JPH03107695A - Tube joint - Google Patents

Abstract

PURPOSE:To keep a closing condition of a joint opening part for a long time by providing joints having a corrosion resistant joint main body and a corrosion resistant valve body, also providing a connection mechanism, arranging a corrosion resistant movable ring in which first and second magnets are embedded, and also arranging a corrosion resistant fixed which energizes the valve body in a closing direction through the magnets. CONSTITUTION:In a tube joint which has a pair of joints, provided with a corrosion-resistant joint main body 1 and a corrosion-resistant valve body 2, and a connecting mechanism 3 disconnectably connecting the joint, a corrosion resistant joint main body 1 has a valve chamber 11 and a fluid passage 12 connected thereto. The corrosion resistant valve body 2 is movably installed in the valve chamber 11. A through-hole 61 is formed on the valve body 2, while a corrosion resistant movable ring 6 in which a first magnet 7 is embedded is provided therearound. A through-hole 81 is formed on the corrosion resistant movable ring 6, while a second magnet 9 is embedded therearound. A corrosion resistant fixed ring 8 which energizes the valve body 2 in the closing direction through the magnets 7, 9 is provided. It is therefore possible to surely keep the closing condition of the joint opening part.

Description

Detailed Description of the Invention (Industrial Application Field) The present invention relates to a pipe joint, and more particularly, to a pipe joint such as a hose for flowing a highly corrosive liquid mainly used in wet etching of semiconductors, or a pipe joint for storing the liquid. This invention relates to a pipe joint that connects a container and an etching device.

(Prior Art) Generally, the liquid used in wet etching of semiconductors is one that is harmful to the human body and highly corrosive to metals, such as hydrofluoric acid. Therefore, using a transportable container storing such an aqueous solution,
One side of the joint is provided on this container, and the other side of the joint is also provided on the side of the etching device, so that the tube of the container and the tube on the side of the etching device can be easily and reliably connected through these joints. It is convenient to do this.

By the way, conventional pipe joints are, for example, disclosed in U.S. Pat.
As described in Publication No. 292 and shown in Fig. 2, a joint has a valve chamber (C) with a joint opening (B) and a fluid passage (D) continuous with this valve chamber (C). The opening (B) is freely movable inside the main body (E) and the valve chamber (C).
A pair of joints (
H) (H) and a connecting bolt (1) that removably connects these joints (14) (H), and both the joints (H) () according to the connecting bolt (1). (), each valve body (F) is moved in the closing direction against each coil spring (G), and each joint (H) (H) is connected.
The fluid passage (D) is communicated with each joint opening (B).

(Problem to be Solved by the Invention) However, in this conventional pipe joint, the coil spring (G) provided to maintain the closed state of the joint opening (B) by the valve body (F) is Located in the passageway (D),
Since it comes into direct contact with the fluid flowing through the fluid passage (D), this pipe joint can be used as a pipe joint between the etching device and a storage container for a highly corrosive liquid used in wet etching. When the coil spring CG is used, the fluid corrodes the coil spring CG, making it impossible to reliably bias the valve body (F).
), it becomes impossible to reliably maintain the closed state of the joint opening ffi (B) over a long period of time, and there is a problem that fluid leaks in a short period of time. Since the body (F) expands and contracts each time the body (F) opens and closes, the coil spring (G) is easily fatigued, and the valve body (F) is easily fatigued.
There was a problem in that the biasing force of F) was reduced, making it easier to leak. Furthermore, due to the corrosion of the coil spring (G), metal ions are dissolved in the circulating fluid, resulting in the problem of contaminating the fluid.

By the way, in order to prevent the contamination of this fluid by metal ions, it is possible to, for example, coat the coil spring (G) with a resin so that the coil spring does not come into direct contact with the fluid. Even if the coil spring (G) is coated, the valve body (
Since F) expands and contracts with each opening and closing operation, the coating layer is easily fatigued, causing cracks in the coating layer,
The coating layer tends to come off easily, and the circulating fluid is still contaminated. Further, as the coil spring (G) expands and contracts, the coating layer is likely to peel off, especially at both ends, and there is also the problem that the peeled off particles may enter the fluid.

