JPH03100093U - - Google Patents
Info
- Publication number
- JPH03100093U JPH03100093U JP741390U JP741390U JPH03100093U JP H03100093 U JPH03100093 U JP H03100093U JP 741390 U JP741390 U JP 741390U JP 741390 U JP741390 U JP 741390U JP H03100093 U JPH03100093 U JP H03100093U
- Authority
- JP
- Japan
- Prior art keywords
- chucking
- chucked
- base material
- raised
- lowered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003028 elevating effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990007413U JPH077110Y2 (ja) | 1990-01-29 | 1990-01-29 | チャッキング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990007413U JPH077110Y2 (ja) | 1990-01-29 | 1990-01-29 | チャッキング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03100093U true JPH03100093U (fr) | 1991-10-18 |
JPH077110Y2 JPH077110Y2 (ja) | 1995-02-22 |
Family
ID=31511070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990007413U Expired - Lifetime JPH077110Y2 (ja) | 1990-01-29 | 1990-01-29 | チャッキング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH077110Y2 (fr) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62165887U (fr) * | 1986-04-08 | 1987-10-21 |
-
1990
- 1990-01-29 JP JP1990007413U patent/JPH077110Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62165887U (fr) * | 1986-04-08 | 1987-10-21 |
Also Published As
Publication number | Publication date |
---|---|
JPH077110Y2 (ja) | 1995-02-22 |
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