor device slides singly or continuously, compressed air that propels the leading semiconductor device in the traveling direction is directed from the side of the rail toward the lead portion of this semiconductor device. and a nozzle that blows out compressed air from above the rail toward the top surface of the semiconductor device to stop the second semiconductor device from the top in a direction opposite to the traveling direction. Transport equipment for semiconductor devices.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1250876A JPH03112144A (en) | 1989-09-27 | 1989-09-27 | Conveyor for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1250876A JPH03112144A (en) | 1989-09-27 | 1989-09-27 | Conveyor for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03112144A true JPH03112144A (en) | 1991-05-13 |
Family
ID=17214328
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1250876A Pending JPH03112144A (en) | 1989-09-27 | 1989-09-27 | Conveyor for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03112144A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61295922A (en) * | 1985-06-26 | 1986-12-26 | Mitsubishi Electric Corp | Device for transferring semiconductor device |
JPS6253233B2 (en) * | 1980-05-16 | 1987-11-09 | Daicel Chem |
-
1989
- 1989-09-27 JP JP1250876A patent/JPH03112144A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6253233B2 (en) * | 1980-05-16 | 1987-11-09 | Daicel Chem | |
JPS61295922A (en) * | 1985-06-26 | 1986-12-26 | Mitsubishi Electric Corp | Device for transferring semiconductor device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5503146B2 (en) | Conveyor system and object conveying method for controlling spacing of object to be conveyed | |
EP1134172B1 (en) | Transfer and sorting conveyor | |
AU2278102A (en) | Conveyor and method for conveying products | |
DE69734660D1 (en) | SURFACE PROFILE FOR STABILIZING AND GUIDING A MATERIAL RAILWAY AND METHOD | |
JPH0357004B2 (en) | ||
US3838803A (en) | Separation of glass sheet material | |
EP0267639A2 (en) | Device for braking articles to be conveyed on a conveyor and its braking rubber tubes | |
US3854567A (en) | Device for conveying rod-shaped objects such as cigarettes | |
DE3760577D1 (en) | Method and device for turning continually arriving flat products | |
US5570977A (en) | Fluid conveyor for articles | |
JPH03112144A (en) | Conveyor for semiconductor device | |
KR960040542A (en) | Method and apparatus for interconnecting machining elements | |
JPH06191178A (en) | Cover feeder of bookbinding machine | |
JP2002087586A (en) | Article distribution method, and distribution device | |
JPH0543044A (en) | Article guide device for unmanned carrier | |
EP0869094A2 (en) | Transporting sheets | |
JP2983085B2 (en) | Conveyor blades for conveying tofu and the like, and conveyor systems for conveying tofu and the like using the same | |
US6013135A (en) | Method and apparatus for six-sided vacuum painting of parts | |
JPH028121A (en) | Wafer conveyor | |
JPH01278038A (en) | Wafer conveying device | |
GB2329891A (en) | Sheet diversion | |
JP6816903B1 (en) | Packaging equipment and packaging method | |
EP0329210B1 (en) | In-line device for positioning between a supply conveyor and a discharge conveyor | |
JP2576860Y2 (en) | Sorting device | |
JPS6489529A (en) | Device for manufacturing semiconductor |