The present invention was invented in view of the above points, and the purpose is to
The valve body can be biased in the closing direction without using a coil spring, and the valve body can maintain the closed state of the joint opening for a long period of time. The object of the present invention is to prevent corrosion of the biasing means and contamination of the circulating fluid by the biasing means.

(Means for Solving the Problems) Accordingly, the present invention provides a valve chamber (11) having a joint opening (11a) and a fluid passage (12) continuous with the valve chamber (11).
) and the valve chamber (11).
) A pair of joints (A) (A) with a corrosion-resistant valve body (2) movably installed inside the joints (A) (A), and these joints (A) (A).
A connection mechanism (3) that removably connects the pipe joints, wherein the fluid is connected to the center of the valve body (2) in at least one of the joints (A). A communication passage (23) is provided that communicates the passage (12) with the joint opening (11a), and a through hole (61) is provided in the center on the back side of the valve body (2). 61)
A corrosion-resistant movable ring (6) with a first magnet (7) embedded around it.
), while a through hole (81) is provided in the center on one side of the movable ring (6), and a second magnet ( 9) is embedded therein, and a corrosion-resistant fixing ring (8) is provided which urges the valve body (2) in the closing direction by the attractive force or repulsive force of each of the magnets (7) and (9).

Also, a first fixed ring (8a) in which a second magnet (9) whose polarity is opposite to the magnetic pole of the first magnet (7) is embedded on the closing direction side of the valve body (2) with respect to the movable ring (6). and a second fixed ring in which a second magnet (9) having the same polarity opposite to the magnetic pole of the first magnet (7) is embedded on the closing direction side of the valve body (2) with respect to the movable ring (6). (8b) is preferably provided.

(Function) The valve body (2) in at least one of the pair of joints (A) (A) has a first magnet (7) and a second magnet (9).
), the joint opening (11a) can be reliably kept closed by the valve body (2), and
The magnets (7) and (9) are not subject to fatigue due to expansion and contraction unlike coil springs, and are embedded in the corrosion-resistant movable ring (6) and fixed ring (8) to prevent corrosion. Therefore, it is possible to reliably maintain the closed state of the joint opening by the valve body (2) over a long period of time, and it is also possible to prevent corrosion of the magnets (7) and (9) and contamination of the circulating fluid.

In addition, a movable ring (6) and a fixed ring (8) with a through hole in the center are used, and these rings are placed on the back side of the valve body (2) and connected to the center of the valve body (2). Passage (2
3) is provided to allow the fluid to flow through the center of the valve body (2), thereby making it possible to reduce the fluid flow resistance.

In addition, the attractive force between the first magnet (7) and the second magnet (9), which has a different polarity opposite to the magnetic pole of the first magnet (7), and Since the valve body (2) can be biased in the closing direction by the repulsive force of the second magnet (9) facing the valve body,
This allows the biasing force of the valve body (2) to be increased.

(Example) As shown in Fig. 1, the basic structure of the pipe joint of the present invention is as follows: a valve chamber (11) having a joint opening (11a);
) and a corrosion-resistant joint body (1) having a fluid passage (12) continuous with the valve chamber (11), and a corrosion-resistant valve body (2) which is movably installed in the valve chamber (11) and opens and closes the opening (11a). A pair of joints (A) (A) and these joints (A) (A
), and the joint body (1) is formed into a cylindrical shape, with the valve chamber (11) provided at one end thereof, and the valve chamber (11) provided at the other end thereof. The fluid passage (
12) is screwed onto the bushing (1a). or,
The joint opening (11a) of the valve chamber (11) is formed to have a small diameter, and the valve body (2) is placed inside this opening (11a).
A conical valve seat surface (13) is provided which abuts the fluid passageway (12), and an internal thread (14) is provided at the opening of the fluid passageway (12), into which a pipe (not shown) is connected. I try to screw it on.

