JPH03104730U - - Google Patents
Info
- Publication number
- JPH03104730U JPH03104730U JP1198490U JP1198490U JPH03104730U JP H03104730 U JPH03104730 U JP H03104730U JP 1198490 U JP1198490 U JP 1198490U JP 1198490 U JP1198490 U JP 1198490U JP H03104730 U JPH03104730 U JP H03104730U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- cylinder
- bubbling
- thin tube
- gas inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 7
- 230000005587 bubbling Effects 0.000 claims description 6
- 230000002265 prevention Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 3
- 239000012159 carrier gas Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1198490U JPH03104730U (ko) | 1990-02-13 | 1990-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1198490U JPH03104730U (ko) | 1990-02-13 | 1990-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03104730U true JPH03104730U (ko) | 1991-10-30 |
Family
ID=31515485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1198490U Pending JPH03104730U (ko) | 1990-02-13 | 1990-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03104730U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008112994A (ja) * | 2006-10-19 | 2008-05-15 | Air Products & Chemicals Inc | 入口プレナムを持つ固体源容器 |
-
1990
- 1990-02-13 JP JP1198490U patent/JPH03104730U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008112994A (ja) * | 2006-10-19 | 2008-05-15 | Air Products & Chemicals Inc | 入口プレナムを持つ固体源容器 |