JPH03109328U - - Google Patents

Info

Publication number
JPH03109328U
JPH03109328U JP1697690U JP1697690U JPH03109328U JP H03109328 U JPH03109328 U JP H03109328U JP 1697690 U JP1697690 U JP 1697690U JP 1697690 U JP1697690 U JP 1697690U JP H03109328 U JPH03109328 U JP H03109328U
Authority
JP
Japan
Prior art keywords
chemical liquid
cup
processing device
liquid processing
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1697690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1697690U priority Critical patent/JPH03109328U/ja
Publication of JPH03109328U publication Critical patent/JPH03109328U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1697690U 1990-02-21 1990-02-21 Pending JPH03109328U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1697690U JPH03109328U (US07923587-20110412-C00022.png) 1990-02-21 1990-02-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1697690U JPH03109328U (US07923587-20110412-C00022.png) 1990-02-21 1990-02-21

Publications (1)

Publication Number Publication Date
JPH03109328U true JPH03109328U (US07923587-20110412-C00022.png) 1991-11-11

Family

ID=31520212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1697690U Pending JPH03109328U (US07923587-20110412-C00022.png) 1990-02-21 1990-02-21

Country Status (1)

Country Link
JP (1) JPH03109328U (US07923587-20110412-C00022.png)

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