In addition, a fitting part (15) is provided on the outer surface of one end of the left side joint main body (1) in FIG. (16) is provided,
Further, the fitting portion (15) is provided at one end of the right side joint body (1).
A fitting cylinder (17) for receiving the fitting part (17) is provided protrudingly to receive the fitting part (1
5) Seal material (5) between the outer surface and the inner surface of the fitting tube (17)
It is sealed with.

Further, the valve body (2) has a substantially cylindrical shape, and a valve portion (21) that abuts the valve seat surface (13) is formed in a conical shape,
A control protrusion (22) is provided at the tip of this valve portion (21).

The joint body (1) and the valve body (2) are mainly made of a fluororesin such as tetrafluoroethylene resin or tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer resin, but other materials may be used. , may be formed from synthetic resin such as polyethylene resin, or may be formed from a corrosion-resistant material other than synthetic resin.

Further, the connection mechanism (3) includes a ball (31) held in the fitting tube (17) so as to be freely advanced and retracted, the retaining groove (16) that engages with the ball (31), and the ball ( a blocking portion (31) that engages when the ball advances to prevent the ball from retreating;
2a) and a retraction part (3) that allows the ball (31) to retreat.
2b) and an operating ring (32). The operation ring (32) also includes a pressing spring (33).
is biased in one direction.

In the embodiment shown in FIG. 1, the fluid passage (12) is provided in the center of each valve body (2) of the two joints (A), excluding the valve part (21). A communicating path (23) communicating with the joint opening (11a) is provided, and
A through hole (61) is provided in the center on the back side of the valve body (2), and a corrosion-resistant movable ring (6) in which a first magnet (7) is embedded is provided around this through hole (61). A through hole (81) is provided in the center on both sides of the movable ring (6),
A second magnet (9) facing the first magnet (7) is embedded around this through hole (81), and each of these magnets (7) (9) is
) is provided with a corrosion-resistant fixing ring (8) that urges the valve body (2) in the closing direction by the suction force and repulsion force of the valve body (2).

More specifically, a large diameter storage chamber (1) is provided between the valve chamber (11) and the fluid passageway (12) in each joint body (1).
8), and the accommodation chamber (18) has a through hole (
The valve body (
The movable ring (6) interlocked with the movement of the movable ring (6) is provided to be freely movable, and the valve body (
2), the magnetic pole (S pole or N pole) of the first magnet (7) is placed on the closing direction side of the first magnet (7).
A first fixed ring (8a) in which a second magnet (9) is embedded, with a different pole (S pole in the drawing) facing the opposite pole (N pole in the drawing)
is provided, and the valve body (2) is biased in the closing direction by the attractive force of the magnets (7) and (9) embedded in the first fixed ring (8a) and the movable ring (6), while the movable ring (
The first magnet (
A second fixing ring (8b) is provided in which a second magnet (9) with the same pole (S pole in the drawing) facing the magnetic pole (S pole or N pole, S pole in the drawing) of 7) is embedded. Each magnet (7) embedded in the second fixed ring (8b) and movable ring (6)
)(9) The valve body (2) is urged in the closing direction by the repulsive force of (9). In addition, each of the fixing rings (8a) (
8b) is installed inside the housing chamber (18) as shown in FIG. It is clamped by screwing to 1).

Further, the first and second magnets (7) and (9) are formed in a ring shape, and each movable ring (6) and each fixed ring (
8). in particular,
Although it may be embedded by insert molding, preferably, each movable ring (6) and each fixed ring (8) are provided with a recessed portion, and the first and second magnets (7) are inserted into this recessed portion.
) (9) and by welding and attaching a separately formed ring-shaped cover Cf32) (82) to the recessed portion, the magnets (7) and (9) are attached in an embedded manner.

Further, a retaining portion (63) that engages with one end surface of the retainer (10) is provided on one side of the center portion of the movable ring (6) so that the movable ring (6) interlocks with each other. Further, the other end of the retainer (10) is brought into contact with the back surface of the valve body (2).

