JPH03100557A - Photosensitive body applicator - Google Patents

Abstract

PURPOSE:To form a uniform photosensitive film on the outside peripheral surface of a cylindrical base body by holding a cylindrical base body by a holding part of a push-up device and a draw-up device from its upper and lower parts and allowing the push-up device and the draw-up device to be raised at the same speed. CONSTITUTION:The device is provided with a push-up device 6 for holding a cylindrical base body 3 in a ring-like applying liquid container 1 from its lower part and pushing it up, and also, a draw-up device 7 for holding it from the upper part of the base body 3 and drawing it up by ascending at the same speed as the push-up device 6. Accordingly, it does not occur that oscillation and vibration of the cylindrical base body 3 are generated due to an unbalance of a blade 11 of an intrusion port of the applying liquid container 1, strength and weakness of a frictional resistance, a flaw, etc. In such a way, a uniform photosensitive film can be formed.

Description

DETAILED DESCRIPTION OF THE INVENTION fa) Industrial Application Field This invention relates to a photoreceptor coating device for applying a photoresist film to a cylindrical substrate of a photoreceptor.

(b) Prior art Recently, a cylindrical base of a photoreceptor is passed through a photosensitive liquid,
A photoreceptor coating device has been developed that forms a photoresist film on the outer peripheral surface of the cylindrical substrate. This device uses less photosensitive liquid (high processing efficiency).

FIG. 4 shows a schematic structure of the main parts of the above-mentioned photoreceptor coating device and a cylindrical base of the photoreceptor.

A ring-shaped coating liquid container 1 is provided substantially horizontally, and a photosensitive liquid 2 is contained therein. The cylindrical base 3 of the photoreceptor is fitted with spacers 5a and 5b at its upper and lower ends, and is moved upwardly from below while slidingly contacting an elastic blade 11 provided at the entrance in the center of the ring-shaped coating liquid container 1. It passes by being pushed up from the spacer 5b by the pushing up device 6. At this time, the cylindrical substrate 3 comes into direct contact with the photosensitive liquid 2 in the ring-shaped coating liquid container 1, so that a photosensitive film 21 is formed.

After the coating is completed, the spacer 5a and the cylindrical substrate 3 are removed from the spacer 5b, the cylindrical substrate 3 is sent to a drying process, and the spacer 5a is sent to a cleaning process. The cylindrical substrate to be coated next is set under the spacer 5b.

As described above, this photoreceptor coating device uses a small amount of photoreceptor and is very efficient because it continuously coats the cylindrical substrate vertically in the axial direction.

(C) Problems to be Solved by the Invention However, the above-mentioned device has the following problems.

A ring-shaped blade is also attached to the inlet of the ring-shaped coating liquid container, and the blade slides against the cylindrical substrate passing through it to prevent the photosensitive liquid from leaking.
There is. Therefore, the blade is always in contact with the cylindrical substrate or spacer. In particular, since the surface of the cylindrical substrate has been cleaned and oil has been completely removed, frictional resistance occurs between these surfaces. Since the blade has elasticity as described above, there are places where the blade reaches its limit of elongation due to this frictional resistance and places where the elongation recovers. Therefore, the state of the blade becomes unbalanced, and due to the shift in the center position of the blade and the strength of its extension, the cylindrical base body swings and vibrates during coating operation, resulting in uneven coating and uneven coating. A photoresist film could not be formed.

SUMMARY OF THE INVENTION Therefore, it is an object of the present invention to provide a photoconductor coating device in which the cylindrical substrate does not swing or vibrate during the coating operation.

(d) Means for Solving the Problems In the present invention, while the outer circumferential surface of the cylindrical base of the photoreceptor is brought into sliding contact with the inner diameter part of the ring-shaped coating liquid container, the cylindrical base is attached with spacers above and below it. The push-up device holds the lower spacer with its holding member and pushes it up.
Said painting? (1- In a photoreceptor coating device that applies the photoreceptor to a cylindrical substrate by passing the photoreceptor in the axial direction upward through the photoreceptor contained in a container, the cylindrical The present invention is characterized in that it includes a holding member that holds the base from above, and a lifting device that moves upward at the same speed as the lifting device.

(Q) Function The photoreceptor coating device according to the present invention includes a push-up device that holds and pushes up a cylindrical substrate from below in a ring-shaped coating liquid container, and a push-up device that holds the substrate from above and pushes it up. It is equipped with a hoisting device that lifts it up by rising at the same speed. Therefore, the cylindrical base body does not swing or vibrate due to unbalance of the blade at the inlet of the coating liquid container, strength of frictional resistance, scratches, etc. Therefore, a uniform photoresist film can be formed.

(f) Embodiment FIG. 1 is a schematic diagram of a photoreceptor coating apparatus according to an embodiment of the present invention. The coating liquid container 1 is ring-shaped, and the inside of the ring is coated with a cylindrical substrate 3. passes. A ring-shaped blade 11 is provided at the entrance 14 on the bottom of the corrugator 13, and the blade 11 is fixed to a blade holder lla.

A lid 12 is provided on top of the corrugator 13. The corrugator 13 does not have a wall on the inner diameter side, and instead, the cylindrical base 3 slides on the blade 11 and accommodates the photosensitive liquid 2. During the coating operation, the cylindrical base 3, the corrugator 13, Ml 2, The blade 11 constitutes the coating liquid container 1 . The cylindrical substrate does not constitute the coating liquid container 1 before or after the coating operation, but either the upper or lower spacer 5a or 5b is in close contact with the blade 11 to constitute the coating liquid container 1. The coating liquid container 1 is fixed to a frame 18 below its outer periphery. The spacer clamp 17 functions to fix the upper and lower spacers 5a or 5b in a predetermined position. A holding portion 6b of the push-up device 6 is provided below the lower spacer 5b. A feed screw 6a is connected to the holding part 6b from below, and the rotation of the motor 6C is controlled by the gear part 6e.
It is transmitted through A control circuit 6d is connected to the motor 6C. Further, a lifting device 7 is provided above the cylindrical base 3.
is installed.

