JPH0298639U - - Google Patents
Info
- Publication number
- JPH0298639U JPH0298639U JP735789U JP735789U JPH0298639U JP H0298639 U JPH0298639 U JP H0298639U JP 735789 U JP735789 U JP 735789U JP 735789 U JP735789 U JP 735789U JP H0298639 U JPH0298639 U JP H0298639U
- Authority
- JP
- Japan
- Prior art keywords
- power supply
- workpiece
- electrostatic force
- adsorption device
- adsorbs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 230000032258 transport Effects 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP735789U JPH0298639U (enExample) | 1989-01-25 | 1989-01-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP735789U JPH0298639U (enExample) | 1989-01-25 | 1989-01-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0298639U true JPH0298639U (enExample) | 1990-08-06 |
Family
ID=31212301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP735789U Pending JPH0298639U (enExample) | 1989-01-25 | 1989-01-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0298639U (enExample) |
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1989
- 1989-01-25 JP JP735789U patent/JPH0298639U/ja active Pending