JPH03106735U - - Google Patents

Info

Publication number
JPH03106735U
JPH03106735U JP1664390U JP1664390U JPH03106735U JP H03106735 U JPH03106735 U JP H03106735U JP 1664390 U JP1664390 U JP 1664390U JP 1664390 U JP1664390 U JP 1664390U JP H03106735 U JPH03106735 U JP H03106735U
Authority
JP
Japan
Prior art keywords
gas piping
vacuum
return
utility
inert gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1664390U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1664390U priority Critical patent/JPH03106735U/ja
Publication of JPH03106735U publication Critical patent/JPH03106735U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1664390U 1990-02-20 1990-02-20 Pending JPH03106735U (US20030220297A1-20031127-C00033.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1664390U JPH03106735U (US20030220297A1-20031127-C00033.png) 1990-02-20 1990-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1664390U JPH03106735U (US20030220297A1-20031127-C00033.png) 1990-02-20 1990-02-20

Publications (1)

Publication Number Publication Date
JPH03106735U true JPH03106735U (US20030220297A1-20031127-C00033.png) 1991-11-05

Family

ID=31519901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1664390U Pending JPH03106735U (US20030220297A1-20031127-C00033.png) 1990-02-20 1990-02-20

Country Status (1)

Country Link
JP (1) JPH03106735U (US20030220297A1-20031127-C00033.png)

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