A feed screw 7a is connected to the holding portion 7b of the lifting device 7 from above, and the rotation of the motor 7C is transmitted through the gear portion 7e. A control circuit 7d is connected to the motor 7C.

The holding portion 6b and feed screw 6a of the lifting device 6 and the holding portion 7b and feed screw 7a of the lifting device are provided on the same axis, and the motor 7C rotates at the same speed as the motor 6C of the lifting device 6. Immediately below the push-up device 6 is a sensor S2 that detects the sensor St on the side surface of the holding portion 6I) of the push-up device 6.
The sensor S3 disposed on the other side of the holding part 6b of
A sensor S4 for detecting is provided. The sensor S
4 detects S3, the cylindrical base 3 is connected to the spacer 5.
When the sensor S2 detects si, it is when the application of the cylindrical substrate is completed.

First, place the lower space "5a" on the holding part 6a of the push-up device 6.
are assembled, and the cylindrical base body 3 is fitted into the spacer 5b. The holding part 6a chucks and holds the cylindrical base 3 from the inside, and the pushing up device 6 holds the holding part 6a and the spacer 5b.
, pushes up the cylindrical base 3. sensor S3 is sensor S4
When lined up, 34 detects 83. At this time, the cylindrical base 3
reaches the spacer 5a fixed by the spacer clamp 17 and is fitted into it. Then, the pulling device 7 descends, and the holding part 7b holds the cylindrical base below the spacer 5a from the inside by chucking. In response to the holding completion signal, the lifting device and the pushing device 6 are further raised to perform the coating operation. The sensor S2 detects 31, the spacer clamp 17 fixes the spacer 5b, and the coating operation ends. At this time, the lifting device 7 releases the holding part 7b and rises to the uppermost end to make space for the next transfer device.Figure 2 shows a block of a part of the control part of the photoreceptor coating device. It is a diagram.

The CPU 40 includes an R○M 41 for storing programs, a RAM 42 used as a working area, and l1.
043 is connected. l1043 has sensor si,
A group of sensors 44 such as S2, S3, and s4, a control circuit 6d for the mokuro c of the lifting device, and a control circuit 7d for the motor 7c of the lifting device are connected. When the spacer and the cylindrical base are set in the holding portion of the push-up device, a sensor (not shown) of the sensor group 44 detects and outputs a signal. CPU40 is l1
043, and outputs a drive signal to the control circuit 6d of the push-up device. Further, the sensor S4 of the sensor group 44 outputs a detection signal of S3, and the CPU 40 outputs a signal l1.
043, and outputs a drive signal to the control circuit 7d of the lifting device.

Thereafter, the push-up device and the pull-up device operate at the same speed, and the holding portion of the push-up device, the cylindrical substrate, and the holding portion of the pull-up device move up together to perform coating.

FIG. 3 is a flowchart of the control operation of the pulling device of the photoreceptor coating device.

When the spacer is assembled to the holding part of the push-up device, and the cylindrical base is set thereon and held by the holding part (nl), the push-up device starts to rise (n2). When the sensor S4 detects the sensor S3 on the side surface of the holding part (n3), the cylindrical base fits into the upper spacer. At that point, the hoisting device descends n4)
The cylindrical base is held from the inside (n5). After the holding is completed, the push-up device and the pull-up device move up at the same speed while completely holding the cylindrical base from above and below (n6).

When the sensor S2 near the spacer clamp detects the sensor S1 on the side surface of the holding part of the push-up device (nl), the push-up device and the pull-up device are stopped and the coating ends (n8). The lifting device releases its hold (n9) and rises (n10), waits until the start of the next coating, and returns to n4.

(g1 Effects of the Invention As described above, according to the present invention, in a photoreceptor coating device that applies a photoresist film by passing a cylindrical substrate from bottom to top through a ring-shaped coating liquid container, the cylindrical The base body is held by the holding parts of the push-up device and the pulling device from above and below, and the push-up device and the lifting device move at the same speed.
The cylindrical base body does not swing or vibrate due to defects in the blade of the coating liquid container. Therefore, a uniform photoresist film can be formed on the outer peripheral surface of the cylindrical base of the photoreceptor.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram of a photoreceptor coating apparatus according to an embodiment of the present invention. FIG. 2 is a block diagram of a part of the control section of the photoreceptor coating device. FIG. 3 is a flow chart of the control operation of the lifting device of the photoconductor coating device. FIG. 4 is a schematic diagram of the main parts of a conventional photoreceptor coating device. 1 coating liquid container, 1 cylindrical substrate, 1 AS5B spacer, 1 push-up device, b-holding section, 1 pulling-up device, b-holding section, 1, S2, S3, S4-sensor.

Claims (1)

[Claims] (1) While the outer peripheral surface of the cylindrical base of the photoconductor is in sliding contact with the inner diameter of the ring-shaped coating liquid container, the push-up device is operated while the cylindrical base is fitted with spacers above and below. In the photoconductor coating device that applies the photosensitive liquid to the cylindrical substrate by holding and pushing up the lower spacer with a holding member and causing the photosensitive liquid stored in the coating liquid container to pass upwardly in the axial direction. A photoreceptor coating device comprising: a holding member coaxially with the holding member that holds the cylindrical substrate from above; and a lifting device that moves upward at the same speed as the lifting device.