JPH03109604U - - Google Patents

Info

Publication number
JPH03109604U
JPH03109604U JP1900990U JP1900990U JPH03109604U JP H03109604 U JPH03109604 U JP H03109604U JP 1900990 U JP1900990 U JP 1900990U JP 1900990 U JP1900990 U JP 1900990U JP H03109604 U JPH03109604 U JP H03109604U
Authority
JP
Japan
Prior art keywords
vacuum chamber
removal device
gas removal
swash plates
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1900990U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1900990U priority Critical patent/JPH03109604U/ja
Publication of JPH03109604U publication Critical patent/JPH03109604U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Degasification And Air Bubble Elimination (AREA)
JP1900990U 1990-02-27 1990-02-27 Pending JPH03109604U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1900990U JPH03109604U (enrdf_load_stackoverflow) 1990-02-27 1990-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1900990U JPH03109604U (enrdf_load_stackoverflow) 1990-02-27 1990-02-27

Publications (1)

Publication Number Publication Date
JPH03109604U true JPH03109604U (enrdf_load_stackoverflow) 1991-11-11

Family

ID=31522145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1900990U Pending JPH03109604U (enrdf_load_stackoverflow) 1990-02-27 1990-02-27

Country Status (1)

Country Link
JP (1) JPH03109604U (enrdf_load_stackoverflow)

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