Each of the rings (6) and (8) is mainly formed of a fluororesin such as a tetrafluoroethylene resin or a tetrafluoroethylene-perfluoroalkyl vinyl ether co-ffi resin, but in addition, a polyethylene resin may be used. It may be formed of synthetic resin such as, or may be formed of a corrosion-resistant material other than synthetic resin.

In addition, in FIG. 1, (20) is an O-ring held in each of the valve parts (21).

Therefore, when two joints (A) (A) are connected as shown in Fig. 1, the control protrusions (22) on these joints
(22) butt each other, and the joint opening (11a) is open.

Two joints connected like this (A) (A, )
When disconnecting the connection, press the operating ring (32) of the connection mechanism (3).
) is moved against the pressing spring (33), and this movement of the operating ring (32) causes the blocking part (32
a) is removed from the ball (31), and the retracted portion (32b) comes to a position facing the ball (31). In this state, by pulling both or one of the joints (A) (A) in the direction of separation, the ball (31) is disengaged from the retaining groove (16), and each joint (A) ( A) will leave. and,
This separation of each joint (A) (A) causes each control protrusion (2
2) is eliminated, the movable ring (6) and the first
First and second magnets (7) embedded in the fixed ring (8a)
(9) and the repulsive force of the first and second magnets (7) and (9) embedded in the movable ring (6) and second fixed ring (8b), each valve body (2) closes. direction, the valve part (21) abuts against the valve seat (13), and each joint opening (1
1a) is closed.

Moreover, each of the valve bodies (2) can be reliably biased in the closing direction by the attractive force and repulsive force of the first magnet (7) and the second magnet (9), and the joint opening (11a) The closed state can be maintained reliably.

Note that the operation ring (32) is returned to its original position by the force of the pressing spring (33) after the operation is released.

When connecting the joints (A) that have been disconnected as described above, operate the operating ring (32) against the pressure spring (33) to ensure that the left side joint (A) in Figure 1 is fitted. Joint (15)
are fitted into the fitting cylinder (17) of the right joint (A), and by this fitting, the ball (31) engages with the engagement groove (16), and each joint (A) (A) can be connected. In this case, each of the control protrusions (22) abuts against each other, and each of the valve bodies (2) is connected to the first magnet (7) and the second magnet (9).
) and move in the closing direction against the attraction and repulsion forces, and each joint opening (11a) opens. And one fitting (
The fluid passage (12) in A) and the fluid passage (12) in the other joint (A) are connected to the through hole (81) of the second fixed ring (8b) and the through hole (61) of the movable ring (6).
and the through hole (10a) of the retina (10) and the communication path (2).
3) and each valve chamber (11) through the joint opening (11a), allowing fluid to flow therethrough.

The magnets (7) and (9) that bias each valve body (2) in the closing direction are embedded in the corrosion-resistant movable ring (6) and the corrosion-resistant fixed ring (8) and are in contact with the circulating fluid. Therefore, it is possible to prevent each of the magnets (7) and (9) from being corroded by the strongly corrosive fluid, and also to prevent the elution of the magnets (7) and (9) by the strongly corrosive fluid, thereby preventing contamination of the fluid. It can be prevented.

In addition, the fluid passage (12) and the joint opening (11a) are connected by a fixed ring (8), a movable ring (6), and a retainer (10).
Each through hole (81) (61) (10a) provided in the center of
) and the communication passage (23) provided in the center of the valve body (2), so that the fluid flow resistance can be reduced.

In addition, in the embodiment described above, a pair of joints (A) (A)
A movable ring (6) in which a first magnet (7) was embedded and a fixed ring (8) in which a second magnet (9) was embedded were provided.
These rings (6) and (8) may be provided on only one of the joints. In this case, each ring (E3) (8)
For a joint not provided with a valve body, a coil spring made of a metal spring coated with resin may be used as the biasing means for biasing the valve body (2) in the closing direction.

