JPH0310139U - - Google Patents
Info
- Publication number
- JPH0310139U JPH0310139U JP6960189U JP6960189U JPH0310139U JP H0310139 U JPH0310139 U JP H0310139U JP 6960189 U JP6960189 U JP 6960189U JP 6960189 U JP6960189 U JP 6960189U JP H0310139 U JPH0310139 U JP H0310139U
- Authority
- JP
- Japan
- Prior art keywords
- room
- side door
- concentration
- detector
- private
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Cleaning In General (AREA)
- Ventilation (AREA)
Description
第１図はこの考案の一実施例によるエアーシヤ
ワー室を示す図、第２図は、この考案の一実施例
によるエアーシヤワー室の機能を示すブロツク図
、第３図は、従来のエアーシヤワー室の機能を示
すブロツク図である。
図において、１……検知器、２……タイマー、
３……クリーン装置、４……ダストカウンタ、５
……前室側扉、６……クリーンルーム側扉である
。第１図の図中の矢印は空気の流れを示す。なお
、図中同一符号は同一、又は相当部分を示す。
Fig. 1 is a diagram showing an air shower room according to an embodiment of this invention, Fig. 2 is a block diagram showing the functions of an air shower room according to an embodiment of this invention, and Fig. 3 is a diagram showing a conventional air shower room. FIG. In the figure, 1...detector, 2...timer,
3...Clean device, 4...Dust counter, 5
...front room side door, 6...clean room side door. The arrows in the diagram of FIG. 1 indicate air flow. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
個室と、この個室に取り付けられた上記区域側扉
及び上記前室側扉と、この前室側扉の開閉を検知
する検知器と、この検知器からの信号により加圧
された清浄な空気を上記個室内に所定の時間噴射
し、循環させるように作用する装置からなるエア
ーシヤワー室において、上記装置の所定の時間作
動後、エアーシヤワー室内の塵埃の濃度を測定し
、濃度がある基準以下であれば上記装置の動作を
停止させ、また、濃度がある基準を越えていれば
、再度所定の時間上記装置の動作を継続させるよ
うに作用する塵埃測定器を備えたことを特徴とす
るエアーシヤワー室。 A private room provided in the front room of the area where a clean environment is maintained, the area side door and the front room side door attached to this private room, a detector that detects the opening and closing of the front room side door, and this In an air shower room consisting of a device that injects and circulates pressurized clean air into the private room for a predetermined time based on a signal from a detector, after the device has been operated for a predetermined time, measures the concentration of dust, and if the concentration is below a certain standard, the operation of the device is stopped; if the concentration exceeds a certain standard, the device continues to operate for a predetermined period of time. An air shower room characterized by being equipped with a dust measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6960189U JPH0310139U (en) | 1989-06-14 | 1989-06-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6960189U JPH0310139U (en) | 1989-06-14 | 1989-06-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0310139U true JPH0310139U (en) | 1991-01-30 |
Family
ID=31605050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6960189U Pending JPH0310139U (en) | 1989-06-14 | 1989-06-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0310139U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013133124A1 (en) * | 2012-03-06 | 2013-09-12 | 株式会社ダイフク | Cleaning apparatus |
-
1989
- 1989-06-14 JP JP6960189U patent/JPH0310139U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013133124A1 (en) * | 2012-03-06 | 2013-09-12 | 株式会社ダイフク | Cleaning apparatus |
| JP2013184762A (en) * | 2012-03-06 | 2013-09-19 | Daifuku Co Ltd | Cleaning device of overhead carrier |
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