JPH03103251U - - Google Patents

Info

Publication number
JPH03103251U
JPH03103251U JP1243090U JP1243090U JPH03103251U JP H03103251 U JPH03103251 U JP H03103251U JP 1243090 U JP1243090 U JP 1243090U JP 1243090 U JP1243090 U JP 1243090U JP H03103251 U JPH03103251 U JP H03103251U
Authority
JP
Japan
Prior art keywords
gas
sample chamber
reaction vessel
reaction
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1243090U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1243090U priority Critical patent/JPH03103251U/ja
Publication of JPH03103251U publication Critical patent/JPH03103251U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Glanulating (AREA)
  • Powder Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
JP1243090U 1990-02-09 1990-02-09 Pending JPH03103251U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1243090U JPH03103251U (enrdf_load_stackoverflow) 1990-02-09 1990-02-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1243090U JPH03103251U (enrdf_load_stackoverflow) 1990-02-09 1990-02-09

Publications (1)

Publication Number Publication Date
JPH03103251U true JPH03103251U (enrdf_load_stackoverflow) 1991-10-28

Family

ID=31515908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1243090U Pending JPH03103251U (enrdf_load_stackoverflow) 1990-02-09 1990-02-09

Country Status (1)

Country Link
JP (1) JPH03103251U (enrdf_load_stackoverflow)

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