JPH0298638U - - Google Patents
Info
- Publication number
- JPH0298638U JPH0298638U JP14472189U JP14472189U JPH0298638U JP H0298638 U JPH0298638 U JP H0298638U JP 14472189 U JP14472189 U JP 14472189U JP 14472189 U JP14472189 U JP 14472189U JP H0298638 U JPH0298638 U JP H0298638U
- Authority
- JP
- Japan
- Prior art keywords
- suction head
- head support
- support tube
- rollers
- roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14472189U JPH0298638U (enExample) | 1989-12-15 | 1989-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14472189U JPH0298638U (enExample) | 1989-12-15 | 1989-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0298638U true JPH0298638U (enExample) | 1990-08-06 |
Family
ID=31412674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14472189U Pending JPH0298638U (enExample) | 1989-12-15 | 1989-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0298638U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59101847A (ja) * | 1982-12-01 | 1984-06-12 | Seiko Instr & Electronics Ltd | 半導体ウエハの受取，受渡し装置 |
| JPS6226038B2 (enExample) * | 1979-10-04 | 1987-06-05 | Sanyo Electric Co |
-
1989
- 1989-12-15 JP JP14472189U patent/JPH0298638U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6226038B2 (enExample) * | 1979-10-04 | 1987-06-05 | Sanyo Electric Co | |
| JPS59101847A (ja) * | 1982-12-01 | 1984-06-12 | Seiko Instr & Electronics Ltd | 半導体ウエハの受取，受渡し装置 |