JPH03111478U - - Google Patents

Info

Publication number
JPH03111478U
JPH03111478U JP1990020635U JP2063590U JPH03111478U JP H03111478 U JPH03111478 U JP H03111478U JP 1990020635 U JP1990020635 U JP 1990020635U JP 2063590 U JP2063590 U JP 2063590U JP H03111478 U JPH03111478 U JP H03111478U
Authority
JP
Japan
Prior art keywords
workpiece
illumination lamp
light
photodetector
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1990020635U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990020635U priority Critical patent/JPH03111478U/ja
Publication of JPH03111478U publication Critical patent/JPH03111478U/ja
Pending legal-status Critical Current

Links

JP1990020635U 1990-02-28 1990-02-28 Pending JPH03111478U (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990020635U JPH03111478U (no) 1990-02-28 1990-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990020635U JPH03111478U (no) 1990-02-28 1990-02-28

Publications (1)

Publication Number Publication Date
JPH03111478U true JPH03111478U (no) 1991-11-14

Family

ID=31523722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990020635U Pending JPH03111478U (no) 1990-02-28 1990-02-28

Country Status (1)

Country Link
JP (1) JPH03111478U (no)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017196629A (ja) * 2016-04-26 2017-11-02 株式会社Nishihara 保護ガラスの汚れ検出装置とそれを備えるレーザ加工機及び保護ガラスの汚れ検出方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017196629A (ja) * 2016-04-26 2017-11-02 株式会社Nishihara 保護ガラスの汚れ検出装置とそれを備えるレーザ加工機及び保護ガラスの汚れ検出方法

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