JPH0310455U - - Google Patents

Info

Publication number

JPH0310455U

JPH0310455U JP8790089U JP8790089U JPH0310455U JP H0310455 U JPH0310455 U JP H0310455U JP 8790089 U JP8790089 U JP 8790089U JP 8790089 U JP8790089 U JP 8790089U JP H0310455 U JPH0310455 U JP H0310455U

Authority

JP

Japan

Prior art keywords

deceleration

arc

current value

ion source

extraction

Prior art date

1989-06-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 238000000605 extraction Methods 0.000 claims description 8
• 150000002500 ions Chemical class 0.000 claims 5
• 238000010891 electric arc Methods 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 3
• 238000007796 conventional method Methods 0.000 description 1
• 238000010884 ion-beam technique Methods 0.000 description 1

Cited By (1)