JPH03103531U - - Google Patents

Info

Publication number
JPH03103531U
JPH03103531U JP1189290U JP1189290U JPH03103531U JP H03103531 U JPH03103531 U JP H03103531U JP 1189290 U JP1189290 U JP 1189290U JP 1189290 U JP1189290 U JP 1189290U JP H03103531 U JPH03103531 U JP H03103531U
Authority
JP
Japan
Prior art keywords
spacer
contact portion
conductive pattern
hole
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1189290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1189290U priority Critical patent/JPH03103531U/ja
Publication of JPH03103531U publication Critical patent/JPH03103531U/ja
Pending legal-status Critical Current

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JP1189290U 1990-02-13 1990-02-13 Pending JPH03103531U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1189290U JPH03103531U (fr) 1990-02-13 1990-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1189290U JPH03103531U (fr) 1990-02-13 1990-02-13

Publications (1)

Publication Number Publication Date
JPH03103531U true JPH03103531U (fr) 1991-10-28

Family

ID=31515399

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1189290U Pending JPH03103531U (fr) 1990-02-13 1990-02-13

Country Status (1)

Country Link
JP (1) JPH03103531U (fr)

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