JPH0299394U - - Google Patents

Info

Publication number
JPH0299394U
JPH0299394U JP729089U JP729089U JPH0299394U JP H0299394 U JPH0299394 U JP H0299394U JP 729089 U JP729089 U JP 729089U JP 729089 U JP729089 U JP 729089U JP H0299394 U JPH0299394 U JP H0299394U
Authority
JP
Japan
Prior art keywords
base member
engagement means
reciprocating movement
linear guide
guide engagement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP729089U
Other languages
English (en)
Japanese (ja)
Other versions
JP2530450Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989007290U priority Critical patent/JP2530450Y2/ja
Publication of JPH0299394U publication Critical patent/JPH0299394U/ja
Application granted granted Critical
Publication of JP2530450Y2 publication Critical patent/JP2530450Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Machine Tool Units (AREA)
JP1989007290U 1989-01-24 1989-01-24 Ｘ・ｙテーブル Expired - Lifetime JP2530450Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989007290U JP2530450Y2 (ja) 1989-01-24 1989-01-24 Ｘ・ｙテーブル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989007290U JP2530450Y2 (ja) 1989-01-24 1989-01-24 Ｘ・ｙテーブル

Publications (2)

Publication Number Publication Date
JPH0299394U true JPH0299394U (en)) 1990-08-08
JP2530450Y2 JP2530450Y2 (ja) 1997-03-26

Family

ID=31212176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989007290U Expired - Lifetime JP2530450Y2 (ja) 1989-01-24 1989-01-24 Ｘ・ｙテーブル

Country Status (1)

Country Link
JP (1) JP2530450Y2 (en))

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002015977A (ja) * 2000-06-29 2002-01-18 Kyocera Corp 基板ホルダー

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037729A (ja) * 1983-08-10 1985-02-27 Nippon Telegr & Teleph Corp <Ntt> 試料ステ−ジ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6037729A (ja) * 1983-08-10 1985-02-27 Nippon Telegr & Teleph Corp <Ntt> 試料ステ−ジ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002015977A (ja) * 2000-06-29 2002-01-18 Kyocera Corp 基板ホルダー

Also Published As

Publication number Publication date
JP2530450Y2 (ja) 1997-03-26

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term