JPH03110861U - - Google Patents

Info

Publication number

JPH03110861U

JPH03110861U JP1923490U JP1923490U JPH03110861U JP H03110861 U JPH03110861 U JP H03110861U JP 1923490 U JP1923490 U JP 1923490U JP 1923490 U JP1923490 U JP 1923490U JP H03110861 U JPH03110861 U JP H03110861U

Authority

JP

Japan

Prior art keywords

semiconductor substrate

epitaxial layer

conductivity type

resistivity epitaxial

low resistivity

Prior art date

1990-02-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims description 5
• 230000001681 protective effect Effects 0.000 claims 1
• 238000009792 diffusion process Methods 0.000 description 3
• 229910004298 SiO 2 Inorganic materials 0.000 description 1