JPH03109148U - - Google Patents
Info
- Publication number
- JPH03109148U JPH03109148U JP1768190U JP1768190U JPH03109148U JP H03109148 U JPH03109148 U JP H03109148U JP 1768190 U JP1768190 U JP 1768190U JP 1768190 U JP1768190 U JP 1768190U JP H03109148 U JPH03109148 U JP H03109148U
- Authority
- JP
- Japan
- Prior art keywords
- center
- circumference
- pressurizing mechanism
- annular support
- flat material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 4
- 238000005452 bending Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1768190U JPH03109148U (fr) | 1990-02-23 | 1990-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1768190U JPH03109148U (fr) | 1990-02-23 | 1990-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03109148U true JPH03109148U (fr) | 1991-11-08 |
Family
ID=31520867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1768190U Pending JPH03109148U (fr) | 1990-02-23 | 1990-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03109148U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011027430A (ja) * | 2009-07-21 | 2011-02-10 | Sumco Corp | シリコンウェーハの機械的強度測定装置および測定方法 |
-
1990
- 1990-02-23 JP JP1768190U patent/JPH03109148U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011027430A (ja) * | 2009-07-21 | 2011-02-10 | Sumco Corp | シリコンウェーハの機械的強度測定装置および測定方法 |