Further, in the above embodiment, the first fixed ring (8a) is provided on the closing direction side of the valve body (2) with respect to the movable ring (6), and the first fixed ring (8a) is provided on the closing direction side of the valve body (2) with respect to the movable ring (6). A second fixing ring (8b) is provided on the first and second magnets (7).
Although the valve body (2) is configured to be biased in the closing direction by the suction force and repulsive force in (9), in addition, either one of the first and second fixing rings (8a) and (8b) may be Alternatively, the valve body (2) may be biased in the closing direction by the attractive force or repulsive force of the first and second magnets (7) and (9).

Further, in the above embodiment, the movable ring (6) is provided separately from the valve body (2), and the fixed ring (8) is provided separately from the joint body (1). ) may be integral with the valve body (2) or the retainer (10), and the fixing ring (8) may be integral with the joint body (1). Further, the interlocking ring (10) may be integrated with the valve body (2).

Further, although a bushing (1a) is screwed onto the joint body (1), this bushing (1a) is not necessarily required.

(Effects of the Invention) As described above, according to the present invention, the corrosion-resistant movable ring (6) in which the first magnet (7) is embedded and the corrosion-resistant fixed ring (8) in which the second magnet (9) is embedded are used. Each of the magnets (7)
Since the valve body (2) is biased in the closing direction by the suction force or repulsive force of (9), the joint opening (11a) can be reliably closed by the valve body (2) for a long period of time. It is possible to prevent the biasing means for biasing the valve body (2), that is, the magnets (7) and (9), from being corroded by the strongly corrosive fluid while maintaining the This can prevent fluid contamination.

Furthermore, a communication passage (13) is provided in the center of the valve body (2) for communicating the fluid passage (12) with the joint opening (lta), and each of the rings (6) is provided with a through hole in the center. (
8), the resistance of the flowing fluid can be reduced.

Further, a first fixed ring (8a) is provided on the closing direction side of the valve body (2) with respect to the movable ring (6), and the movable ring (6)
A second fixing ring (8b
), and the first and second magnets (
7) Since the valve body (2) is biased in the closing direction by the suction force and repulsion force in (9), the movement stroke of the valve body (2) can be increased while the valve body (2) is The biasing force can be increased, and the closed state of the joint opening by the valve body (2) can be maintained reliably.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view showing an embodiment of the joint of the present invention; FIG. 2 is an explanatory view of a conventional example. (1)...Coupling body (11)...Valve chamber (11a)...Coupling opening (12)...Fluid passage (2)...Valve body (23)... ... Communication path (3) ... Connection mechanism (6) ... Movable ring (61) ... Through hole (7) ... First magnet (8) ... Fixing ring (8a)...First fixing ring (8b)...Second fixing ring (81)...Through hole (9)...Second magnet (A)... fitting

Claims (1)

[Claims] 1) A corrosion-resistant joint body (1) having a valve chamber (11) having a joint opening (11a) and a fluid passageway (12) continuous with the valve chamber (11), and the valve. A pair of joints (A) (
A) and a connection mechanism (3) that removably connects these joints (A) and (A), the pipe joint comprising:
A) In (A), a communication passageway (23) is provided in the center of the valve body (2) in at least one of the joints to communicate the fluid passageway (12) with the joint opening (11a); There is a through hole (6) in the center on the back side of the valve body (2).
1), and a first magnet (7) is provided around this through hole (61).
is provided with a corrosion-resistant movable ring (6) embedded therein, and a through hole (81) is provided in the center on one side of this movable ring (8), and the first magnet (7) is provided around this through hole (81). )
A second magnet (9) facing the is buried, and each of these magnets (7
) A pipe joint characterized in that it is provided with a corrosion-resistant fixing ring (8) that urges the valve body (2) in the closing direction by the suction force or repulsion force of (9). 2) A first fixed ring (8a) in which a second magnet (9) with a different polarity facing the magnetic pole of the first magnet (7) is embedded on the closing direction side of the valve body (2) with respect to the movable ring (6). and a second fixed ring in which a second magnet (9) having the same polarity opposite to the magnetic pole of the first magnet (7) is embedded on the opening direction side of the valve body (2) with respect to the movable ring (6). The pipe joint according to claim 1, further comprising (8b).