JPH03109258U - - Google Patents
Info
- Publication number
- JPH03109258U JPH03109258U JP1722790U JP1722790U JPH03109258U JP H03109258 U JPH03109258 U JP H03109258U JP 1722790 U JP1722790 U JP 1722790U JP 1722790 U JP1722790 U JP 1722790U JP H03109258 U JPH03109258 U JP H03109258U
- Authority
- JP
- Japan
- Prior art keywords
- arc chamber
- filament
- cathode filament
- ion source
- mounting bracket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 2
- 238000000605 extraction Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1722790U JPH03109258U (en, 2012) | 1990-02-22 | 1990-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1722790U JPH03109258U (en, 2012) | 1990-02-22 | 1990-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03109258U true JPH03109258U (en, 2012) | 1991-11-11 |
Family
ID=31520456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1722790U Pending JPH03109258U (en, 2012) | 1990-02-22 | 1990-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03109258U (en, 2012) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01267944A (ja) * | 1988-04-19 | 1989-10-25 | Agency Of Ind Science & Technol | イオン源 |
-
1990
- 1990-02-22 JP JP1722790U patent/JPH03109258U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01267944A (ja) * | 1988-04-19 | 1989-10-25 | Agency Of Ind Science & Technol | イオン源 |