JPH03110439U - - Google Patents

Info

Publication number
JPH03110439U
JPH03110439U JP1884590U JP1884590U JPH03110439U JP H03110439 U JPH03110439 U JP H03110439U JP 1884590 U JP1884590 U JP 1884590U JP 1884590 U JP1884590 U JP 1884590U JP H03110439 U JPH03110439 U JP H03110439U
Authority
JP
Japan
Prior art keywords
view
corner
plan
holder
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1884590U
Other languages
English (en)
Japanese (ja)
Other versions
JP2508841Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1884590U priority Critical patent/JP2508841Y2/ja
Publication of JPH03110439U publication Critical patent/JPH03110439U/ja
Application granted granted Critical
Publication of JP2508841Y2 publication Critical patent/JP2508841Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1884590U 1990-02-28 1990-02-28 フオトマスクブランクス用保持具 Expired - Lifetime JP2508841Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1884590U JP2508841Y2 (ja) 1990-02-28 1990-02-28 フオトマスクブランクス用保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1884590U JP2508841Y2 (ja) 1990-02-28 1990-02-28 フオトマスクブランクス用保持具

Publications (2)

Publication Number Publication Date
JPH03110439U true JPH03110439U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-11-13
JP2508841Y2 JP2508841Y2 (ja) 1996-08-28

Family

ID=31521988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1884590U Expired - Lifetime JP2508841Y2 (ja) 1990-02-28 1990-02-28 フオトマスクブランクス用保持具

Country Status (1)

Country Link
JP (1) JP2508841Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006126816A (ja) * 2004-09-29 2006-05-18 Hoya Corp マスクブランク用基板、マスクブランク、露光用マスク、半導体デバイスの製造方法、及びマスクブランク用基板の製造方法
GB2436759A (en) * 2005-07-22 2007-10-03 Sharp Sangyo Co Ltd Sounding tool for cheering
JP2009115957A (ja) * 2007-11-05 2009-05-28 Hoya Corp マスクブランク及び転写用マスクの製造方法
JP2011248373A (ja) * 2004-09-29 2011-12-08 Hoya Corp マスクブランク用基板、マスクブランク、露光用マスク、半導体デバイスの製造方法、及びマスクブランク用基板の製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006126816A (ja) * 2004-09-29 2006-05-18 Hoya Corp マスクブランク用基板、マスクブランク、露光用マスク、半導体デバイスの製造方法、及びマスクブランク用基板の製造方法
JP2011248373A (ja) * 2004-09-29 2011-12-08 Hoya Corp マスクブランク用基板、マスクブランク、露光用マスク、半導体デバイスの製造方法、及びマスクブランク用基板の製造方法
GB2436759A (en) * 2005-07-22 2007-10-03 Sharp Sangyo Co Ltd Sounding tool for cheering
US7607960B2 (en) 2005-07-22 2009-10-27 Sharp Sangyo Co., Ltd. Sounding tool for cheering
JP2009115957A (ja) * 2007-11-05 2009-05-28 Hoya Corp マスクブランク及び転写用マスクの製造方法

Also Published As

Publication number Publication date
JP2508841Y2 (ja) 1996-08-28

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term