JPH03110833U - - Google Patents
Info
- Publication number
- JPH03110833U JPH03110833U JP2017790U JP2017790U JPH03110833U JP H03110833 U JPH03110833 U JP H03110833U JP 2017790 U JP2017790 U JP 2017790U JP 2017790 U JP2017790 U JP 2017790U JP H03110833 U JPH03110833 U JP H03110833U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- chamber
- light
- opening
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 3
Description
図面は、本考案に係る光照射型熱処理装置の実
施例を示し、第１図は一部切欠側面図、第２図は
要部の平面図、第３図は、反射部材の分解斜視図
、第４図は、反射部材の横断面図である。
１……開口、２……チヤンバー、３……前室、
４……光源、１２……蓋体、１３……基板、１４
……基板支持部材、１５……移動装置、１６……
反射部材。
The drawings show an embodiment of the light irradiation type heat treatment apparatus according to the present invention, in which FIG. 1 is a partially cutaway side view, FIG. 2 is a plan view of the main part, and FIG. 3 is an exploded perspective view of a reflective member. FIG. 4 is a cross-sectional view of the reflective member. 1...Opening, 2...Chamber, 3...Antechamber,
4...Light source, 12...Lid, 13...Substrate, 14
...Substrate support member, 15...Movement device, 16...
Reflective member.
Claims (1)
のチヤンバーと、筒状であつて、一端がチヤンバ
ーの開口に連通し、他端が蓋体と気密に接合離間
する前室と、基板を支持し、前室を通過してチヤ
ンバー内へ基板を挿入する基板支持部材と、チヤ
ンバーの周部に設置されチヤンバー内に挿入され
た基板を光照射加熱する光源とを備えた光照射型
熱処理装置において、 前記基板支持部材に、基板挿入状態での前記基
板と前記開口との間に位置させて、前記光源から
の光を前記基板側に反射する反射部材を付設した
ことを特徴とする光照射型熱処理装置。[Claims for Utility Model Registration] A light-transmissive chamber with an opening for inserting a board on its side, and a cylindrical shape, with one end communicating with the opening of the chamber and the other end hermetically joined to the lid. A front chamber that is spaced apart, a substrate support member that supports the substrate and inserts the substrate into the chamber through the front chamber, and a light source that is installed around the periphery of the chamber and that irradiates and heats the substrate inserted into the chamber. In the light irradiation type heat treatment apparatus, the substrate supporting member is provided with a reflecting member that is positioned between the substrate and the opening when the substrate is inserted, and reflects light from the light source toward the substrate. A light irradiation type heat treatment device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990020177U JP2519187Y2 (en) | 1990-02-27 | 1990-02-27 | Light irradiation type heat treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990020177U JP2519187Y2 (en) | 1990-02-27 | 1990-02-27 | Light irradiation type heat treatment equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03110833U true JPH03110833U (en) | 1991-11-13 |
| JP2519187Y2 JP2519187Y2 (en) | 1996-12-04 |
Family
ID=31523273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990020177U Expired - Lifetime JP2519187Y2 (en) | 1990-02-27 | 1990-02-27 | Light irradiation type heat treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2519187Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000150396A (en) * | 1998-11-16 | 2000-05-30 | Sakaguchi Dennetsu Kk | Thermal radiation reflector |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6173324A (en) * | 1984-09-17 | 1986-04-15 | Dainippon Screen Mfg Co Ltd | Heat treating device |
-
1990
- 1990-02-27 JP JP1990020177U patent/JP2519187Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6173324A (en) * | 1984-09-17 | 1986-04-15 | Dainippon Screen Mfg Co Ltd | Heat treating device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000150396A (en) * | 1998-11-16 | 2000-05-30 | Sakaguchi Dennetsu Kk | Thermal radiation reflector |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2519187Y2 (en) | 1996-12-04 |