JPH03106358U - - Google Patents
Info
- Publication number
- JPH03106358U JPH03106358U JP1665190U JP1665190U JPH03106358U JP H03106358 U JPH03106358 U JP H03106358U JP 1665190 U JP1665190 U JP 1665190U JP 1665190 U JP1665190 U JP 1665190U JP H03106358 U JPH03106358 U JP H03106358U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- rotating disk
- growth apparatus
- horizontal rotary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1665190U JPH03106358U (fi) | 1990-02-21 | 1990-02-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1665190U JPH03106358U (fi) | 1990-02-21 | 1990-02-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03106358U true JPH03106358U (fi) | 1991-11-01 |
Family
ID=31519909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1665190U Pending JPH03106358U (fi) | 1990-02-21 | 1990-02-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03106358U (fi) |
-
1990
- 1990-02-21 JP JP1665190U patent/JPH03106358U/ja active Pending