JPH03110631U - - Google Patents

Info

Publication number

JPH03110631U

JPH03110631U JP1669290U JP1669290U JPH03110631U JP H03110631 U JPH03110631 U JP H03110631U JP 1669290 U JP1669290 U JP 1669290U JP 1669290 U JP1669290 U JP 1669290U JP H03110631 U JPH03110631 U JP H03110631U

Authority

JP

Japan

Prior art keywords

movable body

housing

objective lens

tip

axis direction

Prior art date

1990-02-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 3
• 230000003287 optical effect Effects 0.000 claims 4
• 238000013459 approach Methods 0.000 claims 2
• 230000002159 abnormal effect Effects 0.000 claims 1
• 230000005611 electricity Effects 0.000 claims 1
• 238000001179 sorption measurement Methods 0.000 description 1

Cited By (1)