JPH03110756U - - Google Patents
Info
- Publication number
- JPH03110756U JPH03110756U JP1976090U JP1976090U JPH03110756U JP H03110756 U JPH03110756 U JP H03110756U JP 1976090 U JP1976090 U JP 1976090U JP 1976090 U JP1976090 U JP 1976090U JP H03110756 U JPH03110756 U JP H03110756U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- electromotive force
- coil
- ion beam
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976090U JPH03110756U (zh) | 1990-02-27 | 1990-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976090U JPH03110756U (zh) | 1990-02-27 | 1990-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03110756U true JPH03110756U (zh) | 1991-11-13 |
Family
ID=31522864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976090U Pending JPH03110756U (zh) | 1990-02-27 | 1990-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03110756U (zh) |
-
1990
- 1990-02-27 JP JP1976090U patent/JPH03110756U/ja active Pending